### PROCEEDINGS VOLUME 2522

Electron-Beam Sources and Charged-Particle OpticsFormat | Member Price | Non-Member Price |
---|---|---|

Softcover | $105.00 * | $105.00 * |

*Available as a photocopy reprint only. Allow two weeks reprinting time plus standard delivery time. No discounts or returns apply.

Volume Details

Volume Number: 2522

Date Published: 25 September 1995

Softcover: 54 papers (546) pages

ISBN: 9780819418814

Date Published: 25 September 1995

Softcover: 54 papers (546) pages

ISBN: 9780819418814

Table of Contents

show all abstracts |
hide all abstracts

Electron-beam microcolumn technology and applications

Author(s): T.H. Philip Chang; Michael G.R. Thomson; M. L. Yu; Ernst Kratschmer; H. S. Kim; Kim Y. Lee; Stephen A. Rishton; Dieter P. Kern

Author(s): T.H. Philip Chang; Michael G.R. Thomson; M. L. Yu; Ernst Kratschmer; H. S. Kim; Kim Y. Lee; Stephen A. Rishton; Dieter P. Kern

Show Abstract

Electron-optical design for the SCALPEL proof-of-concept tool

Author(s): Warren K. Waskiewicz; Steven D. Berger; Lloyd R. Harriott; Masis M. Mkrtchyan; Stephen W. Bowler; J. M. Gibson

Author(s): Warren K. Waskiewicz; Steven D. Berger; Lloyd R. Harriott; Masis M. Mkrtchyan; Stephen W. Bowler; J. M. Gibson

Show Abstract

Large-field electron optics: limitations and enhancements

Author(s): Hans C. Pfeiffer; Werner Stickel

Author(s): Hans C. Pfeiffer; Werner Stickel

Show Abstract

Thermal field emission sources and optics for Gaussian electron-beam lithography

Author(s): Tom Chisholm; Bernard A. Wallman; Johannes C. Romijn

Author(s): Tom Chisholm; Bernard A. Wallman; Johannes C. Romijn

Show Abstract

Aberration analysis of wide-angle deflectors and lenses by direct ray-tracing and comparison with conventional aberration theories

Author(s): Eric Munro; Xieqing Zhu; John A. Rouse; Haoning Liu

Author(s): Eric Munro; Xieqing Zhu; John A. Rouse; Haoning Liu

Show Abstract

Dynamic correction of aberrations in focusing and deflection systems with shaped beams

Author(s): Xieqing Zhu; Haoning Liu; Eric Munro

Author(s): Xieqing Zhu; Haoning Liu; Eric Munro

Show Abstract

Rigorous theoretical investigation of distortion in ion-projection noncathode systems

Author(s): Stanislav N. Jatchmenev; Anatoliy I. Shitakov; Igor P. Vykhat

Author(s): Stanislav N. Jatchmenev; Anatoliy I. Shitakov; Igor P. Vykhat

Show Abstract

Some problems of mathematical simulation in optimization design of electrostatic image tubes

Author(s): LiWei Zhou; Zhiquan Zhang; Weiqi Jin; Erlun Fang; GuoQiang Ni; Liangzhong Zhang

Author(s): LiWei Zhou; Zhiquan Zhang; Weiqi Jin; Erlun Fang; GuoQiang Ni; Liangzhong Zhang

Show Abstract

Simulation software BEAMISH for the design of charged-particle optical instruments

Author(s): Yoshihiro Ueno; Masahiro Takebe; Akihiko Iwata; Sumio Kumashiro

Author(s): Yoshihiro Ueno; Masahiro Takebe; Akihiko Iwata; Sumio Kumashiro

Show Abstract

Improvements to the electrostatic lens optimization method SOEM

Author(s): Jim Edmond Barth; H. W. G. van der Steen; Jaroslav Chmelik

Author(s): Jim Edmond Barth; H. W. G. van der Steen; Jaroslav Chmelik

Show Abstract

Primary expert system applied in design of electron-optical system

Author(s): Wei Lei; Linsu Tong

Author(s): Wei Lei; Linsu Tong

Show Abstract

Theory of group applied to calculate field of multielectrode systems with symmetrical geometry of electrodes

Author(s): Igor Felixovich Spivak-Lavrov

Author(s): Igor Felixovich Spivak-Lavrov

Show Abstract

New design for a field emission electron gun immersed in a magnetic lens field

Author(s): Kenichi Saito; Hirofumi Morita; Nobuo Shimazu; Yasumichi Uno

Author(s): Kenichi Saito; Hirofumi Morita; Nobuo Shimazu; Yasumichi Uno

Show Abstract

Comparative study of supertips for electron field emitters

Author(s): Hans W. P. Koops; Mark A. Weber; J. Urban; C. Schoessler

Author(s): Hans W. P. Koops; Mark A. Weber; J. Urban; C. Schoessler

Show Abstract

New MV-class generator

Author(s): Kiyotaka Ishibashi; Ken-ichi Inoue; Chikara Ichihara; Yukito Furukawa; Kazushi Yokoyama; Hirofumi Fukuyama

Author(s): Kiyotaka Ishibashi; Ken-ichi Inoue; Chikara Ichihara; Yukito Furukawa; Kazushi Yokoyama; Hirofumi Fukuyama

Show Abstract

Negative electron affinity photocathodes as high-performance electron sources. Part 1: achievement of ultrahigh brightness from an NEA photocathode

Author(s): Aaron W. Baum; William E. Spicer; Roger Fabian W. Pease; Kenneth A. Costello; Verle W. Aebi

Author(s): Aaron W. Baum; William E. Spicer; Roger Fabian W. Pease; Kenneth A. Costello; Verle W. Aebi

Show Abstract

Immersion lenses for low-voltage SEM and LEEM

Author(s): Katsushige Tsuno; Nobuo Handa; Sunao Matsumoto

Author(s): Katsushige Tsuno; Nobuo Handa; Sunao Matsumoto

Show Abstract

Optimized secondary electron collection in in-lens-type objective lens

Author(s): Katsuhiro Kuroda; Atsuko Takafuji; Ken-ichi Yamamoto; Mitsugu Satou

Author(s): Katsuhiro Kuroda; Atsuko Takafuji; Ken-ichi Yamamoto; Mitsugu Satou

Show Abstract

Electrostatic lenses with corrected chromatic and spherical aberrations

Author(s): Lubov A. Baranova; Stella Y. Yavor; Eric Munro

Author(s): Lubov A. Baranova; Stella Y. Yavor; Eric Munro

Show Abstract

Pulsed magnetic quadrupole lenses

Author(s): Hermann Wollnik; Markus Winkler; E. I. Esch; G. Li; P. Spiller; D. H. H. Hoffman

Author(s): Hermann Wollnik; Markus Winkler; E. I. Esch; G. Li; P. Spiller; D. H. H. Hoffman

Show Abstract

Improvement of sensitivity and depth resolution in conventional RBS and ERDA techniques using energy/momentum filters

Author(s): Kiyotaka Ishibashi; Yukito Furukawa; Kazushi Yokoyama; Ken-ichi Inoue; Bijoy K. Patnaik; Nalin R. Parikh

Author(s): Kiyotaka Ishibashi; Yukito Furukawa; Kazushi Yokoyama; Ken-ichi Inoue; Bijoy K. Patnaik; Nalin R. Parikh

Show Abstract

Curvature of the effective field boundary of realistic sector magnets

Author(s): B. Pfreundtner; Hermann Wollnik

Author(s): B. Pfreundtner; Hermann Wollnik

Show Abstract

Split shielding plates in electrostatic sector analyzers and Wien filters

Author(s): Mikhail Igorevitch Yavor

Author(s): Mikhail Igorevitch Yavor

Show Abstract

Solution of electron optics problems with space charge in 2D and 3D

Author(s): John A. Rouse; Xieqing Zhu; Eric Munro

Author(s): John A. Rouse; Xieqing Zhu; Eric Munro

Show Abstract

Saturated electron lens design using a second-order finite element method

Author(s): John Hodkinson; Khadija Tahir

Author(s): John Hodkinson; Khadija Tahir

Show Abstract

Retarding field optics with field-free sample

Author(s): Laurence S. Hordon; B. B. Boyer; Roger Fabian W. Pease

Author(s): Laurence S. Hordon; B. B. Boyer; Roger Fabian W. Pease

Show Abstract

SEIII electrons in the scanning electron microscope: their production, detection, and effect on image quality

Author(s): Maya Balasubramanyam; Eric Munro

Author(s): Maya Balasubramanyam; Eric Munro

Show Abstract

Fringe-field-induced 12-pole component of magnetic quadrupole lenses

Author(s): B. Pfreundtner; Hermann Wollnik

Author(s): B. Pfreundtner; Hermann Wollnik

Show Abstract

Compact wavelength dispersive x-ray spectrometer for light elements in high-energy ion microprobe system

Author(s): Yukito Furukawa; Kazushi Yokoyama; Ken-ichi Inoue; Kiyotaka Ishibashi; Hirofumi Fukuyama

Author(s): Yukito Furukawa; Kazushi Yokoyama; Ken-ichi Inoue; Kiyotaka Ishibashi; Hirofumi Fukuyama

Show Abstract

Use of two focusing modes on two-lens focused ion-beam column

Author(s): Tohru Ishitani; Y. Kawanami

Author(s): Tohru Ishitani; Y. Kawanami

Show Abstract

Stochastic interactions in particle-projection systems: comparison of theory and Monte Carlo simulations

Author(s): Masis M. Mkrtchyan; Steven D. Berger; James Alexander Liddle; Lloyd R. Harriott

Author(s): Masis M. Mkrtchyan; Steven D. Berger; James Alexander Liddle; Lloyd R. Harriott

Show Abstract

Calculation of aberrations of a space charge lens and its possible applications

Author(s): Li Wang; Tiantong Tang; Jon Orloff

Author(s): Li Wang; Tiantong Tang; Jon Orloff

Show Abstract

Low-energy focused ion-beam system for direct deposition

Author(s): Masahiro Ueda; Shinji Nagamachi; Yasuhiro Yamakage; Hiromasa Maruno; Junzo Ishikawa

Author(s): Masahiro Ueda; Shinji Nagamachi; Yasuhiro Yamakage; Hiromasa Maruno; Junzo Ishikawa

Show Abstract

Low-energy focused ion-beam system combined with molecular-beam epitaxy system for fabrication of 3D buried semiconductor structures

Author(s): Junichi Yanagisawa; Kuniyoshi Kito; Kentaro Monden; Kenji Gamo

Author(s): Junichi Yanagisawa; Kuniyoshi Kito; Kentaro Monden; Kenji Gamo

Show Abstract

Compensation for rapid contrast variations and correction for charging effects in scanning ion microscopy

Author(s): Sam T. Davies

Author(s): Sam T. Davies

Show Abstract

Subcompact free-electron laser

Author(s): John Wesley Lewellen; John F. Schmerge; Richard H. Pantell; Joseph Feinstein

Author(s): John Wesley Lewellen; John F. Schmerge; Richard H. Pantell; Joseph Feinstein

Show Abstract

Design and operation of the Compact Infrared Free-Electron Laser (CIRFEL)

Author(s): Ira S. Lehrman; Jayaram Krishnaswamy; Richard A. Hartley; Michael F. Reusch; Alan M. M. Todd; Robert H. Austin; D. Feldman

Author(s): Ira S. Lehrman; Jayaram Krishnaswamy; Richard A. Hartley; Michael F. Reusch; Alan M. M. Todd; Robert H. Austin; D. Feldman

Show Abstract

Radiation produced by relativistic electrons moving over a diffraction grating

Author(s): John E. Walsh; Kenneth Woods; Richard Fernow; Harold Kirk

Author(s): John E. Walsh; Kenneth Woods; Richard Fernow; Harold Kirk

Show Abstract

Picosecond pump-probe using an FEL and synchrotron source

Author(s): Karl David Straub; John M. J. Madey; Patrick G. O'Shea; Vladimir N. Litvinenko; Eric B. Szarmes; Genevieve A. Barnett

Author(s): Karl David Straub; John M. J. Madey; Patrick G. O'Shea; Vladimir N. Litvinenko; Eric B. Szarmes; Genevieve A. Barnett

Show Abstract

Short-wavelength light sources at Duke storage ring

Author(s): Vladimir N. Litvinenko; Genevieve A. Barnett; Bentley Burnham; N. Hower; Leon Johnson; John M. J. Madey; Ying Wu

Author(s): Vladimir N. Litvinenko; Genevieve A. Barnett; Bentley Burnham; N. Hower; Leon Johnson; John M. J. Madey; Ying Wu

Show Abstract

NSLS source development laboratory

Author(s): Ilan Ben-Zvi; Eric Blum; Erik D. Johnson; Samuel Krinsky; James B. Murphy; Li-Hua Yu

Author(s): Ilan Ben-Zvi; Eric Blum; Erik D. Johnson; Samuel Krinsky; James B. Murphy; Li-Hua Yu

Show Abstract

Self-consistent undulator radiation via Lienard-Wiechert fields

Author(s): Luis R. Elias; Musit Tecimer; Isidoro Kimel

Author(s): Luis R. Elias; Musit Tecimer; Isidoro Kimel

Show Abstract

Design and application of coaxial wigglers in free-electron lasers

Author(s): Robert H. Jackson; Monica Blank; Henry P. Freund; Dean E. Pershing; J. M. Taccetti

Author(s): Robert H. Jackson; Monica Blank; Henry P. Freund; Dean E. Pershing; J. M. Taccetti

Show Abstract

Microwave measurements and beam dynamics simulations of the BNL/SLAC/UCLA emittance-compensated 1.6-cell photocathode rf gun

Author(s): Dennis T. Palmer; Roger H. Miller; Herman Winick; Xi Jie Wang; Kenneth Batchelor; Martin H. Woodle; Ilan Ben-Zvi

Author(s): Dennis T. Palmer; Roger H. Miller; Herman Winick; Xi Jie Wang; Kenneth Batchelor; Martin H. Woodle; Ilan Ben-Zvi

Show Abstract

Micromachined electron gun array (MEGA)

Author(s): Noel C. MacDonald; Wolfgang Hofmann; Liang-Yuh Chen; John H. Das

Author(s): Noel C. MacDonald; Wolfgang Hofmann; Liang-Yuh Chen; John H. Das

Show Abstract

Realizing any specified image rotation in electrostatic and magnetic imaging

Author(s): Weiqi Jin; LiWei Zhou; GuoQiang Ni

Author(s): Weiqi Jin; LiWei Zhou; GuoQiang Ni

Show Abstract

Simulation of electron-optical system in color monitor tube

Author(s): Wei Lei; Linsu Tong

Author(s): Wei Lei; Linsu Tong

Show Abstract

Numerical techniques and software for static and dynamic image tubes design

Author(s): Mikhail A. Monastyrski; Sergei V. Andreev; Valentina P. Degtyareva; Marina Vyacheslav Korneeva; Yu. V. Kulikov; Alexander M. Prokhorov; Victor A. Tarasov; Mikhail Ya. Schelev

Author(s): Mikhail A. Monastyrski; Sergei V. Andreev; Valentina P. Degtyareva; Marina Vyacheslav Korneeva; Yu. V. Kulikov; Alexander M. Prokhorov; Victor A. Tarasov; Mikhail Ya. Schelev

Show Abstract

Transfer matrix of a narrow gap between two quadrupole lenses

Author(s): Mikhail Igorevitch Yavor; O. A. Grineva

Author(s): Mikhail Igorevitch Yavor; O. A. Grineva

Show Abstract

Global space charge effects in ion-beam lithography

Author(s): John J. Petillo; Alfred A. Mondelli

Author(s): John J. Petillo; Alfred A. Mondelli

Show Abstract

**© SPIE.**Terms of Use