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Proceedings of SPIE Volume 2858

Charged-Particle Optics II
Editor(s): Eric Munro
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Volume Details

Volume Number: 2858
Date Published: 25 October 1996
Softcover: 16 papers (184) pages
ISBN: 9780819422460

Table of Contents
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100-kV electron gun for the x-ray mask writer EB-X2
Author(s): Kenichi Saito; Junichi Kato; Nobuo Shimazu; Akira Shimizu
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Quasi-conformal finite-element mesh generation for electron gun simulation
Author(s): Anjam Khursheed; Yao Pei
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Use of the first-order FEM for the computation of magnetic electron lenses
Author(s): Bohumila Lencova; Michal Lenc
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Optical properties of immersion objective lenses and collimation of secondary electrons in low-voltage SEM
Author(s): Katsushige Tsuno; Nobuo Handa; Sunao Matsumoto; A. Mogami
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Accurate computation of higher multipole components of electrostatic and magnetic deflectors with the first-order FEM
Author(s): Bohumila Lencova; Michal Lenc
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Field function evaluation techniques for electron lenses and deflectors
Author(s): Xieqing Zhu; Haoning Liu; John A. Rouse; Eric Munro
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Achromatic deflection system
Author(s): Lubov A. Baranova; Stella Y. Yavor
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Interactive design of multicomponent systems
Author(s): Michael Andrianus Johannes van der Stam; Jim Edmond Barth; Pieter Kruit
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Improved 3D boundary charge method
Author(s): Hidekazu Murata; Toshimi Ohye; Hiroshi Shimoyama
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High-order interpolation methods for finite-element solved potential distributions in the two-dimensional rectilinear coordinate system
Author(s): Anjam Khursheed
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Perturbation methods in field and transfer matrix calculation: an extension of analytical methods in electron optics
Author(s): Mikhail Igorevitch Yavor
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Improved resolution in field-emission lithography machines
Author(s): Tom Chisholm; Bernard A. Wallman; Haoning Liu; Eric Munro; John A. Rouse; Xieqing Zhu
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Electronic image adjustment device for e-beam lithography
Author(s): Warren K. Waskiewicz
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Influence of aperture position in focused ion-beam systems on statistical Coulomb interaction effects
Author(s): Pieter Kruit; Xinrong Jiang
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Numerical analysis of pencils of rays in a point cathode thermionic emission gun
Author(s): Ryo Iiyoshi
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New theoretical approach to the self-coordinated problem in charged-particle optics
Author(s): Mikhail A. Monastyrski; Victor A. Tarasov; Anatoly M. Filachev
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