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Proceedings of SPIE Volume 3618

Laser Applications in Microelectronic and Optoelectronic Manufacturing IV
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Volume Details

Volume Number: 3618
Date Published: 15 July 1999
Softcover: 57 papers (546) pages
ISBN: 9780819430885

Table of Contents
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Interferometric lithography for nanoscale fabrication
Author(s): Saleem H. Zaidi; Steven R. J. Brueck
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Optical nanoprobes for SNOM based on laser technology
Author(s): Vadim P. Veiko; Nikolay B. Voznesensky; Igor B. Smirnov; Alexey I. Kalachev; Dmitry I. Ivanitski; Juriy M. Voronin; Michael Wolf; Krassimira Meteva
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Laser-induced electronic bond breaking and structural changes on semiconductor surfaces
Author(s): Katsumi Tanimura; Jun'ichi Kanasaki
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Pulse-width influence on laser-induced desorption of positive ions from ionic solids
Author(s): Richard M. Williams; Kenneth M. Beck; Alan G. Joly; J. Thomas Dickinson; Wayne P. Hess
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Mechanistic studies and applications of laser-induced desorption from metal surfaces
Author(s): Johannes Bosbach; Dietrich Martin; Frank Stietz; Thomas Wenzel; Frank Traeger
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Direct mesoscopic simulation of melting and evaporation
Author(s): Takashi Yabe
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Optical detection of laser plasma interaction during laser ablation
Author(s): Minghui Hong; Yongfeng Lu
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Vibrational excitation and relaxation processes in insulators initiated by ultrashort mid-infrared laser pulses
Author(s): Richard F. Haglund; R. Cramer; David R. Ermer; Michael R. Papantonakis; Hee K. Park; Oguz Yavas
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Material processing of dielectrics with femtosecond lasers
Author(s): David Ashkenasi; Arkadi Rosenfeld
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Micromachining with ultrashort laser pulses
Author(s): Jianxin Zhao; Bernd Huettner; Arnd Menschig
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Photoinduced and grating alignment of polyimide using excimer lasers for liquid crystal displays
Author(s): Christopher J. Newsome; Mary O'Neill; Guy P. Bryan-Brown
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Three-dimensional microscopic modifications in glasses by a femtosecond laser
Author(s): Kiyotaka Miura; Jianrong Qiu; Tsuneo Mitsuyu; Kazuyuki Hirao
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Fiber Bragg grating writing by interferometric or phase mask methods using high-power excimer lasers
Author(s): Eric E. Mayer; David A. Gillett; Sergei V. Govorkov
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Modification in optical fibers using high-intensity femtosecond lasers
Author(s): Sung-Hak Cho; Hiroshi Kumagai; Katsumi Midorikawa; Minoru Obara
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Laser-induced nonthermal surface modification of aluminum
Author(s): David P. Taylor; Henry Helvajian
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Semiconductor laser array fabricated by Nd:YAG laser-induced quantum well intermixing
Author(s): Jan J. Dubowski; G. Marshall; Yan Feng; Philip J. Poole; Charles Lacelle; Joan E. Haysom; N. Sylvain Charbonneau; Margaret Buchanan
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Time- and space-resolved imaging and numerical simulation of laser zone texturing of Ni-P disk substrates
Author(s): Shaochen Chen; Mengqi Ye; Constantine P. Grigoropoulos
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Thermal and optical properties of semitransparent ceramics: laser-induced high-temperature modifications
Author(s): Olga G. Tsarkova; Serge V. Garnov; Vitali I. Konov; E. N. Lubnin; Friedrich Dausinger
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Laser applications in the electronics and optoelectronics industry in Japan
Author(s): Kunihiko Washio
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Advanced-laser processing of photonic and microelectronic components at Photonics Research Ontario
Author(s): Peter R. Herman; Gregory Goodno; Xijia Gu; Jeff B. Kalbfleisch; John Long; Marc Lukacs; Robin S. Marjoribanks; R. J. Dwayne Miller; Marc Nantel; Sola Ness; Anton Oettl
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Excimer laser micromachining: a 15-year perspective
Author(s): Malcolm C. Gower
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Laser welding of functional and constructional ceramics for microelectronics
Author(s): Horst Exner; Anne-Maria Nagel
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Laser surface cleaning of electronic materials
Author(s): Yongfeng Lu; Wen Dong Song; Y. Zhang; Yuan Wei Zheng
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Excimer laser cleaning for microelectronics: modeling, applications, and challenges
Author(s): Michel Meunier; Xiaoguang Wu; Felix Beaudoin; Edward Sacher; Martine Simard-Normandin
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Transient temperature measurement of amorphous silicon thin films during excimer laser annealing
Author(s): Seung-Jae Moon; Ming-Hong Lee; Mutsuko Hatano; Kenkichi Suzuki; Constantine P. Grigoropoulos
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Correlation between power density fluctuation and grain size distribution of laser-annealed polycrystalline silicon
Author(s): Kenkichi Suzuki; Masakazu Saitou; Michiko Takahashi; Nobuaki Hayashi; Takao Terabayashi
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Lattice strain in excimer-laser-crystallized poly-Si thin films
Author(s): Hiroshi Okumura; Akio Tanikawa; Kenji Sera; Fujio Okumura
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Laser direct writing of circuit elements and sensors
Author(s): Alberto Pique; Douglas B. Chrisey; Raymond C. Y. Auyeung; Samuel Lakeou; Russell Chung; Robert Andrew McGill; P. K. Wu; Michael T. Duignan; J. M. Fitz-Gerald; H. D. Wu
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Microstructuring of materials by pulsed-laser focusing and projection technique
Author(s): Horst Exner; Bernd Keiper; Peter Meja
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High-accuracy micromachining of ceramics by frequency-tripled Nd:YAG lasers
Author(s): Dirk Hellrung; Li-Ya Yeh; Frank Depiereux; Arnold Gillner; Reinhart Poprawe
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UV laser ablation of ultrathin dielectric layers
Author(s): Katharina Rubahn; Juergen Ihlemann; Frank Balzer; Horst-Guenter Rubahn
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Micromachining of glass materials by laser-induced plasma-assisted ablation (LIPAA) using a conventional nanosecond laser
Author(s): Jie Zhang; Koji Sugioka; Katsumi Midorikawa
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Overview of the user program for the Jefferson Lab free-electron laser
Author(s): H. Frederick Dylla
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High-power ultraviolet all-solid-state laser for industrial applications
Author(s): Christoph Mehlmann; Thomas Schroeder; Peter Klopp; R. Koch; Uwe Stamm; Dirk Basting
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Efficiency increase for laser structuring using mask projection
Author(s): Knut Jasper; Peter Berger; Helmut Huegel
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Condensation of vapor and nanoclusters formation within the vapor plume produced by nanosecond laser ablation of Si, Ge, and C
Author(s): Boris S. Luk'yanchuk; W. Marine; Sergei I. Anisimov; G. A. Simakina
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Pulsed laser deposition of nanocomposite thin films for photonic applications
Author(s): Carmen N. Afonso Rodriguez; J. Solis; R. Serna; Jose A. Gonzalo de los Reyes; J. M. Ballesteros; J. C. G. de Sande
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Semiconductor nanocrystallite formation using inert gas ambient pulsed laser ablation and its application to light-emitting devices
Author(s): Takehito Yoshida; Yuka Yamada; Nobuyasu Suzuki; Toshiharu Makino; Takaaki Orii; Seinosuke Onai
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Advances in pulsed laser deposition growth of nitride thin films
Author(s): Felix E. Fernandez; Manuel Pumarol; Antonio Martinez; Weiyi Jia; Yanyung Wang; Edgardo Rodriguez; Houssam A. Mourad
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Pulsed laser deposition of high-quality tribological coatings
Author(s): Gouri Radhakrishnan; Paul M. Adams; Donna M. Speckman
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Pulsed-laser-deposited amorphous diamond and related materials: synthesis, characterization, and field emission properties
Author(s): Vladimir I. Merkulov; Douglas H. Lowndes; Larry R. Baylor; Gerald E. Jellison; Alexander A. Puretzky; David B. Geohegan
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Emission spectra and particle ejection during visible laser ablation of graphite for diamondlike coatings
Author(s): Jim J. Chang; William McLean; Ernest P. Dragon; Bruce E. Warner
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Atom projector: basic concept, construction, and applications
Author(s): Nikolay M. Sovetov; Anatoly V. Nikonov; Dmitry A. Grigoriev; Andrey V. Khobotov; Victor A. Moskovsky; Elena V. Naumova
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Second harmonic of Ti:sapphire femtosecond laser as a possible tool for pointlike 3D optical information recording
Author(s): Nikita M. Bityurin; Alexey I. Korytin; Sergey V. Muraviov; Alexander M. Yurkin
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Laser texturing processes by reflected light detection
Author(s): Weijie Wang; Yongfeng Lu; Minghui Hong
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Fabrication of true 3D microstructures in glass/ceramic materials by pulsed UV laser volumetric exposure techniques
Author(s): Peter D. Fuqua; Siegfried W. Janson; William W. Hansen; Henry Helvajian
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Concurrent in-line inspection system for CO2 laser drilling machine
Author(s): Makoto Kato; Nobuhiro Araki; Kazuhide Isaji; Hidehiko Karasaki
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Laser direct dry etching of GaAs/AIGaAs multilayer
Author(s): SeKi Park; Cheon Lee; Eun Kyu Kim
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Maskless laser-induced deposition of Cu film patterns from copper formate
Author(s): Jaehwan Kim; Cheon Lee
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Electrical and optical properties of ITO films deposited by excimer-laser-assisted EB method
Author(s): Tetsuo Yano; Masafumi Yoneda; Toshihiko Ooie; Munehide Katsumura; Yoshifumi Suzaki; Tomokazu Shikama
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Reliability and lifetime of UV excilamps pumped by glow, barrier, and capacitive discharges
Author(s): Victor F. Tarasenko; Evgenii B. Chernov; Mikhail V. Erofeev; Alexei N. Panchenko; Victor S. Skakun; Edward A. Sosnin
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Spectroscopic energy characterization of laser-induced titanium plume
Author(s): Schubert S. Chu; Mengqi Ye; Constantine P. Grigoropoulos
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Pulsed laser deposition of Ti:sapphire thin films using high-speed rotating target
Author(s): Yoshiki Nakata; Hiroshi Uetsuhara; Satoshi Goto; Nilesh J. Vasa; Tatsuo Okada; Mitsuo Maeda
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Crystallinities and light-emitting properties of nanostructured SiGe alloy prepared by pulsed laser ablation in inert background gases
Author(s): Takehito Yoshida; Yuka Yamada; Nobuyasu Suzuki; Toshiharu Makino; Takaaki Orii; Kouichi Murakami; David B. Geohegan; Douglas H. Lowndes; Michael J. Aziz
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Properties of boron-carbon-nitrogen ternary thin films synthesized by pulsed laser deposition
Author(s): ZhongMin Ren; Yongfeng Lu; ZhiHong Mai; B. A. Cheong; S. K. Chow; Jian Ping Wang; Tow Chong Chong
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Planarization of hexagonal-GaN(0001) by KrF excimer-laser ablation followed by hydrochloric acid treatment
Author(s): Toshimitsu Akane; Koji Sugioka; Hiroshi Ogino; Hiroshi Takai; Katsumi Midorikawa
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Microstructuring with 157-nm laser light
Author(s): Heinrich Endert; Michael Kauf; Eric E. Mayer; Michael J. Scaggs; John H. Fair; Dirk Basting
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