### Proceedings of SPIE Volume 2858

Charged-Particle Optics IIFormat | Member Price | Non-Member Price |
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Softcover | $105.00 * | $105.00 * |

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Volume Details

Volume Number: 2858

Date Published: 25 October 1996

Softcover: 16 papers (184) pages

ISBN: 9780819422460

Date Published: 25 October 1996

Softcover: 16 papers (184) pages

ISBN: 9780819422460

Table of Contents

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100-kV electron gun for the x-ray mask writer EB-X2

Author(s): Kenichi Saito; Junichi Kato; Nobuo Shimazu; Akira Shimizu

Author(s): Kenichi Saito; Junichi Kato; Nobuo Shimazu; Akira Shimizu

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Quasi-conformal finite-element mesh generation for electron gun simulation

Author(s): Anjam Khursheed; Yao Pei

Author(s): Anjam Khursheed; Yao Pei

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Use of the first-order FEM for the computation of magnetic electron lenses

Author(s): Bohumila Lencova; Michal Lenc

Author(s): Bohumila Lencova; Michal Lenc

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Optical properties of immersion objective lenses and collimation of secondary electrons in low-voltage SEM

Author(s): Katsushige Tsuno; Nobuo Handa; Sunao Matsumoto; A. Mogami

Author(s): Katsushige Tsuno; Nobuo Handa; Sunao Matsumoto; A. Mogami

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Accurate computation of higher multipole components of electrostatic and magnetic deflectors with the first-order FEM

Author(s): Bohumila Lencova; Michal Lenc

Author(s): Bohumila Lencova; Michal Lenc

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Field function evaluation techniques for electron lenses and deflectors

Author(s): Xieqing Zhu; Haoning Liu; John A. Rouse; Eric Munro

Author(s): Xieqing Zhu; Haoning Liu; John A. Rouse; Eric Munro

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Interactive design of multicomponent systems

Author(s): Michael Andrianus Johannes van der Stam; Jim Edmond Barth; Pieter Kruit

Author(s): Michael Andrianus Johannes van der Stam; Jim Edmond Barth; Pieter Kruit

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Improved 3D boundary charge method

Author(s): Hidekazu Murata; Toshimi Ohye; Hiroshi Shimoyama

Author(s): Hidekazu Murata; Toshimi Ohye; Hiroshi Shimoyama

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High-order interpolation methods for finite-element solved potential distributions in the two-dimensional rectilinear coordinate system

Author(s): Anjam Khursheed

Author(s): Anjam Khursheed

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Perturbation methods in field and transfer matrix calculation: an extension of analytical methods in electron optics

Author(s): Mikhail Igorevitch Yavor

Author(s): Mikhail Igorevitch Yavor

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Improved resolution in field-emission lithography machines

Author(s): Tom Chisholm; Bernard A. Wallman; Haoning Liu; Eric Munro; John A. Rouse; Xieqing Zhu

Author(s): Tom Chisholm; Bernard A. Wallman; Haoning Liu; Eric Munro; John A. Rouse; Xieqing Zhu

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Electronic image adjustment device for e-beam lithography

Author(s): Warren K. Waskiewicz

Author(s): Warren K. Waskiewicz

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Influence of aperture position in focused ion-beam systems on statistical Coulomb interaction effects

Author(s): Pieter Kruit; Xinrong Jiang

Author(s): Pieter Kruit; Xinrong Jiang

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Numerical analysis of pencils of rays in a point cathode thermionic emission gun

Author(s): Ryo Iiyoshi

Author(s): Ryo Iiyoshi

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