Share Email Print

Proceedings of SPIE Volume 3513

Microelectronic Structures and MEMS for Optical Processing IV
Format Member Price Non-Member Price
Softcover $105.00 * $105.00 *

*Available as a photocopy reprint only. Allow two weeks reprinting time plus standard delivery time. No discounts or returns apply.

Volume Details

Volume Number: 3513
Date Published: 2 September 1998
Softcover: 24 papers (248) pages
ISBN: 9780819429728

Table of Contents
show all abstracts | hide all abstracts
Novel beam-steering micromirror device
Author(s): R. Wayne Fuchs; Hubert Jerominek; Nicholas R. Swart; Yacouba Diawara; Mario Lehoux; Ghislain Bilodeau; Simon Savard; Felix Cayer; Yves Rouleau; Patrick Lemire
Show Abstract
Optical characteristics of GaAs MSM photodetectors flip-chip bonded upon micromirrors using micromachined conductive polymer bumps
Author(s): Kwang Wook Oh; Chong Hyuk Ahn; Kenneth P. Roenker
Show Abstract
Modeling and measurement of electrostatic micromirror array fabricated with single-layer polysilicon micromachining technology
Author(s): Young-Hoon Min; Yong-Kweon Kim
Show Abstract
Design and fabrication of micromirror array with hidden joint structures
Author(s): Chang-Hyeon Ji; Yong-Kweon Kim
Show Abstract
Highly sensitive hydrogen sensors using palladium-coated fiber optics with exposed cores and evanescent field interactions
Author(s): Massood Tabib-Azar; Boonsong Sutapun; Rose Petrick; Alex A. Kazemi
Show Abstract
Micromachined structure for Si transmission optical components
Author(s): Minoru Sasaki; Yuji Arai; Hitoshi Takebe; Wataru Kamada; Kazuhiro Hane
Show Abstract
Design and experiment of microelectrode arrays for deformable membrane mirror
Author(s): Chienliu Chang; Peizen Chang; Kaihsiang Yen
Show Abstract
Micro-optical distance sensor fabricated by the LIGA process
Author(s): Hajime Nakajima; Patrick Ruther; Juergen Mohr; Toshiro Nakashima; Kazuo Takashima; Teruo Usami
Show Abstract
Laser amplifiers in optical displays and micromachining systems
Author(s): Gueorgii G. Petrash; Vladimir V. Chvykov; Konstantin I. Zemskov
Show Abstract
Fabrication of replicated high-precision insert elements for micro-optical bench arrangements
Author(s): Helmut Schift; Juergen Soechtig; Fredy Glaus; A. Vonlanthen; S. Westenhoefer
Show Abstract
Optical coupling analysis and vibration characterization for packaging of 2X2 MEMS vertical torsion mirror switches
Author(s): Long-Sun Huang; Shi-sheng Lee; M. Edward Motamedi; Ming C. Wu; Chang-Jin Kim
Show Abstract
Silicon wafer-scale microfabrication factory using scanning probe microrobots: applications of MOEMS in manufacturing
Author(s): Massood Tabib-Azar; Morton Litt
Show Abstract
Extremely high aspect ratio metal structures for suspension of a micro-optical shutter
Author(s): Allan P. Hui; Risaku Toda; Masayoshi Esashi
Show Abstract
Design and fabrication of hidden-spring-structure-type micro-SLM for phase and amplitude modulation
Author(s): Seok-Whan Chung; Yong-Kweon Kim
Show Abstract
Package for systematic design of acousto-optic deflectors
Author(s): Bizhan Rashidian; Babak Zarin-Rafie
Show Abstract
High-brightness projection display systems based on the thin-film actuated mirror array (TFAMA)
Author(s): Kyu-Ho Hwang; Myung-Kwon Koo; Sang-Gook Kim
Show Abstract
Reshaping technique for MOEM system fabrication
Author(s): Murat M. Okyar; Xiqing Sun; William N. Carr
Show Abstract
Characterization of micro-opto-electro-mechanical devices
Author(s): Mahyar S. Dadkhah; Amit Burstein; M. Edward Motamedi; Sangtae Park
Show Abstract
XY-stage for alignment of optical elements in MOEMS
Author(s): Yves-Alain Peter; Hans Peter Herzig; Stefano Bottinelli
Show Abstract
MOEM pressure and other physical sensors using photon tunneling and optical evanescent fields with exponential sensitivities and excellent stabilities
Author(s): Massood Tabib-Azar; Boonsong Sutapun
Show Abstract
Applications of shape-memory alloys in MOEMS and in optics
Author(s): Boonsong Sutapun; Massood Tabib-Azar; Michael A. Huff
Show Abstract
Microassembly technologies for MEMS
Author(s): Michael B. Cohn; Karl F. Boehringer; J. Mark Noworolski; Angad Singh; Chris G. Keller; Kenneth A. Goldberg; Roger T. Howe
Show Abstract
Finding markets for microstructures
Author(s): James W. Knutti
Show Abstract
Micromachining technologies for miniaturized communication devices
Author(s): Clark T.-C. Nguyen
Show Abstract

© SPIE. Terms of Use
Back to Top