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Proceedings of SPIE Volume 3879

Micromachine Technology for Diffractive and Holographic Optics
Editor(s): Sing H. Lee; J. Allen Cox
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Volume Details

Volume Number: 3879
Date Published: 31 August 1999
Softcover: 24 papers (232) pages
ISBN: 9780819434760

Table of Contents
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Fabrication and properties of refractive micro-optical beam-shaping elements
Author(s): Ernst-Bernhard Kley; Lars-Christian Wittig; Matthias Cumme; Uwe D. Zeitner; Peter Dannberg
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Approximation of refractive micro-optical profiles by minimal surfaces
Author(s): Lars-Christian Wittig; Ernst-Bernhard Kley
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Mid-infrared refractive optical elements made in a polymer matrix
Author(s): Manuel Ornelas-Rodriguez; Sergio Calixto-Carrera
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Microlens array fabrication through crosslinking photopolymerization
Author(s): Celine Croutxe-Barghorn; Olivier Soppera; Daniel-Joseph Lougnot
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Fabrication of gratings on sol-gel-derived glass film by means of embossing without baking
Author(s): Yee Loy Lam; Jian Liu; Gu Tan; Yuen Chuen Chan; Yan Zhou
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Potential of dry etching for the fabrication of fused silica micro-optical elements
Author(s): Philippe Nussbaum; Kenneth J. Weible; Markus Rossi; Hans Peter Herzig
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Fabrication technique for high-aspect-ratio gratings
Author(s): Ernst-Bernhard Kley; Hans-Joerg Fuchs; Karsten Zoellner
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Fabrication of multilevel silicon diffractive lenses for terahertz frequencies
Author(s): Edward D. Walsby; R. Cheung; Richard J. Blaikie; David R. S. Cumming
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New approach for nonsilicon-micromachined three-dimensional multilevel diffractive optical elements
Author(s): Guangya Zhou; Yi-Xin Chen; Mingsheng Zhang; Xiaolin Zhao; Zongguang Wang
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Progress in gray-tone lithography and replication techniques for different materials
Author(s): Klaus Reimer; R. Engelke; Ulrich Hofmann; P. Merz; Klaus T. Kohlmann-von Platen; Bernd Wagner
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Quasi-continuous mask-coding method for fabricating diffractive optical elements
Author(s): Liping Zhao; Yee Loy Lam; Yan Zhou
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Micro stereo lithography and fabrication of 3D microdevices
Author(s): Vijay K. Varadan; Vasundara V. Varadan
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Automated-interference-lithography-based systems for generation of submicron-feature size patterns
Author(s): Douglas S. Hobbs; Bruce D. McLeod; Adam F. Kelsey; Mark A. Leclerc; Ernest Sabatino
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High-frequency gratings as polarization elements
Author(s): Margit Ferstl; Ralf Steingrueber; Daniel Dias; Svetomir Stankovic; Helmut Haidner
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High-efficiency computer-generated holograms
Author(s): Margit Ferstl; Ralf Steingrueber; Walther Fuerst; Sven Krueger; Stephan Teiwes
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Planar optical system design and fabrication
Author(s): Zhisheng Yun; Yee Loy Lam; Yuen Chuen Chan; Yan Zhou; Liping Zhao; ChinYi Liaw
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Concept for zero-alignment micro-optical systems
Author(s): Raviv Levy; Michael R. Descour; Randy J. Shul; Christi Lober Willison; Mial E. Warren; Terho K. Kololuoma; Juha T. Rantala
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Refractive microlens array integration with linear high-power semiconductor laser array
Author(s): Qingle Tang
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Influence of nonuniformity on the performance of PtSi IRCCD with refractive microlens array
Author(s): Qingle Tang
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Design and manufacture of continuous-phase diffractive optical elements for beam transforms
Author(s): Qiaofeng Tan; Yingbai Yan; Guofan Jin; Minxian Wu
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Continuous-phase diffractive optical element for uniform focal spot
Author(s): Qiaofeng Tan; Yingbai Yan; Guofan Jin; Minxian Wu
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Miniaturized achromatic hybrid objective containing LIGA-made microlenses
Author(s): Mihaela Ilie; Danut Ursu
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Replication of diffractive gratings using embossing into UV-cured photopolymers
Author(s): Niculae Dumbravescu; Mihaela Ilie
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Noise reduction in the recording of holographic masks in photoresist
Author(s): Lucila H. D. Cescato; Leandro L. Soares; Elso Luiz Rigon; Marco A.R. Alves; Edmundo S. Braga
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