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Proceedings of SPIE Volume 2642

Micromachined Devices and Components
Editor(s): Ray M. Roop; Kevin H. Chau
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Volume Details

Volume Number: 2642
Date Published: 15 September 1995
Softcover: 33 papers (306) pages
ISBN: 9780819420084

Table of Contents
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Thermal microactuators for surface-micromachining processes
Author(s): John H. Comtois; Victor M. Bright; Mark W. Phipps
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Mechanical and optical characterization of thermal microactuators fabricated in a CMOS process
Author(s): Britton C. Read; Victor M. Bright; John H. Comtois
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Three-dimensional structures for micro-optical mechanical systems in standard CMOS
Author(s): Ezekiel J. Kruglick; Shirish Damle; Kristofer S. J. Pister
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Measurement of static friction in mechanical couplings of articulated microrobots
Author(s): Richard Yeh; Kristofer S. J. Pister
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Measured forces and displacements of integrated force arrays
Author(s): Scott H. Goodwin-Johansson; Stephen M. Bobbio; Charles Bartlett; Nadeem Eleyan; James Jacobson; Joseph E. Mancusi; Lindsey Yadon; Christian Ball; Thomas D. DuBois; William D. Palmer; David G. Vellenga; Farid M. Tranjan
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Design, fabrication, and characterization of electrostatic microrelays
Author(s): Shuvo Roy; Mehran Mehregany
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Silicon membrane gyroscope with electrostatic actuation and sensing
Author(s): David Wood; George Cooper; James S. Burdess; Alun J. Harris; Jane L. Cruickshank
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Thick-polysilicon-based surface micromachined capacitive accelerometer with force-feedback operation
Author(s): Beatrice Wenk; J. Ramos-Martos; M. Fehrenbach; P. Lange; Michael Offenberg; Werner Riethmuller
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Monolithic multiple axis accelerometer design in standard CMOS
Author(s): Brett Warneke; Eric G. Hoffman; Kristofer S. J. Pister
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Chemical gas sensors on silicon
Author(s): Henry G. Hughes
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Silicon micromachined gas chromatographic system (SMGCS) for directly separating binary fugitive emissions of ammonia (NH3) and nitrigen dioxide (NO2)
Author(s): Edward S. Kolesar; Rocky R. Reston
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Micromachined hydrocarbon-based gas sensors
Author(s): Ashok Srivastava; Naveen George; J. Cherukuri
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Heart cell contractions measured using a micromachined polysilicon force transducer
Author(s): Gisela Lin; Kristofer S. J. Pister; Kenneth P. Roos
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Microfabricated sensors for the measurement of electromagnetic fields in biological tissues
Author(s): James Monberg; Albert K. Henning
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Static micromixer built up in silicon
Author(s): Norbert Schwesinger; Thomas Frank
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Rapid prototyping of a micro pump with laser micromachining
Author(s): C. Channy Wong; Dahwey Chu; Sally L. Liu; Melanie R. Tuck; Zahid Mahmud; Vincent A. Amatucci
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Smart electronics and MEMS for aerospace structures
Author(s): Vijay K. Varadan; Vasundara V. Varadan
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Design of an inductive proximity sensor using a two-coil planar transformer
Author(s): Vikas Gupta; Dean P. Neikirk
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Multiaxis microcoil sensors in standard CMOS
Author(s): Beverley Eyre; Kristofer S. J. Pister; Walter Gekelman
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Finite element modeling microelectromechanical structures for sensing applications
Author(s): James T. Stewart
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Linearization techniques for capacitive sensors
Author(s): Barun K. Kar; Eric Joseph
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CAD framework concept for the design of integrated microsystems
Author(s): Andras Poppe; Marta Rencz; Vladimir Szekely; Jean Michel Karam; Bernard Courtois; K. Hofmann; M. Glesner
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Microelectromechanical gyroscope: analysis and simulation using SPICE electronic simulator
Author(s): Amit Burstein; William J. Kaiser
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Finite element modeling of the dynamic response of a MEMS sensor
Author(s): Young-Hun Lim; Vasundara V. Varadan; Vijay K. Varadan
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Micromachined Fabry-Perot cavity pressure transducer with optical fiber interconnects
Author(s): Youngmin Kim; Dean P. Neikirk
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ARROW-based integrated optical pressure sensors
Author(s): Kamel Benaissa; Arokia Nathan
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Characterization of a surface micromachined pressure sensor array
Author(s): William P. Eaton; James H. Smith
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Effect of machine parameters on polymer die attach dispense and a method to optimize them
Author(s): Dave S. Mahadevan
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Packaging of MEMS devices
Author(s): Albert K. Hu; Evan D. Green
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Biodriven microsystem for treatment of hydrocephalus
Author(s): Jurgen Joswig; Jens Oswald; Steffen Seifert
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3DuV: a MEMS 3D visualization package
Author(s): Nanping R. Lo; Kristofer S. J. Pister
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Projection displays and MEMS: timely convergence for a bright future
Author(s): Larry J. Hornbeck
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Recent trends in silicon micromachining technology
Author(s): John H. Jerman
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