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Proceedings of SPIE Volume 3680

Design, Test, and Microfabrication of MEMS and MOEMS
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Volume Details

Volume Number: 3680
Date Published: 10 March 1999
Softcover: 134 papers (1230) pages
ISBN: 9780819431547

Table of Contents
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MEMS resonator synthesis for testability
Author(s): Nilmoni Deb; Sitaraman V. Iyer; Tamal Mukherjee; Ronald D. Shawn Blanton
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Fault simulation of MEMS using HDLs
Author(s): Benoit Charlot; Salvador Mir; Erika F. Cota; Marcelo Lubaszewski; Bernard Courtois
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Testing philosophy behind the micro analysis system
Author(s): Hans G. Kerkhoff
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MEMS optimization incorporating genetic algorithms
Author(s): Gregory A. Kirkos; Robert P. Jurgilewicz; Stephen J. Duncan
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Automatic evaluation of a sensor's geometrical parameters
Author(s): Jean Philippe Blanc; Marc Belleville; Fabien Mieyeville; Hubert Bono
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Coupling of length scales and atomistic simulation of MEMS resonators
Author(s): Robert E. Rudd; Jeremy Q. Broughton
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Extraction of compact models for MEMS/MOEMS package-device codesign
Author(s): Vladimir L. Rabinovich; Joost C.C. Van Kuijk; Susan Zhang; Stephen F. Bart; John R. Gilbert
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Effects of capacitors, resistors, and residual charges on the static and dynamic performance of electrostatically actuated devices
Author(s): Edward K. Chan; Robert W. Dutton
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Optimization of cantilever probes for atomic force microscopy
Author(s): Niels F. Pedersen
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Correct-by-construction approach to MEMS design and analysis
Author(s): Barry Dyne; David A. Bernstein
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Computational simulation of microfluidics, electrokinetics, and particle transport in biological MEMS devices
Author(s): M. G. Giridharan; Soumya Krishnamoorthy; Anantha Krishnan
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Advanced integrated solution for MEMS design
Author(s): Karim Liateni; David Moulinier; Bachar Affour; H. Boutamine; Jean Michel Karam; D. Veychard; Bernard Courtois; Ariel D. Cao
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Integrated CAD tools for top-down design of MEMS/MOEMS systems
Author(s): Bart F. Romanowicz; Stephen F. Bart; John R. Gilbert
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General contact and hysteresis analysis of multidielectric MEMS devices under thermal and electrostatic actuation
Author(s): Yie He; James Marchetti; Carlos Gallegus
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Simulation of nonideal behavior in integrated piezoresistive silicon pressure sensors
Author(s): Stefan Finkbeiner; Jochen Franz; Stefan Hein; Andreas Junger; Joerg Muchow; Berhard Opitz; Wolfgang Romes; Oliver Schatz; Hans Peter Trah
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Fabrication of a smart monolithic 2D quartz microscanner
Author(s): Moussa Hoummady; L. Majewski; V. Robert; C. Bonjour; B. Chahboune
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Design of a pigtailed tunable filter for optical fiber transmissions at 1.3 to 1.55 um
Author(s): Jean-Philippe Gouy; A. Tixier; Gen Hashiguchi; Hiroshi Toshiyoshi; Hiroyuki Fujita
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Modeling and optimization of microcoils for telemetric transmission at frequencies up to 20 MHz
Author(s): Sven Rehfuss; Claudia Marschner; Karl-Ludwig Krieger; Marcus Weser; Rainer Laur
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Evaporating two-phase flow mechanism in microchannels
Author(s): Yoav P. Peles; Leonid P. Yarin; Gad Hetsroni
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Modeling and simulating optical MEMS using Chatoyant
Author(s): Timothy P. Kurzweg; Steven Peter Levitan; Philippe J. Marchand; Jose A. Martinez; Kurt R. Prough; Donald M. Chiarulli
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Interoperation of heterogeneous CAD tools in Ptolemy II
Author(s): Jie Liu; Bicheng Wu; Xiaojun Liu; Edward A. Lee
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Structured CAD methodology for integrated MEMS and IC design
Author(s): Linh Nguyen; Hee Jung Lee; Mary Ann Perez-Maher; Ying Xu
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Computational design of membrane pumps with active/passive valves for microfluidic MEMS
Author(s): Andrzej J. Przekwas; H. Q. Yang; Mahesh M. Athavale
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SUNRED: a new field solving approach
Author(s): Vladimir Szekely; A. Pahi; Marta Rencz
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Computer-aided design tools for economical MEMS fabrication processes
Author(s): Christian Schneider; Andreas Priebe; Rainer Brueck; Kai Hahn
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Providing technology infrastructure for MEMS
Author(s): Renato P. Ribas; D. Veychard; Jean Michel Karam; Bernard Courtois
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Integrated simulator for MEMS using FEM implementation in AHDL and frontal solver for large sparse systems of equations
Author(s): Zeljko Mrcarica; Vladimir Risojevic; Michel Lenczner; Mirko Jakovljevic; Vanco Litovski
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Internet MEMS design tools based on component technology
Author(s): Rainer Brueck; Christian Schumer
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CFD-ACE+: a CAD system for simulation and modeling of MEMS
Author(s): Phillip J. Stout; H. Q. Yang; Paul Dionne; Andy Leonard; Zhiqiang Tan; Andrzej J. Przekwas; Anantha Krishnan
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Advanced 3D-CAD interface for micromachining with excimer lasers
Author(s): Hans Kurt Toenshoff; Ferdinand von Alvensleben; Christian Kulik
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SPICE models for simulating BDJ and BTJ detectors
Author(s): Annick Alexandre; Guo Neng Lu; Mohamed Sedjil
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Design and implementation of integrated BDJ detector in a standard CMOS technology
Author(s): Guo Neng Lu; Gerard Sou; Mohamed Ben Chouikha; Mohamed Sedjil
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Mechanical-thermal simulation of surface-micromachined polysilicon hot plates
Author(s): Mihail M. Dumitrescu; Corbel Cobianu; Dan C. Dascalu; Adrian Pascu
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Numeric investigation of vibrating microcantilever using Matlab/Simulink
Author(s): Arturas Ulcinas; Valentinas J. Snitka; Mindaugas Rackaitis
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Lumped-parameter model for a micropump based on the magnetohydrodynamic (MHD) principle
Author(s): Lei Huang; Wanjun Wang; Michael C. Murphy
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Modeling of BDJ and BTJ structures for color detection
Author(s): Mohamed Sedjil; Guo Neng Lu; Mohamed Ben Chouikha; Annick Alexandre
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Fault modeling of electrostatic comb-drives for MEMS
Author(s): Benoit Charlot; Spiridon Moussouris; Salvador Mir; Bernard Courtois
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Design of spatial light modulator microdevices: microslit arrays
Author(s): Rainer Riesenberg; Thomas Seifert
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From circuit to microsystems: using a transformer-equivalent circuit to study a piezoelectric actuator
Author(s): F. Oms-Elisabelar; Christian Bergaud; L. Nicu
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Design and sensitivity optimization of vibration sensors for tool-state monitoring
Author(s): Jochen S. Thomas; Ralf Kuehnhold; Heiner Ryssel
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Integrated multidisciplinary CAD/CAE environment for micro-electro-mechanical systems (MEMS)
Author(s): Andrzej J. Przekwas
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Hollow glass for insulating layers
Author(s): Andreea R. Merticaru; Gabriel Moagar-Poladian
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Manufacturing of microstructures using ultraprecision machine tools
Author(s): Manfred Weck; Stephan Fischer
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Innovative molding technologies for the fabrication of components for microsystems
Author(s): Volker Piotter; Tobias Benzler; Thomas Hanemann; Heinz Woellmer; Robert Ruprecht; Juergen H. Hausselt
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Micromolding behavior of engineering plastics
Author(s): Oliver Kemmann; Carsten Schaumburg; Lutz Weber
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Microfabrication technique for thick structure of metals and PZT
Author(s): Toru Shimizu; Yoichi Murakoshi; Zhanjie Wang; Ryutaro Maeda; Toshio Sano
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Nature and influence of surface layers and films on the chemical and electrochemical micromachining of NiTi shape memory alloys
Author(s): David M. Allen; Sue A. Impey; Remi Robin; Tom T. Chen
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Examples of MEMS technologies resulting in industrial transfers
Author(s): Jean-Sebastian Danel; Michel Borel; Marie-Therese Delaye; Bernard Diem; Hubert Grange; France Michel; Patrice Rey; Sylvie Viollet-Bosson
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Optimum doses and mask thickness for synchrotron exposure of PMMA resists
Author(s): Stewart K. Griffiths; Jill M. Hruby; Aili Ting
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X-ray transmission lenses by deep x-ray lithography and LIGA technique: first results and fundamental limits
Author(s): Roland K. Kupka; Faycal Bouamrane; Marc Roulliay; Stephan Megtert
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New pattern on fabrication of fiber spinnerets by LIGA technology
Author(s): Shi Chang Tseng; C. T. Shi; Chia-Lung Kuo; Yu-chiao Cheng
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Construction and manufacturing of a microgearhead with 1.9-mm outer diameter for universal application
Author(s): Christian Thuerigen; Ulrich Beckord; Reiner Bessey
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Precision machining using UV and ultrashort-pulse lasers
Author(s): Hans Kurt Toenshoff; Ferdinand von Alvensleben; Andreas Ostendorf; Guido Willmann; Thilo Wagner
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Production of novel 3D microstructures using excimer laser mask projection techniques
Author(s): Nadeem Hasan Rizvi
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Microstereolithography using a dynamic mask generator and a noncoherent visible light source
Author(s): Serge Monneret; Virginie Loubere; Serge Corbel
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Processing of complex microsystems: a micro mass spectrometer
Author(s): Peter Siebert; G. Petzold; Joerg Mueller
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Microfabrication of biofactory-on-a-chip devices using laser ablation technology
Author(s): Mark S. Talary; Julian P.H. Burt; Nadeem Hasan Rizvi; Phil T. Rumsby; Ron Pethig
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Design, test, and simulation of self-assembled micromachined rf inductors
Author(s): Peter L. Gammel; Bradley P. Barber; Victor M. Lubecke; Nathan Belk; M. R. Frei
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Design and realization of a penny-shaped micromotor
Author(s): Matthias Nienhaus; Wolfgang Ehrfeld; H. D. Stoelting; Frank Michel; S. Kleen; S. Hardt; Felix Schmitz; T. Stange
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Silicon UV flame detector utilizing photonic crystals
Author(s): Zoran G. Djuric; Tatjana Dankovic; Zoran S. Jaksic; Danijela Randjelovic; Radomir Petrovic; Wolfgang Ehrfeld; Andreas Schmidt; Karl Heinz Hecker
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Integrated multicolor detector utilizing 1D photonic bandgap filter with wedge-shaped defect
Author(s): Zoran S. Jaksic; Radomir Petrovic; Danijela Randjelovic; Tatjana Dankovic; Zoran G. Djuric; Wolfgang Ehrfeld; Andreas Schmidt; Karl Heinz Hecker
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Fabrication of multi-air gap InP-based microstructures for widely tunable optical filters
Author(s): Alain Spisser; Philippe Regreny; Christian Seassal; Jean Louis Leclercq; Pierre Viktorovitch
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High-spatial-frequency grating technology for microsystem applications
Author(s): Olivier M. Parriaux; Florent Pigeon; Y. Jourlin; Alain Mure-Ravaud; Alexandre V. Tishchenko
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Polymeric optical MEMS
Author(s): Jens Hossfeld; Thomas Paatzsch; Jens Schulze; Michel Neumeier; Lutz Weber; Hans-Dieter Bauer; Wolfgang Ehrfeld
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Optical microsystems with microchip lasers and micro-optics
Author(s): Laurent R. Fulbert; Engin Molva; Jeannine Marty; Philippe Thony; Marc Rabarot; Bernard Ferrand
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MOEMS at LETI
Author(s): Patrick Louis Mottier; Eric Ollier; Patrick Pouteau; Karine Petroz; Sylvie Jarjayes
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Flip-chip integration of lenslet arrays on segmented deformable micromirrors
Author(s): Adisorn Tuantranont; Victor M. Bright; Wenge Zhang; Y. C. Lee
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Chip-level three-dimensional assembling of microsystems
Author(s): Hiroshi Toshiyoshi; Yoshio Mita; Minoru Ogawa; Hiroyuki Fujita
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Conventional micromachining for microassembly applications
Author(s): Ramona Eberhardt; A. Gebhardt; Torsten Scheller
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Handling and assembly of functionally adapted microcomponents (HAFAM): a European network
Author(s): Gordana Popovic; Werner Brenner; Helmut Detter
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Characterization of on-chip coils for rf microsystems
Author(s): Marcus Weser; Josef Binder; Sven Rehfuss; Rainer Laur
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Electrostatically driven micromachined nickel resonators and gyroscopes
Author(s): Olaf Renken; Wolfgang Benecke
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Multichannel arrays on polymer substrates: toward a disposable proteomics chip
Author(s): Holger Becker; Wolfgang Ehrfeld; Rainer Pommersheim
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High-precision positioning stage for microassembly purposes
Author(s): Manfred Weck; Bernd Petersen
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Infrastructure for microsystem production
Author(s): Henne van Heeren; Stefan Sanchez; Job Elders; Rene G. Heideman
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Micromachined capacitive electret microphone
Author(s): Christiane Thielemann; Gisela Hess
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Multimode frequency analysis for the dynamic characterization of microstructures
Author(s): Christian Bergaud; L. Nicu; A. Martinez; P. Gerard; M. Benzohra
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Laser diode wavelength locking using a micromachined silicon mirror
Author(s): Neila Kaou; Cedrick Chappaz; Skandar Basrour; Michel de Labachelerie
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Optical pressure sensor head fabrication using ultrathin silicon wafer anodic bonding
Author(s): Michael H. Beggans; Dentcho I. Ivanov; Steven G. Fu; Thomas G. Digges; Kenneth R. Farmer
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Silicon carbide-aluminum nitride: new high-stability composition for MEMS
Author(s): Victor V. Luchinin; Andrey V. Korlyakov; Alexander A. Vasil'ev
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Micro-EDM for silicon microstructure fabrication
Author(s): Xiaozhong Song; Dominiek Reynaerts; Wim Meeusen; Hendrik Van Brussel
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Optical fiber switching device with active alignment
Author(s): Yves-Alain Peter; Hans Peter Herzig; Stefano Bottinelli
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Microstereolithography: a new process to build complex 3D objects
Author(s): Laurence Beluze; Arnaud Bertsch; Philippe Renaud
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Fabrication of MEMS using liquid jet dispensing technique
Author(s): Sergey S. Sarkisov; Abdalla M. Darwish; Hossin Ahmed Abdeldayem; Grigory Adamovsky; Mykola B. Kulishov; Curtis E. Banks; JaChing Wang
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Laser-micromachined and laminated microfluidic components for miniaturized thermal, chemical, and biological systems
Author(s): Peter M. Martin; Dean W. Matson; Wendy D. Bennett; Donald C. Stewart; Yuehe Lin
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Backside contacts for sensor structure packaging
Author(s): Barbara Janyszek; Ryszard Jachowicz; Dorota Pijanowska; Jerzy Jazwinski
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Reactive ion etching of quartz and glasses for microfabrication
Author(s): Patrick W. Leech; Geoffrey K. Reeves
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Fabrication of single-mode optical fiber ferrule mold insert with 12 channels
Author(s): Hsiharng Yang; Michael J. Vasile
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Optical switch driven by giant magnetostrictive thin films
Author(s): Sung W. Moon; Sang Ho Lim; Sang Bae Lee; HoKwan Kang; Min Chul Kim; Seok Hee Han; Myung-Hwan Oh
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Measurement of surface profile of microstructure
Author(s): Mingbao Zhou; Linbo Bai; Zhan Li; HanMin Yao
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Rapid prototyping of silicon structures by aid of laser and abrasive-jet machining
Author(s): Arvi Kruusing; Seppo Leppaevuori; Antti Uusimaki; Matti Uusimaki
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New method to design halftone mask for the fabrication of continuous microrelief structure
Author(s): Jingqin Su; Jinglei Du; Jun Yao; Fuhua Gao; Yongkang Guo; Zheng Cui
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Experimentation of electrostatically actuated monochip micropump for drug delivery
Author(s): Monique Dilhan; Josiane Tasselli; Daniel Esteve; Pierre Temple-Boyer; Henri Camon; Marc Anduze; Stephane Colin
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Microtechnology for fabrication of surface micromechanic devices based on a novel SiC-AlN composition
Author(s): Victor V. Luchinin; Andrey V. Korlyakov; Givi I. Jandjgava; Stanislav V. Prosorov; Aleksander K. Solomatin; Anatoley V. Sorokin; Sergey G. Kucherkov; Leonid A. Severov; Valeriy K. Ponomarev
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Design, fabrication, and thrust prediction of solid propellant microthrusters for space application
Author(s): Carole Rossi; Norbert Fabre; Veronique Conedera; Daniel Esteve
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Preliminary results on the use of mirrors for LIGA process
Author(s): Stephan Megtert; Franz Josef Pantenburg; Sven Achenbach; Roland K. Kupka; Juergen Mohr; Marc Roulliay
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Needle-shaped glucose sensor with multicell electrode fabricated by surface micromachining
Author(s): Youn Tae Kim; Young-Yong Kim; Chi-Hoon Jun
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Thermal flow sensor with vacuum-sealed membrane fabricated by surface micromachining
Author(s): Chi-Hoon Jun; Suk Koon Kim; Dong-Seong Kwag; Youn Tae Kim
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Bandwidth analysis of a microgyroscope vibrating in two orthogonal axes on the substrate plane
Author(s): Yoonshik Hong; Jong-Hyun Lee; Chang Seung Lee; Won-Ick Jang; Chang-Auck Choi; Soo Hyun Kim; Yoon Keun Kwak
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Preparation and characterization of sol-gel-derived PZT thin films for microactuators
Author(s): Zhanjie Wang; Ryutaro Maeda; Kaoru M. Kikuchi
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Characteristics of residual products in HF gas-phase etching of sacrificial oxides for silicon micromachining
Author(s): Won-Ick Jang; Chang-Auck Choi; Chang Seung Lee; Yoonshik Hong; Jong-Hyun Lee
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Development of silicon microheaters for chemoresistive gas sensors
Author(s): Sebastiano Brida; Lorenza Ferrario; Flavio Giacomozzi; Domenico Giusti; Vittorio Guarnieri; Benno Margesin; Giorgio U. Pignatel; Giovanni Soncini; Alexey N. Vasil'ev; Giovanni Verzellesi; Mario Zen
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Optimization of TMAH etching for MEMS
Author(s): Sebastiano Brida; Lorenza Ferrario; Vittorio Guarnieri; Flavio Giacomozzi; Benno Margesin; Makarand Paranjape; Giovanni Verzellesi; Mario Zen
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Fatigue test of thin film materials on a silicon chip using resonating loading system
Author(s): Taeko Ando; Tetsuo Yoshioka; Mitsuhiro Shikida; Kazuo Sato
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Stress-induced curvature engineering in surface-micromachined devices
Author(s): Vladimir A. Aksyuk; Flavio Pardo; David J. Bishop
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Characterization of silicon cantilevers with integrated pyramidal metal tips in atomic force microscopy
Author(s): Thomas Hantschel; Robert Stephenson; Thomas Trenkler; Peter De Wolf; Wilfried Vandervorst
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Acoustic characterization of TiO2 film for humidity sensors applications
Author(s): Cinzia Caliendo; Enrico Verona
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Mass separation using thin PTFE membranes
Author(s): Zeno Rummler; Walter Bacher; Volker Saile; Werner K. Schomburg
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Applied electrostatic parallelogram actuators for microwave switches by standard CMOS process
Author(s): Kaihsiang Yen; Chienliu Chang; Peizen Chang; Jinghung Chiou; Jenn-Yi Chen; Hunghsuan Lin
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Patterning and bonding of TiNi shape memory thin film for fabrication of micropump
Author(s): Eiji Makino; Takashi Mitsuya; Tae Nakatsuji; Takayuki Shibata
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Production of movable metallic microstructures by aligned hot embossing and reactive ion etching
Author(s): Oliver Roetting; Bernd Koehler; Frank-Joachim Reuther; Hartmut Blum; Walter Bacher
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Thermal microactuator characterization
Author(s): Jacques Jonsmann; Siebe Bouwstra
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Silicon hillocks elimination using a complexant redox alkaline system
Author(s): Carmen Moldovan; Rodica Iosub; Dan C. Dascalu; Gheorghe Nechifor; Cornelia-Carmen Danila
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Stress-compensated metal stencil masks for selective deposition in microelectronics, micromechanics, and optoelectronics
Author(s): Niculae Dumbravescu
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Biomimetic photoreceptor
Author(s): Andreea R. Merticaru
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Electrochemical etching of silicon in aqueous solutions
Author(s): David Starosvetsky; Mark Kovler; Joseph Yahalom
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New method for reduction of corner undercutting in anisotropic KOH etching, and applications to MEMS and MOEMS
Author(s): Neila Kaou; Jean Claude Jeannot; Michel de Labachelerie
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DEM technique: a new three-dimensional microfabrication technique for nonsilicon materials
Author(s): Di Chen; Dacheng Zhang; Guifu Ding; Xiaolin Zhao; Jilin Zhang; Cunsheng Yang; Bingchu Cai
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Fabrication of thin film resistors and silicon microstructures using a frequency-doubled Nd:YAG laser
Author(s): Alexander Wogersien; Stefan Dauer; Stephanus Buettgenbach
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Positional accuracy study of a micro-EDM machine
Author(s): Heather J. A. Almond; Jagmohan Bhogal; David M. Allen
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Microfabrication of diamond probe for atomic force microscope
Author(s): Takayuki Shibata; Tae Nakatsuji; Yasutaka Kitamoto; Kazuya Unno; Eiji Makino
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Effect of polysilicon interface on stress in multistacked polysilicon films
Author(s): Chang-Auck Choi; Chang Seung Lee; Won-Ick Jang; Jong-Hyun Lee; Byung-Ki Shon
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Micromachined photonic integrated circuits for sensor applications: experimental results
Author(s): Dana Cristea; Raluca Muller; Ioan Pavelescu
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Integration of SnO2 sol-gel processes to gas sensor microfabrication: H2 and CO sensitivity evaluation
Author(s): Corbel Cobianu; Raluca Iorgulescu; Cristian Savaniu; Antonela Dima; Dan C. Dascalu; Pietro Siciliano; Simona Capone; Roberto Rella; Fabio Quaranta; Lorenzo Vasanelli
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Electrochemical microreactor
Author(s): Marin Gheorghe; Dan C. Dascalu; Mihaela Ghita
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Characterization of porous silicon for solar cell application by atomic force microscopy
Author(s): I. Simkiene; Valentinas J. Snitka; Kestutis Naudzius; Vaidas Pacebutas; Mindaugas Rackaitis
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Characterization of conductive probes for atomic force microscopy
Author(s): Thomas Trenkler; Thomas Hantschel; Wilfried Vandervorst; Louis Hellemans; Wilhelm Kulisch; Egbert Oesterschulze; Philippe Niedermann; T. Sulzbach
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Microwave planar lumped circuit elements on micromachined thin dielectric membranes
Author(s): Sergiu A. Iordanescu; Alexandru Mueller; Romolo Marcelli; G. Bartolucci; Ioana Petrini; Dan Vasilache; Viorel Avramescu
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MEMS for space applications
Author(s): Linda M. Miller
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Physical modeling and simulation of microdevices and microsystems
Author(s): Gerhard Wachutka
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Design of MEMS and microsystems
Author(s): David J. Nagel
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III-V semiconductor-based MOEMS
Author(s): Pierre Viktorovitch
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Surface normal optical MEMS in dynamic WDM transport networks
Author(s): James A. Walker; Joseph Earl Ford; Keith W. Goossen; David J. Bishop; Dennis S. Greywall; Vladimir A. Aksyuk
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Prospective MEMS applications at NEC
Author(s): Kenichiro Suzuki
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