### PROCEEDINGS VOLUME 2642

Micromachined Devices and ComponentsFormat | Member Price | Non-Member Price |
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Softcover | $105.00 * | $105.00 * |

*Available as a black-and-white photocopy reprint only. Allow two weeks reprinting time plus standard delivery time. No discounts or returns apply.

Volume Details

Volume Number: 2642

Date Published: 15 September 1995

Softcover: 33 papers (306) pages

ISBN: 9780819420084

Date Published: 15 September 1995

Softcover: 33 papers (306) pages

ISBN: 9780819420084

Table of Contents

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Thermal microactuators for surface-micromachining processes

Author(s): John H. Comtois; Victor M. Bright; Mark W. Phipps

Author(s): John H. Comtois; Victor M. Bright; Mark W. Phipps

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Mechanical and optical characterization of thermal microactuators fabricated in a CMOS process

Author(s): Britton C. Read; Victor M. Bright; John H. Comtois

Author(s): Britton C. Read; Victor M. Bright; John H. Comtois

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Three-dimensional structures for micro-optical mechanical systems in standard CMOS

Author(s): Ezekiel J. Kruglick; Shirish Damle; Kristofer S. J. Pister

Author(s): Ezekiel J. Kruglick; Shirish Damle; Kristofer S. J. Pister

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Measurement of static friction in mechanical couplings of articulated microrobots

Author(s): Richard Yeh; Kristofer S. J. Pister

Author(s): Richard Yeh; Kristofer S. J. Pister

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Measured forces and displacements of integrated force arrays

Author(s): Scott H. Goodwin-Johansson; Stephen M. Bobbio; Charles Bartlett; Nadeem Eleyan; James Jacobson; Joseph E. Mancusi; Lindsey Yadon; Christian Ball; Thomas D. DuBois; William D. Palmer; David G. Vellenga; Farid M. Tranjan

Author(s): Scott H. Goodwin-Johansson; Stephen M. Bobbio; Charles Bartlett; Nadeem Eleyan; James Jacobson; Joseph E. Mancusi; Lindsey Yadon; Christian Ball; Thomas D. DuBois; William D. Palmer; David G. Vellenga; Farid M. Tranjan

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Design, fabrication, and characterization of electrostatic microrelays

Author(s): Shuvo Roy; Mehran Mehregany

Author(s): Shuvo Roy; Mehran Mehregany

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Silicon membrane gyroscope with electrostatic actuation and sensing

Author(s): David Wood; George Cooper; James S. Burdess; Alun J. Harris; Jane L. Cruickshank

Author(s): David Wood; George Cooper; James S. Burdess; Alun J. Harris; Jane L. Cruickshank

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Thick-polysilicon-based surface micromachined capacitive accelerometer with force-feedback operation

Author(s): Beatrice Wenk; J. Ramos-Martos; M. Fehrenbach; P. Lange; Michael Offenberg; Werner Riethmuller

Author(s): Beatrice Wenk; J. Ramos-Martos; M. Fehrenbach; P. Lange; Michael Offenberg; Werner Riethmuller

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Monolithic multiple axis accelerometer design in standard CMOS

Author(s): Brett Warneke; Eric G. Hoffman; Kristofer S. J. Pister

Author(s): Brett Warneke; Eric G. Hoffman; Kristofer S. J. Pister

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Silicon micromachined gas chromatographic system (SMGCS) for directly separating binary fugitive emissions of ammonia (NH3) and nitrigen dioxide (NO2)

Author(s): Edward S. Kolesar; Rocky R. Reston

Author(s): Edward S. Kolesar; Rocky R. Reston

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Micromachined hydrocarbon-based gas sensors

Author(s): Ashok Srivastava; Naveen George; J. Cherukuri

Author(s): Ashok Srivastava; Naveen George; J. Cherukuri

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Heart cell contractions measured using a micromachined polysilicon force transducer

Author(s): Gisela Lin; Kristofer S. J. Pister; Kenneth P. Roos

Author(s): Gisela Lin; Kristofer S. J. Pister; Kenneth P. Roos

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Microfabricated sensors for the measurement of electromagnetic fields in biological tissues

Author(s): James Monberg; Albert K. Henning

Author(s): James Monberg; Albert K. Henning

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Rapid prototyping of a micro pump with laser micromachining

Author(s): C. Channy Wong; Dahwey Chu; Sally L. Liu; Melanie R. Tuck; Zahid Mahmud; Vincent A. Amatucci

Author(s): C. Channy Wong; Dahwey Chu; Sally L. Liu; Melanie R. Tuck; Zahid Mahmud; Vincent A. Amatucci

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Smart electronics and MEMS for aerospace structures

Author(s): Vijay K. Varadan; Vasundara V. Varadan

Author(s): Vijay K. Varadan; Vasundara V. Varadan

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Design of an inductive proximity sensor using a two-coil planar transformer

Author(s): Vikas Gupta; Dean P. Neikirk

Author(s): Vikas Gupta; Dean P. Neikirk

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Multiaxis microcoil sensors in standard CMOS

Author(s): Beverley Eyre; Kristofer S. J. Pister; Walter Gekelman

Author(s): Beverley Eyre; Kristofer S. J. Pister; Walter Gekelman

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Finite element modeling microelectromechanical structures for sensing applications

Author(s): James T. Stewart

Author(s): James T. Stewart

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CAD framework concept for the design of integrated microsystems

Author(s): Andras Poppe; Marta Rencz; Vladimir Szekely; Jean Michel Karam; Bernard Courtois; K. Hofmann; M. Glesner

Author(s): Andras Poppe; Marta Rencz; Vladimir Szekely; Jean Michel Karam; Bernard Courtois; K. Hofmann; M. Glesner

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Microelectromechanical gyroscope: analysis and simulation using SPICE electronic simulator

Author(s): Amit Burstein; William J. Kaiser

Author(s): Amit Burstein; William J. Kaiser

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Finite element modeling of the dynamic response of a MEMS sensor

Author(s): Young-Hun Lim; Vasundara V. Varadan; Vijay K. Varadan

Author(s): Young-Hun Lim; Vasundara V. Varadan; Vijay K. Varadan

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Micromachined Fabry-Perot cavity pressure transducer with optical fiber interconnects

Author(s): Youngmin Kim; Dean P. Neikirk

Author(s): Youngmin Kim; Dean P. Neikirk

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ARROW-based integrated optical pressure sensors

Author(s): Kamel Benaissa; Arokia Nathan

Author(s): Kamel Benaissa; Arokia Nathan

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Characterization of a surface micromachined pressure sensor array

Author(s): William P. Eaton; James H. Smith

Author(s): William P. Eaton; James H. Smith

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Effect of machine parameters on polymer die attach dispense and a method to optimize them

Author(s): Dave S. Mahadevan

Author(s): Dave S. Mahadevan

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Biodriven microsystem for treatment of hydrocephalus

Author(s): Jurgen Joswig; Jens Oswald; Steffen Seifert

Author(s): Jurgen Joswig; Jens Oswald; Steffen Seifert

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3DuV: a MEMS 3D visualization package

Author(s): Nanping R. Lo; Kristofer S. J. Pister

Author(s): Nanping R. Lo; Kristofer S. J. Pister

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Projection displays and MEMS: timely convergence for a bright future

Author(s): Larry J. Hornbeck

Author(s): Larry J. Hornbeck

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