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Proceedings of SPIE Volume 2687

Miniaturized Systems with Micro-Optics and Micromechanics
Editor(s): M. Edward Motamedi
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Volume Details

Volume Number: 2687
Date Published: 8 March 1996
Softcover: 18 papers (176) pages
ISBN: 9780819420619

Table of Contents
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Recent achievements on MOEM systems at Micromachine Center (MMC)
Author(s): Ryo Ohta
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Micromirror arrays for active optical aberration control
Author(s): Steven C. Gustafson; Theresa A. Tuthill; Edward A. Watson
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Fabrication of microlenses by combining silicon technology, mechanical micromachining and plastic molding
Author(s): Uwe Koehler; Andreas E. Guber; W. Bier; Mathias Heckele; Thomas Schaller
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Miniaturized optical switches based on piezoelectrically driven microprism arrays
Author(s): Rolf Goering; Steffen Gloeckner; Frank Bohrisch
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Realizing micro-opto-electro-mechanical devices through a commercial surface-micromachining process
Author(s): Victor M. Bright; John H. Comtois; Darren E. Sene; J. Robert Reid; Steven C. Gustafson; Edward A. Watson
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Magnetically actuated MEMS scanning mirror
Author(s): Raanan A. Miller; Geoffrey W. Burr; Yu-Chong Tai; Demetri Psaltis
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Actuation of polysilicon surface-micromachined mirrors
Author(s): Norman C. Tien; Meng-Hsiung Kiang; Michael J. Daneman; Olav Solgaard; Kam Y. Lau; Richard S. Muller
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Analysis of optical beam steering using phased micromirror arrays
Author(s): Edward A. Watson; Angela R. Miller
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FPAs and thin film binary optic microlens integration
Author(s): M. Edward Motamedi; William E. Tennant; Robert Melendes; Natalie S. Gluck; Sangtae Park; Jose M. Arias; Jagmohan Bajaj; John G. Pasko; William V. McLevige; Majid Zandian; Randolph L. Hall; Karla G. Steckbauer; Patti D. Richardson; Donald E. Cooper
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Optical network of silicon micromachined sensors
Author(s): Mark L. Wilson; David W. Burns; J. David Zook
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Microjet printing of anamorphic microlens arrays
Author(s): Weldon Royall Cox; Ting Chen; Daryl W. Ussery; Donald J. Hayes; R. F. Hoenigman; Duncan L. MacFarlane; Emmanuil M. Rabinovich
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Design and fabrication issues in the development of monolithic micro-optical systems
Author(s): Charles M. Egert; Slobodan Rajic
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Micro-size ball lenses for micro-optics: theory and experiment
Author(s): Long Yang; Kok Wai Chang; Gary R. Trott; Richard P. Ratowsky; Robert J. Deri; Jeffrey S. Kallman
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Planar gradient-index cylindrical microlenses: flexible components for laser diode applications
Author(s): Rolf Goering; Torsten Possner; Peter Schreiber
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Novel method for making parabolic grating
Author(s): Bo Chen; Lurong Guo; Jiyue Tang; Ping Xu; Ming-bao Zhou
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Fabrication of microlens arrays by reactive ion milling
Author(s): Haluk O. Sankur; Randolph L. Hall; M. Edward Motamedi; William J. Gunning; William E. Tennant
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Aspherization of cylindrical lenses by laser irradiation
Author(s): Vadim P. Veiko; Alexander T. Shakola; Evgeny B. Yakovlev; E. A. Shahno
Monolithically integrated refractive microlens standing perpendicular to the substrate
Author(s): Charles King; Lih-Yuan Lin; Ming C. Wu
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