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Proceedings of SPIE Volume 2522

Electron-Beam Sources and Charged-Particle Optics
Editor(s): Eric Munro; Henry P. Freund
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Volume Details

Volume Number: 2522
Date Published: 25 September 1995
Softcover: 54 papers (546) pages
ISBN: 9780819418814

Table of Contents
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Electron-beam microcolumn technology and applications
Author(s): T.H. Philip Chang; Michael G.R. Thomson; M. L. Yu; Ernst Kratschmer; H. S. Kim; Kim Y. Lee; Stephen A. Rishton; Dieter P. Kern
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Electron-optical design for the SCALPEL proof-of-concept tool
Author(s): Warren K. Waskiewicz; Steven D. Berger; Lloyd R. Harriott; Masis M. Mkrtchyan; Stephen W. Bowler; J. M. Gibson
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Large-field electron optics: limitations and enhancements
Author(s): Hans C. Pfeiffer; Werner Stickel
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Thermal field emission sources and optics for Gaussian electron-beam lithography
Author(s): Tom Chisholm; Bernard A. Wallman; Johannes C. Romijn
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Aberration analysis of wide-angle deflectors and lenses by direct ray-tracing and comparison with conventional aberration theories
Author(s): Eric Munro; Xieqing Zhu; John A. Rouse; Haoning Liu
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Dynamic correction of aberrations in focusing and deflection systems with shaped beams
Author(s): Xieqing Zhu; Haoning Liu; Eric Munro
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Rigorous theoretical investigation of distortion in ion-projection noncathode systems
Author(s): Stanislav N. Jatchmenev; Anatoliy I. Shitakov; Igor P. Vykhat
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Some problems of mathematical simulation in optimization design of electrostatic image tubes
Author(s): LiWei Zhou; Zhiquan Zhang; Weiqi Jin; Erlun Fang; GuoQiang Ni; Liangzhong Zhang
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Simulation software BEAMISH for the design of charged-particle optical instruments
Author(s): Yoshihiro Ueno; Masahiro Takebe; Akihiko Iwata; Sumio Kumashiro
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Improvements to the electrostatic lens optimization method SOEM
Author(s): Jim Edmond Barth; H. W. G. van der Steen; Jaroslav Chmelik
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Primary expert system applied in design of electron-optical system
Author(s): Wei Lei; Linsu Tong
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Theory of group applied to calculate field of multielectrode systems with symmetrical geometry of electrodes
Author(s): Igor Felixovich Spivak-Lavrov
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New design for a field emission electron gun immersed in a magnetic lens field
Author(s): Kenichi Saito; Hirofumi Morita; Nobuo Shimazu; Yasumichi Uno
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Comparative study of supertips for electron field emitters
Author(s): Hans W. P. Koops; Mark A. Weber; J. Urban; C. Schoessler
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New MV-class generator
Author(s): Kiyotaka Ishibashi; Ken-ichi Inoue; Chikara Ichihara; Yukito Furukawa; Kazushi Yokoyama; Hirofumi Fukuyama
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Negative electron affinity photocathodes as high-performance electron sources. Part 1: achievement of ultrahigh brightness from an NEA photocathode
Author(s): Aaron W. Baum; William E. Spicer; Roger Fabian W. Pease; Kenneth A. Costello; Verle W. Aebi
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CRT electron-optical system
Author(s): Shoji Shirai
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Immersion lenses for low-voltage SEM and LEEM
Author(s): Katsushige Tsuno; Nobuo Handa; Sunao Matsumoto
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Optimized secondary electron collection in in-lens-type objective lens
Author(s): Katsuhiro Kuroda; Atsuko Takafuji; Ken-ichi Yamamoto; Mitsugu Satou
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Electrostatic lenses with corrected chromatic and spherical aberrations
Author(s): Lubov A. Baranova; Stella Y. Yavor; Eric Munro
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Pulsed magnetic quadrupole lenses
Author(s): Hermann Wollnik; Markus Winkler; E. I. Esch; G. Li; P. Spiller; D. H. H. Hoffman
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Improvement of sensitivity and depth resolution in conventional RBS and ERDA techniques using energy/momentum filters
Author(s): Kiyotaka Ishibashi; Yukito Furukawa; Kazushi Yokoyama; Ken-ichi Inoue; Bijoy K. Patnaik; Nalin R. Parikh
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Curvature of the effective field boundary of realistic sector magnets
Author(s): B. Pfreundtner; Hermann Wollnik
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Split shielding plates in electrostatic sector analyzers and Wien filters
Author(s): Mikhail Igorevitch Yavor
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Solution of electron optics problems with space charge in 2D and 3D
Author(s): John A. Rouse; Xieqing Zhu; Eric Munro
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Saturated electron lens design using a second-order finite element method
Author(s): John Hodkinson; Khadija Tahir
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Retarding field optics with field-free sample
Author(s): Laurence S. Hordon; B. B. Boyer; Roger Fabian W. Pease
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SEIII electrons in the scanning electron microscope: their production, detection, and effect on image quality
Author(s): Maya Balasubramanyam; Eric Munro
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Fringe-field-induced 12-pole component of magnetic quadrupole lenses
Author(s): B. Pfreundtner; Hermann Wollnik
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Compact wavelength dispersive x-ray spectrometer for light elements in high-energy ion microprobe system
Author(s): Yukito Furukawa; Kazushi Yokoyama; Ken-ichi Inoue; Kiyotaka Ishibashi; Hirofumi Fukuyama
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Use of two focusing modes on two-lens focused ion-beam column
Author(s): Tohru Ishitani; Y. Kawanami
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Coulomb interactions in particle-beam systems
Author(s): Werner Stickel
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Stochastic interactions in particle-projection systems: comparison of theory and Monte Carlo simulations
Author(s): Masis M. Mkrtchyan; Steven D. Berger; James Alexander Liddle; Lloyd R. Harriott
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Calculation of aberrations of a space charge lens and its possible applications
Author(s): Li Wang; Tiantong Tang; Jon Orloff
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Low-energy focused ion-beam system for direct deposition
Author(s): Masahiro Ueda; Shinji Nagamachi; Yasuhiro Yamakage; Hiromasa Maruno; Junzo Ishikawa
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Low-energy focused ion-beam system combined with molecular-beam epitaxy system for fabrication of 3D buried semiconductor structures
Author(s): Junichi Yanagisawa; Kuniyoshi Kito; Kentaro Monden; Kenji Gamo
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Limits on imaging resolution of focused ion-beam systems
Author(s): Jon Orloff
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Compensation for rapid contrast variations and correction for charging effects in scanning ion microscopy
Author(s): Sam T. Davies
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Subcompact free-electron laser
Author(s): John Wesley Lewellen; John F. Schmerge; Richard H. Pantell; Joseph Feinstein
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Design and operation of the Compact Infrared Free-Electron Laser (CIRFEL)
Author(s): Ira S. Lehrman; Jayaram Krishnaswamy; Richard A. Hartley; Michael F. Reusch; Alan M. M. Todd; Robert H. Austin; D. Feldman
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Radiation produced by relativistic electrons moving over a diffraction grating
Author(s): John E. Walsh; Kenneth Woods; Richard Fernow; Harold Kirk
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Picosecond pump-probe using an FEL and synchrotron source
Author(s): Karl David Straub; John M. J. Madey; Patrick G. O'Shea; Vladimir N. Litvinenko; Eric B. Szarmes; Genevieve A. Barnett
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Short-wavelength light sources at Duke storage ring
Author(s): Vladimir N. Litvinenko; Genevieve A. Barnett; Bentley Burnham; N. Hower; Leon Johnson; John M. J. Madey; Ying Wu
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NSLS source development laboratory
Author(s): Ilan Ben-Zvi; Eric Blum; Erik D. Johnson; Samuel Krinsky; James B. Murphy; Li-Hua Yu
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Self-consistent undulator radiation via Lienard-Wiechert fields
Author(s): Luis R. Elias; Musit Tecimer; Isidoro Kimel
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Design and application of coaxial wigglers in free-electron lasers
Author(s): Robert H. Jackson; Monica Blank; Henry P. Freund; Dean E. Pershing; J. M. Taccetti
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Microwave measurements and beam dynamics simulations of the BNL/SLAC/UCLA emittance-compensated 1.6-cell photocathode rf gun
Author(s): Dennis T. Palmer; Roger H. Miller; Herman Winick; Xi Jie Wang; Kenneth Batchelor; Martin H. Woodle; Ilan Ben-Zvi
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Entropy, reversible and irreversible emittance growth
Author(s): Patrick G. O'Shea
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Micromachined electron gun array (MEGA)
Author(s): Noel C. MacDonald; Wolfgang Hofmann; Liang-Yuh Chen; John H. Das
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Realizing any specified image rotation in electrostatic and magnetic imaging
Author(s): Weiqi Jin; LiWei Zhou; GuoQiang Ni
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Simulation of electron-optical system in color monitor tube
Author(s): Wei Lei; Linsu Tong
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Numerical techniques and software for static and dynamic image tubes design
Author(s): Mikhail A. Monastyrski; Sergei V. Andreev; Valentina P. Degtyareva; Marina Vyacheslav Korneeva; Yu. V. Kulikov; Alexander M. Prokhorov; Victor A. Tarasov; Mikhail Ya. Schelev
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Transfer matrix of a narrow gap between two quadrupole lenses
Author(s): Mikhail Igorevitch Yavor; O. A. Grineva
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Global space charge effects in ion-beam lithography
Author(s): John J. Petillo; Alfred A. Mondelli
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