Share Email Print
cover

Proceedings of SPIE Volume 3825

Microsystems Metrology and Inspection
Format Member Price Non-Member Price
Softcover $105.00 * $105.00 *

*Available as a photocopy reprint only. Allow two weeks reprinting time plus standard delivery time. No discounts or returns apply.


Volume Details

Volume Number: 3825
Date Published: 15 September 1999
Softcover: 18 papers (192) pages
ISBN: 9780819433114

Table of Contents
show all abstracts | hide all abstracts
Role of interfacial properties on MEMS performance and reliability
Author(s): Maarten P. de Boer; J. A. Knapp; Thomas M. Mayer; Terry A. Michalske
Show Abstract
Wafer level inspection for determination of yield of surface-micromachined pressure sensors
Author(s): Martin Hill; Helen Berney; Bill Lane; Eamon Hynes
Show Abstract
Investigation of heat transfer in micromirrors
Author(s): Kersten Kehr; Steffen Kurth; Jan Mehner; Wolfram Doetzel; Thomas Gessner
Show Abstract
Novel optical sensors fabricated by Si micromachining
Author(s): Minoru Sasaki
Show Abstract
Preparation of oxinitride optical waveguides with piezoelectric modulation fabricated by silicon micromachining
Author(s): Christophe Gorecki
Show Abstract
Bondability of processed glass wafers
Author(s): Gregory Pandraud; Cheng-Qun Gui; Florent Pigeon; Paul V. Lambeck; Olivier M. Parriaux
Show Abstract
Shape memory alloys for micromembrane actuation
Author(s): Patrick Surbled; Bruno Le Pioufle; E. H. Yang; Hiroyuki Fujita
Show Abstract
Vibration measurement of microstructures by means of laser-optical modal analysis
Author(s): Rene Schnitzer; Norbert Ruemmler; Volker Grosser; Bernd Michel
Show Abstract
Controlling diode laser bar temperature by micro channel liquid cooling
Author(s): Katrin Unger; Dietmar Mueller; Dirk Lorenzen; Franz X. Daiminger
Show Abstract
Fiber optic probe for in-situ inspection of surface cracks in steam generator tubes
Author(s): Jose Carlos Lopez Vazquez; Angel F. Doval; Benito Vasquez Dorrio; J. Bugarin; Jose M. Alen; J. L. Fernandez; Mariano Perez-Amor; Benjamin Gonzalez Tejedor
Show Abstract
Real-time optical metrology for microsystem fabrication
Author(s): Peter Seitz
Show Abstract
NanoWalker: a fully autonomous highly integrated miniature robot for nanoscale measurements
Author(s): Sylvain M. Martel; Peter Geoffrey Madden; Luke Sosnowski; Ian Warwick Hunter; Serge Lafontaine
Show Abstract
Versatile microscopic profilometer-vibrometer for static and dynamic characterization of micromechanical devices
Author(s): Alain Bosseboeuf; Jean Paul Gilles; Kamran Danaie; Reda Yahiaoui; Michel Dupeux; Jean Pierre Puissant; Alain Chabrier; Francoise Fort; Philippe Coste
Show Abstract
Generation of thin film micro-optics by crossed deposition through wire-grid masks
Author(s): Uwe Griebner; Ruediger Grunwald
Show Abstract
Inspection of microsystems with a laser scanning microscope
Author(s): Gerd Dussler; B. Broecher; Tilo Pfeifer
Show Abstract
Qualification of optical measurement techniques for the investigation of material parameters of microcomponents
Author(s): Wolfgang Osten; Werner P. O. Jueptner; Soenke Seebacher; Torsten Baumbach
Show Abstract
Testing microcomponents by speckle interferometry
Author(s): Petra Aswendt; Roland Hoefling; Karla Hiller
Show Abstract
Digital speckle-metrology local investigations of sedimentation and surface effects in liquids
Author(s): Ilia Roussev; Todor Partalin; Evtim Toshev; Assen Choulev; Pavel I. Koulev
Show Abstract

© SPIE. Terms of Use
Back to Top