### PROCEEDINGS VOLUME 3777

Charged Particle Optics IV*This item is only available on the SPIE Digital Library.

Volume Details

Volume Number: 3777

Date Published: 15 November 1999

Date Published: 15 November 1999

Table of Contents

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Uniform large-area thermionic cathode for SCALPEL

Author(s): Victor Katsap; Peter B. Sewell; Warren K. Waskiewicz; Wei Zhu

Author(s): Victor Katsap; Peter B. Sewell; Warren K. Waskiewicz; Wei Zhu

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Uniform illumination in SCALPEL by imaging the angular distortion

Author(s): Daniel Moonen; M. David Nykerk; Pieter Kruit; Warren K. Waskiewicz

Author(s): Daniel Moonen; M. David Nykerk; Pieter Kruit; Warren K. Waskiewicz

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In-situ beam position monitoring system for electron-beam lithography

Author(s): Hitoshi Sunaoshi; Munehiro Ogasawara; Jun Takamatsu; Naoharu Shimomura

Author(s): Hitoshi Sunaoshi; Munehiro Ogasawara; Jun Takamatsu; Naoharu Shimomura

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Accurate ray tracing through finite element solved potential distributions in charged particle optics

Author(s): Zhu Aiming; Anjam Khursheed

Author(s): Zhu Aiming; Anjam Khursheed

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Quantitative aberration assessment by a through focal analysis of pattern edge sharpness

Author(s): Xieqing Zhu; Eric Munro; John A. Rouse; Haoning Liu; Warren K. Waskiewicz

Author(s): Xieqing Zhu; Eric Munro; John A. Rouse; Haoning Liu; Warren K. Waskiewicz

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Approximation method of resolution based on information-passing capacity (IPC) of an electron optical system

Author(s): Mitsugu Sato

Author(s): Mitsugu Sato

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Modeling of laminar e-beam source for SCALPEL

Author(s): Warren K. Waskiewicz; James Alexander Liddle; Victor Katsap

Author(s): Warren K. Waskiewicz; James Alexander Liddle; Victor Katsap

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3D simulation of flat-cathode electron guns with space charge

Author(s): John A. Rouse; Xieqing Zhu; Eric Munro; Haoning Liu; Warren K. Waskiewicz; Victor Katsap

Author(s): John A. Rouse; Xieqing Zhu; Eric Munro; Haoning Liu; Warren K. Waskiewicz; Victor Katsap

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Mesh-equipped Wehnelt source for SCALPEL

Author(s): Victor Katsap; Warren K. Waskiewicz; Peter B. Sewell; John A. Rouse

Author(s): Victor Katsap; Warren K. Waskiewicz; Peter B. Sewell; John A. Rouse

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Electron-beam-induced emission of electrons from insulators

Author(s): Anatoly M. Filachev; Boris I. Fouks; Dmitrii E. Greenfield

Author(s): Anatoly M. Filachev; Boris I. Fouks; Dmitrii E. Greenfield

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Simulation of multipole systems including primary and secondary aberration analysis

Author(s): Haoning Liu

Author(s): Haoning Liu

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Comparative study on magnetic variable axis lenses using electrostatic and magnetic in-lens deflectors

Author(s): Yan Zhao; Anjam Khursheed

Author(s): Yan Zhao; Anjam Khursheed

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Construction and design of a high-resolution portable scanning electron microscope column

Author(s): Anjam Khursheed

Author(s): Anjam Khursheed

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Scanning thermionic emission imaging of cathode surfaces

Author(s): Peter B. Sewell; Victor Katsap; Warren K. Waskiewicz

Author(s): Peter B. Sewell; Victor Katsap; Warren K. Waskiewicz

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SEM voltage contrast simulations

Author(s): Luca Grella; Matthew Marcus; Gian Lorusso; David L. Adler

Author(s): Luca Grella; Matthew Marcus; Gian Lorusso; David L. Adler

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High-efficiency MALDI-QIT-ToF mass spectrometer

Author(s): Li Ding; Eizoh Kawatoh; Koichi Tanaka; Alan J. Smith; Sumio Kumashiro

Author(s): Li Ding; Eizoh Kawatoh; Koichi Tanaka; Alan J. Smith; Sumio Kumashiro

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Influence of first lens on magnification optimization method in two-lens FIB optical system

Author(s): Kiyoshi Sakaguchi; Tetsu Sekine; Hiroshi Shimada

Author(s): Kiyoshi Sakaguchi; Tetsu Sekine; Hiroshi Shimada

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Compact column design for a focused ion-beam lithography system

Author(s): Qing Ji; Tsu-Jae King; Yvette Y. Lee; Ka-Ngo Leung

Author(s): Qing Ji; Tsu-Jae King; Yvette Y. Lee; Ka-Ngo Leung

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Charge-tube method for space charge in beams

Author(s): Frank H. Read; A. Chalupka; N. J. Bowring

Author(s): Frank H. Read; A. Chalupka; N. J. Bowring

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Global space charge effects in high-throughput electron-beam lithography

Author(s): Liqun Han; W. Dan Meisburger; Roger Fabian W. Pease; Gil Israel Winograd

Author(s): Liqun Han; W. Dan Meisburger; Roger Fabian W. Pease; Gil Israel Winograd

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Simulation of discrete Coulomb interactions in high-current projection and multibeam columns

Author(s): Eric Munro

Author(s): Eric Munro

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Integration of an adaptive parallel N-body solver into a particle-by-particle electron-beam interaction simulator

Author(s): David T. Blackston; James W. Demmel; Andrew R. Neureuther; Bo Wu

Author(s): David T. Blackston; James W. Demmel; Andrew R. Neureuther; Bo Wu

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Fast parallel acquisition electron energy analyzer

Author(s): Christopher G. H. Walker; Andrew Walker; Ranjan Badheka; Sumio Kumashiro; Marcus Jacka; Mohamed El Gomati; Martin Prutton; Frank H. Read

Author(s): Christopher G. H. Walker; Andrew Walker; Ranjan Badheka; Sumio Kumashiro; Marcus Jacka; Mohamed El Gomati; Martin Prutton; Frank H. Read

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Numerical ray tracing of electrons in different 3D fringing fields of spherical deflectors

Author(s): Armin Huber; Erich Plies

Author(s): Armin Huber; Erich Plies

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