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Proceedings of SPIE Volume 3225

Microlithography and Metrology in Micromachining III
Editor(s): Craig R. Friedrich; Akira Umeda
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Softcover $105.00 * $105.00 *

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Volume Details

Volume Number: 3225
Date Published: 2 September 1997
Softcover: 14 papers (142) pages
ISBN: 9780819426574

Table of Contents
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Accurate force measurements for miniature mechanical systems: a review of progress
Author(s): Lowell P. Howard; Joseph Fu
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Mechanical properties of microstructures: experiments and theory
Author(s): Jurg Dual; Edoardo Mazza; Gilbert Schiltges; Dirk H. Schlums
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MEMS metrology station based on two interferometers
Author(s): Adolfo O. Gutierrez; Daniel M. Edmans; Gernot Seidler; Michelle D. Simkulet; Steven C. Aceto; Eric Westervelt; Michael Burrage; Chris Cormeau
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Measuring frequency response of surface-micromachined resonators
Author(s): William D. Cowan; Victor M. Bright; George C. Dalton
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Visualization of high-frequency surface acoustic wave propagation using stroboscopic phase-shift interferometry
Author(s): Ken Nakano; Akihiro Torii; Kazuhiro Hane; Shigeru Okuma
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Modeling of stress-induced curvature in surface-micromachined devices
Author(s): William D. Cowan; Victor M. Bright; Alex A. Elvin; David A. Koester
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High-precision positioning stages for micro- and nanolithography
Author(s): Donald Croft; Santosh Devasia
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Engineering tool set for monolithic and hybrid microsystem design
Author(s): H. Boutamine; Jean Michel Karam; Bernard Courtois; P. Drake; J. Oudinot; H. El Tahawi; Ariel D. Cao; Marta Rencz; Andras Poppe; Vladimir Szekely
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Analysis and enhancement of bond strength of acrylic sheets to metallic substrates for use in LIGA-type processing
Author(s): Supipta S. Das; Harish M. Manohara; Chantal G. Khan Malek
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Potentials for inspection and metrology of MEMS using a combined scanning electron microscope (SEM) and proximal probe microscope (PPM)
Author(s): Michael T. Postek
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Cost-effective mask fabrication on Kapton membrane for deep x-ray lithography
Author(s): Stefan Stadler; I. Derhalli; Chantal G. Khan Malek
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Integrated micromachined transmission lines and endfire slotline antennas
Author(s): Steven S. Gearhart; Theodore L. Willke; Eko N. Onggosanusi
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One-step microlithography
Author(s): Franz-Josef Kahlen; Srikanth Sankaranarayanan; Aravinda Kar
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Photofabrication of the third dimension of NiTi shape memory alloy microactuators
Author(s): David M. Allen; Tony Leong; Siang H. Lim; Manfred Kohl
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