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PROCEEDINGS VOLUME 3619

Surface Characterization for Computer Disks, Wafers, and Flat Panel Displays
Editor(s): John C. Stover
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Softcover $105.00 * $105.00 *

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Volume Details

Volume Number: 3619
Date Published: 29 March 1999
Softcover: 14 papers (144) pages
ISBN: 9780819430892

Table of Contents
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Cross-linking thin film characterization technique for data storage, semiconductor, and flat panel display devices
Author(s): Iris Bloomer; Dale A. Harrison; Shiva Prakash; Kai Zhang; Sean Lian
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Measurements of thin film disks by surface reflectance analysis
Author(s): David Klein; Gerard H. Vurens
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Composition and thickness distribution of carbon overcoat films on thin film magnetic disks studied with surface reflectance analyzers
Author(s): Gerard H. Vurens; David Klein
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Analysis of organic contaminants from silicon wafer and disk surfaces by thermal desorption-GC-MS
Author(s): Mark J. Camenzind; Latif Ahmed; Anurag Kumar
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MR glide inspection for hard disk defect detection
Author(s): Michael E. Boyd; Xiaopeng Xu
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Modeled and measured scatter from vias
Author(s): John C. Stover; Craig A. Scheer; Vladimir I. Ivakhnenko; Yuri A. Eremin; Natalia Grishina
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Measurement of scatter from PSL standard spheres deposited on disk surfaces
Author(s): Craig A. Scheer; John C. Stover
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Polarization of light scattered by particles on silicon wafers
Author(s): Lipiin Sung; George W. Mulholland; Thomas A. Germer
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High-speed interferometric aluminum disk blank tester
Author(s): Artur G. Olszak; Ken Stumpe; Raymond M. Copenhaver; George Z. Angeli
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Laser Fizeau interferometer for silicon wafer site flatness testing
Author(s): Erik Novak; Artur G. Olszak; Ken Stumpe; Robert E. Knowlden; Leonid Malevanchik; George Z. Angeli
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Investigations of smooth surfaces by measuring the BRDF with a stray light sensor in comparison with PSD curves evaluated from topography of large AFM scans
Author(s): Hendrik Rothe; Dorothee Hueser; Andre Kasper; Thomas Rinder
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Roughness characterization of ultrasmooth surfaces using common-path interferometry
Author(s): Baishi Wang; S. P. Marchese-Ragona; Thomas C. Bristow
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TIS, AFM, interferometry, and optical profiler correlation of surface roughness on silicon wafers
Author(s): Patrick A. Taylor; Dean J. Dawson
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BeamM2AP: real-time focus, alignment, and M2 measurement of tightly focussed laser beams
Author(s): Andrew D. MacGregor; Steven E. Garvey
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