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Proceedings of SPIE Volume 2877

Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III
Editor(s): Damon K. DeBusk; Ray T. Chen
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Volume Details

Volume Number: 2877
Date Published: 13 September 1996
Softcover: 23 papers (228) pages
ISBN: 9780819422750

Table of Contents
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Determination of COP distribution after SC1 cleaning by a laser particle counter
Author(s): T. Fujise; Y. Yanase; M. Hourai; M. Sano; Hideki Tsuya
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Optical characterization of amorphous and polycrystalline silicon films
Author(s): Effiong Ibok; Shyam Garg; George G. Li; A. Rahim Forouhi; Iris Bloomer; Joel W. Ager
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Optical field effect transistor with an indium tin oxide gate electrode
Author(s): J. B. Fodje; D. Mukherjee; Cyril A. Hogarth
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Study of cathodoluminescence spectroscopy of aluminum nitride
Author(s): Fazla Rabbi M.B. Hossain; Xiao Tang; Kobchat Wongchotigul; Michael G. Spencer
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Morphology, composition, and properties of the amorphous hydrogenated carbon (C:H) films
Author(s): Valerie A. Ligachov; Anatolyi I. Popov; Sergei N. Stuokach
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Semiconductor surface superlattice symmetry type evaluation
Author(s): Yuri Kornienko; Alexander P. Fedtchouk; Ruslana A. Rudenko
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Nematic thin layer self-organization caused by semiconductor surface superlattice
Author(s): Alexander P. Fedtchouk; Ruslana A. Rudenko; Larisa D. Shevchenko; Yuri Kornienko
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Formation of oxygen-related donors during transition from thermal donors to new donors in CZ-silicon
Author(s): Shyam Singh; Om Prakash
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Thermal wave analysis of the formation of titanium disilicide on submicron lines
Author(s): Alain Brun; Eric Gerritsen; Nicole Brun
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Low-temperature photoluminescence characterization of impurity-doped GaAs and silicides prepared by molecular beam epitaxy, high-energy ion implantation, and combined ion-beam and molecular beam epi
Author(s): Yunosuke Makita
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Automated visual inspection stations for next-generation semiconductor package quality control
Author(s): Mark R. DeYong; Thomas C. Eskridge; John W. Grace; Jeff E. Newberry; J. H. Jones; B. E. Hart
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Polymer waveguide-based 1-GHz clock signal distribution system
Author(s): Ting Li; Suning Tang; Feiming Li; Michael Dubinovsky; Linghui Wu; Randy W. Wickman; Ray T. Chen
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Grating-based surface-normal optoelectronic interconnects on Si substrate
Author(s): Feiming Li; Michael Dubinovsky; Oleg A. Ershov; Linghui Wu; Ting Li; Suning Tang; Ray T. Chen
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Novel double-focus interferometer for scanning force microscope
Author(s): Yongmo Zhuo; Xu-Dong Mou; Yongying Yang; Bin Cao
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Combined spectroscopic ellipsometry and reflectometry for advanced semiconductor fabrication metrology
Author(s): William A. McGahan; Blaine R. Spady; John A. Iacoponi; John D. Williams
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Stark effect: a novel method of characterization of low-dimensional heterostructure semiconductor lasers
Author(s): B. S. V. Gopalam
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Metal-induced charge and growth rate of ultrathin thermal oxide films grown on Al or Fe contaminated Si (100) surfaces
Author(s): Hirofumi Shimizu; Alison Shull; Chusuke Munakata
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Implementing surface photo-voltage in manufacturing
Author(s): Martine Simard-Normandin
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Electron emission phenomena controlled by a transverse electric field in compound emitters
Author(s): Jadwiga Olesik; Bogdan Calusinski; Zygmunt Olesik
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Real-time preparation-free imaging of mobile charge in SiO2
Author(s): Lubek Jastrzebski; Piotr Edelman; Jacek J. Lagowski; Andrew M. Hoff; A. Savchouk; Eric Persson
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Spectrophotometry and beam profile reflectometry measurement of six layers in an SOI film stack
Author(s): JingMin Leng; John J. Sidorowich; Y. D. Yoon; Jon L. Opsal; B. H. Lee; Giho Cha; Joo-Tae Moon; Sang-In Lee
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Productivity improvement through industrial engineering in the semiconductor industry
Author(s): Doron Meyersdorf
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