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Proceedings of SPIE Volume 3876

Micromachined Devices and Components V
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Volume Details

Volume Number: 3876
Date Published: 31 August 1999
Softcover: 32 papers (312) pages
ISBN: 9780819434739

Table of Contents
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MEMS-based interferometric modulator for display applications
Author(s): Mark W. Miles
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Material-related effects on wet chemical micromachining of smart MEMS devices
Author(s): Aylin Hein; Stefan Finkbeiner; Jiri Marek; Ernst Obermeier
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Pressure and flow sensor for use in catheters
Author(s): Hans F.L. Goosen; Patrick J. French; Pasqualina M. Sarro
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Acceleration sensitivity of micromachined pressure sensors
Author(s): Richard August; Theresa Maudie; Todd F. Miller; Erik Thompson
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Wireless surface-acoustic-wave-based humidity sensor
Author(s): Richard D. Hollinger; Anikumar R. Tellakula; C.-T. Li; Vasundara V. Varadan; Vijay K. Varadan
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Advances in MEMS using SFB and DRIE technology
Author(s): Bert P. Van Drieenhuizen
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Single-crystal silicon gyroscope with decoupled drive and sense
Author(s): Scott G. Adams; James Groves; Kevin A. Shaw; Timothy J. Davis; Dan Cardarelli; Raymond Carroll; Joseph G. Walsh; Mark D. Fontanella
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Development of silicon accelerometers using epi-micromachining
Author(s): Paul T. J. Gennissen; Patrick J. French
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Programmable micro accelerometers and gyroscopes
Author(s): Vijay K. Varadan; Vasundara V. Varadan
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Analysis of noise and fluctuations in micromachined devices
Author(s): Andreas Greiner; Jan G. Korvink
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Critical comparison of design- and analysis-of-experiments methods for MEMS metamodel generation
Author(s): Selden B. Crary; Peter Cousseau; Eva H. Mok; David M. Woodcock; Philippe Renaud
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MEMS control moment gyroscope design and wafer-based spacecraft chassis study
Author(s): Joel Reiter; Karl F. Boehringer; Mark Campbell
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MEMS fixtures for handling and assembly of microparts
Author(s): Isam N. Tahhan; Yan Zhuang; Karl F. Boehringer; Kristofer S. J. Pister; Ken Goldberg
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MEMS millimeter-wave transceiver architectures
Author(s): Jung-Chih Chiao; Debabani Choudhury
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New fabrication method for high-Q on-chip spiral inductor
Author(s): Hongrui Jiang; Jer-Liang Andrew Yeh; Norman C. Tien
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Static and dynamic characterization of polysilicon surface-micromachined actuators
Author(s): Volker Laible; Paul M. Hagelin; Olav Solgaard; Ernst Obermeier
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Polymers: an excellent and increasingly used material for microsystems
Author(s): Peter Bley
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Additive electroplating technology as a new integration concept for MEMS
Author(s): Josef Binder; Wolfgang Benecke
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Parallel-plate electrostatic dual-mass resonator
Author(s): Christopher W. Dyck; James J. Allen; Robert J. Huber
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Microelectromechanical high-density energy storage/rapid release system
Author(s): M. Steven Rodgers; James J. Allen; Kent D. Meeks; Brian D. Jensen; Samuel L. Miller
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Novel thin film solid-oxide fuel cell for microscale energy conversion
Author(s): Jeffrey D. Morse; Alan F. Jankowski; Jeffrey P. Hayes; Robert T. Graff
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Production-ready silicon microvalve
Author(s): Tak K. Wang; Phillip W. Barth; Rod Alley; James Baker; David Yates; Leslie A. Field; Gary Gordon; Christopher C. Beatty; Lori Tully
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Micromachined flame ionization detector and flame spectrometer
Author(s): Stefan Zimmermann; S. Wischhusen; Joerg Mueller
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Development of novel piezoresistive sensor
Author(s): Zhongshen Lin; Weileun Fang
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Linear arrays of uncoolded poly SiGe microbolometers for IR detection
Author(s): Piet De Moor; Sherif Sedky; Deniz Sabuncuoglu; Chris A. Van Hoof
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Micro pressure sensor with submillimeter size by silicon bulk micromachining
Author(s): Lung Jieh Yang; Yih-Min Chang
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Polysilicon xylophone bar magnetometers
Author(s): Dennis K. Wickenden; John L. Champion; Robert B. Givens; Thomas J. Kistenmacher; James L. Lamb; Robert Osiander
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Bistable planar polysilicon microactuator with shallow arch-shaped leaf springs
Author(s): Jong-Hyun Lee; Myung-Hyun Lee; Won-Ick Jang; Chang-Auck Choi; Jin W. Joo
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Performance analysis of a planar vibrating microgyroscope using a dynamic model with respect to angular rate frequency
Author(s): Yoonshik Hong; Jong-Hyun Lee; Soo Hyun Kim
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Linear magnetic position sensor for automotive applications
Author(s): Zhixiang Liu; Li Tian; Jim Parham; A. Bruno Frazier
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