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Proceedings of SPIE Volume 3514

Micromachined Devices and Components IV
Editor(s): Patrick J. French; Kevin H. Chau
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Volume Details

Volume Number: 3514
Date Published: 8 September 1998
Softcover: 45 papers (448) pages
ISBN: 9780819429735

Table of Contents
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Micro-electro-optical devices in a five-level polysilicon surface-micromachining technology
Author(s): James H. Smith; M. Steven Rodgers; Jeffry J. Sniegowski; Samuel L. Miller; Dale L. Hetherington; Paul J. McWhorter; Mial E. Warren
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Wafer bonding with an adhesive coating
Author(s): Gerhard Klink; Bernhard Hillerich
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Simultaneous fabrication of dielectric and electric joints by wafer bonding
Author(s): Andreas Drost; Gerhard Klink; Sabine Scherbaum; Michael Feil
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Stress analysis for the optimization of a new plastic package for optical sensors
Author(s): Carmen V. B. Cotofana; Andre Bossche; Jeff R. Mollinger; P. Kaldenberg
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Vacuum maintenance in hermetically sealed MEMs packages
Author(s): Alessio Corazza; Richard C. Kullberg
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Chemical imaging sensor for observation of microscopic pH distribution
Author(s): Motoi Nakao; Satoshi Nomura; Shuji Takamatsu; Katsuhiko Tomita; Tatsuo Yoshinobu; Hiroshi Iwasaki
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Acoustic wave chemical microsensors in GaAs
Author(s): Stephen A. Casalnuovo; Edwin J. Heller; Vincent M. Hietala; Albert G. Baca; Richard J. Kottenstette; Susan L. Hietala; John L. Reno; Gregory C. Frye-Mason
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Technological modules for on-chip integration of sensors with electronics
Author(s): A. Goetz; Carles Cane
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Thin film front protection of CMOS wafers against KOH
Author(s): Ulrich Munch; Niklaus Schneeberger; Oliver Paul; Henry Baltes; Elko Doering
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MEMS actuators based on smart film materials
Author(s): Eckhard Quandt
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Three-dimensional active microcatheter combining shape memory alloy actuators and direct-drive tubular electrostatic micromotors
Author(s): Gilles Bourbon; Patrice Minotti; Philippe Langlet; Takahisa Masuzawa; Hiroyuki Fujita
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Performance of MEMS-based gas distribution and control systems for semiconductor processing
Author(s): Albert K. Henning; John Fitch; James M. Harris; Errol B. Arkilic; Brad A. Cozad; Ben Dehan
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Characterization techniques for surface-micromachined devices
Author(s): William P. Eaton; Norman F. Smith; Lloyd W. Irwin; Danelle M. Tanner
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Micromachined scanning Fabry-Perot interferometer
Author(s): Paul M. Zavracky; K. L. Denis; H. K. Xie; Thomas E. Wester; Paul L. Kelley
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Micromachined angular rate sensor MARS-RR
Author(s): Wolfram Geiger; Martin Kieninger; Michael Pascal; Bernd Folkmer; Walter Lang
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Comparison between an optical and a capacitive transducer for a novel multiaxial bulk-micromachined accelerometer
Author(s): Gerold Schropfer; Michel de Labachelerie
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Two-axis detection resonant accelerometer based on rigidity change
Author(s): Osamu Tabata; Takeshi Yamamoto
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Micromachined high Q inductors for high-frequency applications
Author(s): Jae Yeong Park; Mark G. Allen
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Wideband microwave switch by micromachining techniques
Author(s): Chienliu Chang; Peizen Chang; Kaihsiang Yen; Sheyshi Lu
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CMOS resonant sensors
Author(s): Oliver Brand; Mark Hornung; Dirk Lange; Henry Baltes
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Long-term stability of membrane transducers for proximity sensing
Author(s): Mark Hornung; Oliver Brand; Oliver Paul; Henry Baltes
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Microresonant devices for power conversion
Author(s): J. Mark Noworolski; Seth R. Sanders
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Fish-bone-structured acoustic sensor toward silicon cochlear systems
Author(s): Muneo Harada; Naoki Ikeuchi; Shoichi Fukui; Shigeru Ando
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Integrated mixed-technology design environment to support micro-electro-mechanical systems development
Author(s): Jean Michel Karam; Bernard Courtois; Ariel D. Cao; K. Hofmann
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Efficient process development for bulk silicon etching using cellular automata simulation techniques
Author(s): James Marchetti; Yie He; Olaf Than; Sandeep Akkaraju
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Polysilicon for everything?
Author(s): M. C. L. Ward; Mark E. McNie; Robert J.T. Bunyan; David O. King; Roger Timothy Carline; Rebecca Wilson; J. P. Gillham
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Solder-bonded micromachined capacitive pressure sensors
Author(s): Berthold Rogge; David Moser; Hermann H. Oppermann; Oliver Paul; Henry Baltes
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Self-aligned polysilicon MEMS-reduced mask count surface micromachining
Author(s): J. Mark Noworolski; Seth R. Sanders
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Acoustic wavelet analysis using micro-electro-mechanical sensors
Author(s): Markus Mueller; Hiroshi Toshiyoshi; Hiroyuki Fujita
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Micromachined inductive displacement sensor
Author(s): Thomas Velten; Peter Krause; D. Stefan; Ernst Obermeier
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Microprobes for highly localized cooling/heating applications
Author(s): Lei Huang; Wanjun Wang; Michael C. Murphy
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MEMS-based resonating xylophone bar magnetometers
Author(s): Dennis K. Wickenden; Robert B. Givens; Robert Osiander; John L. Champion; Douglas A. Oursler; Thomas J. Kistenmacher
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Shear sensitive silicon piezoresistive tactile sensor prototype
Author(s): Lin Wang; David J. Beebe
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Fabrication of micro torsional actuator using surface plus bulk micromachining processes
Author(s): Jerwei Hsieh; Weileun Fang
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Piezoresistive effect: stable enough for high-accuracy sensor applications?
Author(s): Gerald Gerlach; Arne Nakladal; Reinhard Buchhold; Kurt Baumann
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Fabrication of a stainless steel microchannel microcombustor using a lamination process
Author(s): Dean W. Matson; Peter M. Martin; Anna Lee Y. Tonkovich; Gary L. Roberts
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Fabrication of micromachined microwave couplers by CMOS process
Author(s): Chienliu Chang; Jinhong Chio; Kaihsiang Yen; Peizen Chang; Sheyshi Lu
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Micromachined gas detector based on self-aligned ionization tips
Author(s): Bahram Ghodsian; Marek Syrzycki; M. Parameswaran
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Micromachined 2D array piezoelectrically actuated flextensional transducers: new designs
Author(s): Gokhan Percin; Butrus T. Khuri-Yakub
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Hybrid microdosing system
Author(s): Nam-Trung Nguyen; Stefan Richter; Jan Mehner; Steffen Schubert; Wolfram Doetzel; Thomas Gessner
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First micromachined silicon load cell for loads up to 1000 kg
Author(s): Henk Wensink; Meint J. de Boer; Remeo J. Wiegerink; Robert A.F. Zwijze; Miko C. Elwenspoek
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Characterization techniques for surface-micromachined devices
Author(s): William P. Eaton; Norman F. Smith; Lloyd W. Irwin; Danelle M. Tanner
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Microassembly technologies for MEMS
Author(s): Michael B. Cohn; Karl F. Boehringer; J. Mark Noworolski; Angad Singh; Chris G. Keller; Kenneth A. Goldberg; Roger T. Howe
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Finding markets for microstructures
Author(s): James W. Knutti
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Micromachining technologies for miniaturized communication devices
Author(s): Clark T.-C. Nguyen
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