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Proceedings of SPIE Volume 3275

Flatness, Roughness, and Discrete Defects Characterization for Computer Disks, Wafers, and Flat Panel Displays II
Editor(s): John C. Stover
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Volume Details

Volume Number: 3275
Date Published: 1 April 1998
Softcover: 22 papers (194) pages
ISBN: 9780819427144

Table of Contents
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Novel method for beam collimation using multiple-beam shearing interferometry
Author(s): Kiyofumi Matsuda; Maitreyee Roy; Pal W. Fekete; Tomoaki Eiju; Colin J. R. Sheppard; John W. O'Byrne
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New software algorithm of 3D surface profile measurement based on phase-shift interfering technology
Author(s): Bo Liu; Jianying Fan; Ling Yang; Qi-Shan Wang
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New 3D surface profile measurement based on phase-shift interfering technology
Author(s): Bo Liu; Ling Yang; Jianying Fan; Jian Zhang
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Electrostatically actuated stylus profiler with capacitive displacement sensing in vertical and lateral directions
Author(s): Mike D. Kearny; Burford J. Furman
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Round robin determination of power spectral densities of different Si wafer surfaces
Author(s): Egon Marx; Igor J. Malik; Yale E. Strausser; Thomas C. Bristow; Noel S. Poduje; John C. Stover
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Comparison of surface PSDs calculated from both AFM profiles and scatter data
Author(s): John C. Stover; Vladimir I. Ivakhnenko; Craig A. Scheer
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Statistical process control by employing circular and spherical statistics for the interpretation of BRDF measurements
Author(s): Hendrik Rothe; Dorothee Hueser; Andre Kasper
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Characteristics of a high-resolution displacement sensor using mode interference in the optical waveguide
Author(s): Yutaka Iwasaki; Masaaki Doi; Takashi Shionoya; Kazuya Okamoto
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X-ray scanner for the visualization of the spatial distribution of nanometer-scale roughness
Author(s): Vladimir V. Protopopov; Kamil A. Valiev; Rafik M. Imamov
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Characterization of laser zone texture with laser Doppler vibrometry
Author(s): Evan F. Cromwell; Johann Adam; Bryan Clark; David D. Saperstein
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Measurement on roughness of optical surface by focal plane CCD camera
Author(s): Jianbai Li; Xiaoyun Li; Aihan Ying; Anqing Zao; Xiaolin Zhang
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Surface particle detection for the 0.07-um generation and beyond
Author(s): Benjamin D. Buckner; Lakkapragada Suresh; E. Dan Hirleman
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Comparison of models and measurements of scatter from surface-bound particles
Author(s): Craig A. Scheer; John C. Stover; Vladimir I. Ivakhnenko
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Modeling of scatter from small pits of arbitrary shape
Author(s): Vladimir I. Ivakhnenko; Craig A. Scheer; John C. Stover
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Application of bidirectional ellipsometry to the characterization of roughness and defects in dielectric layers
Author(s): Thomas A. Germer
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Analysis and characterization of In-film defects generated during sputter deposition of aluminum-alloy films
Author(s): Murali Abburi; Vikram Pavate; Sunny Chiang; Keith Hansen; Glen Mori; Murali K. Narasimhan; Sesh Ramaswami; Jaim Nulman; Daryl Restaino
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Use of new technology for enhanced detection of crystalline defects on silicon wafers
Author(s): Lie Dou; Daniel Kesler; Richard Grose
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Scanning auger microscopy characterization of magnetic hard disks
Author(s): Jeffrey R. Kingsley; David W. Harris; D. L. Neiman; Jingyu Huang
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Rapid and accurate determination of transparency, conductivity, etchability, patternability, and manufacturability of ITO films
Author(s): D. Bloom; George G. Li; Kai Zhang; A. Rahim Forouhi; Iris Bloomer
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Neural network approach to rapid thin film characterization
Author(s): Nickhil H. Jakatdar; Xinhui Niu; Costas J. Spanos
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Novel DUV photoresist modeling by optical thin film decomposition from spectral ellipsometry/reflectometry data
Author(s): Xinhui Niu; Nickhil H. Jakatdar; Costas J. Spanos
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High-accuracy detection and data processing of NRRO of spindle motor for HDD
Author(s): Zhonglei Fan; Jiangming Ni; Yiseng Huang; Xiaokun Zhu
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