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Proceedings of SPIE Volume 2641

Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications
Editor(s): Wayne Bailey; M. Edward Motamedi; Fang-Chen Luo
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Volume Details

Volume Number: 2641
Date Published: 13 September 1995
Softcover: 18 papers (160) pages
ISBN: 9780819420077

Table of Contents
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Review of the current status of CRT technologies
Author(s): Hua-Sou Tong; Chun-Min Hu
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Micromachined three-dimensional tunable Fabry-Perot etalons
Author(s): Lih-Yuan Lin; J. L. Shen; Shi-sheng Lee; Ming C. Wu
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Design and fabrication of ARROW thermo-optic modulators
Author(s): Kamel Benaissa; Y. Lu; Arokia Nathan
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Active interference filters using silicon-compatible materials
Author(s): D. P. Poenar; Patrick J. French; Reinoud F. Wolffenbuttel
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Realization of FDDI optical bypass switches using surface micromachining technology
Author(s): Shi-sheng Lee; Lih-Yuan Lin; Ming C. Wu
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Simulation and fabrication of ARROW directional couplers
Author(s): Kamel Benaissa; Arokia Nathan; Sai Tak Chu; Wei-Ping Huang
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Piezoelectric fiber optic modulators and microtubes
Author(s): Glen R. Fox; Claude A.P. Muller; Matthius Kuhn; Nava J. Setter; Nguyen Hong Ky; Hans G. Limberger
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Projection display systems based on the Digital Micromirror Device (DMD)
Author(s): Jack M. Younse
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Implementation of hexagonal micromirror arrays as phase-mostly spatial light modulators
Author(s): John H. Comtois; Victor M. Bright; Steven C. Gustafson; M. Adrian Michalicek
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Fabrication of micromirror supported by electroplated nickel posts
Author(s): Jong-Woo Shin; Seok-Whan Chung; Yong-Kweon Kim; Eun-Ho Lee; Beom-Gyu Choi; Se-Jin Ahn
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MEMS arrays for deformable mirrors
Author(s): Raji Krishnamoorthy; Thomas G. Bifano
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Fabrication issues for silicon backplane active matrix miniature liquid crystal display
Author(s): Ian Underwood; D. C. Burns; I. D. Rankine; D. J. Bennett; James D. Gourlay; Anthony O'Hara; David G. Vass
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Gas-phase silicon micromachining with xenon difluoride
Author(s): Floy I. Chang; Richard Yeh; Gisela Lin; Patrick B. Chu; Eric G. Hoffman; Ezekiel J. Kruglick; Kristofer S. J. Pister; Michael H. Hecht
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Post-processing using microfabrication techniques to improve the optical performance of liquid crystal over silicon backplane spatial light modulators
Author(s): Anthony O'Hara; Iain D. Rankin; Mark L. Begbie; David G. Vass; D. C. Burns; Ian Underwood; J. Tom M. Stevenson
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Fabrication and characterization of gated Si field emitter arrays with gate aperture below 0.5 um
Author(s): Tze-Kun Ku; B. B. Hsieh; Maw S. Chen; Chi-Chang Wang; P. W. Wang; Iing-Jar Hsieh; Huang-Chung Cheng
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Fabrication and characterization of the Pd-silicided emitters for field-emission devices
Author(s): Chih-Chong Wang; Tze-Kun Ku; Ming Shiann Feng; Iing-Jar Hsieh; Huang-Chung Cheng
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Projection displays and MEMS: timely convergence for a bright future
Author(s): Larry J. Hornbeck
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Recent trends in silicon micromachining technology
Author(s): John H. Jerman
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