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Proceedings of SPIE Volume 2403

Laser-Induced Thin Film Processing
Editor(s): Jan J. Dubowski
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Volume Details

Volume Number: 2403
Date Published: 10 April 1995
Softcover: 47 papers (488) pages
ISBN: 9780819417503

Table of Contents
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Surface excitation mediated physics in low-fluence laser material interactions and applications to thin-film material processing
Author(s): Henry Helvajian
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Laser-ablation-plume thermalization dynamics in background gases studied by time-resolved imaging, spectroscopic, and ion probe diagnostics
Author(s): David B. Geohegan; Alexander A. Puretzky
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Imaging and modeling of pulsed-laser thin-film-deposition plumes
Author(s): Peter K. Schenck; John W. Hastie; Albert J. Paul; David W. Bonnell
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Planar laser-induced fluorescence imaging of Si and SiO during pulsed laser ablation of Si
Author(s): Phillip H. Paul; Dale L. Capewell; David G. Goodwin
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In-situ single-wavelength fast-nulling ellipsometric measurements on CdTe-Cd1-xMnxTe quantum well and superlattice structures grown by pulsed-laser evaporation and epitaxy
Author(s): Hue X. Tran; James D. Leslie; Steve Buchanan; Jan J. Dubowski
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Pulsed laser processing of epitaxial TiN/Si heterostructures
Author(s): R. D. Vispute; Rina Chowdhury; Jagdish Narayan
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Application of pulsed-laser-deposited amorphic diamond films in protective coatings and field-emission displays
Author(s): Carl B. Collins; Farzin Davanloo; H. Park
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Fabrication of zinc oxide, titanium oxide, and organic-entrapped-silica thin films via laser-assisted molecular beam deposition
Author(s): W. M. Kapila Wijekoon; Paras N. Prasad; James F. Garvey
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Properties of laser-ablated amorphous carbon films
Author(s): Bernd Keiper; Steffen Weissmantel; Guenter Reisse; S. Schulze
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Laser processing for thin-film photovoltaics
Author(s): Alvin D. Compaan
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Deposition of silicon carbide thin films by pulsed-excimer-laser ablation technique in the (25-700)degree C deposition temperature range
Author(s): My Ali El Khakani; E. Gat; Yves Beaudoin; Mohamed Chaker; C. Monteil; Daniel Guay; G. Letourneau; Henri Pepin
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Deposition of optical coatings by pulsed laser ablation
Author(s): Guenter Reisse; Steffen Weissmantel; Bernd Keiper; Bernhard Steiger
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Active microwave device applications of ferroelectric thin films
Author(s): Douglas B. Chrisey; James S. Horwitz; Jeffrey M. Pond; Raymond C. Y. Auyeung; Paul C. Dorsey; Syen B. Qadri; Lee A. Knauss; Carl H. Mueller; R. M. Yandrofski
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Raman scattering investigations of CuInSe2 films deposited by coevaporation and laser ablation
Author(s): M. Klose; R. Schaffler; Gert Irmer; Michael Brieger; D. Schmid; Hans Werner Schock
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Pulsed laser deposition for CdTe-based photovoltaics
Author(s): Alvin D. Compaan; Miranda M. Pearce; P. M. Voyles; D. Spry; Zhirong Feng; Andreas Fischer; Meilun Shao; Randy G. Bohn
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Low-temperature photoluminescence in In-doped CdMnTe/CdTe quantum wells and superlattices
Author(s): Jerzy M. Wrobel; Jan J. Dubowski; Piotr Becla
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Excimer-laser-beam-scanning chemical vapor deposition of ultrathin multilayer films for soft x-ray mirrors
Author(s): Katsuhiko Mutoh; Yuka Yamada; Shigeru Takeyama; Takeo Miyata
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Laser processing of thin films for optoelectronic devices
Author(s): Hideo Sugiura
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New excimer ultraviolet sources for photo-assisted deposition of thin films: an alternative to excimer-laser-induced deposition
Author(s): Ian W. Boyd; J. Y. Zhang; Philippe Bergonzo
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Characterization of excimer lamp photo-deposited ultrathin oxynitride films
Author(s): S. Lynch; Gerard M. O'Connor; Gabriel M. Crean; J. Y. Zhang; Zsolt Geretovszky; Philippe Bergonzo; Ian W. Boyd
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Electron-beam diagnostic of an impulsive plume
Author(s): Lev I. Kuznetsov; M. V. Parfenov; Viacheslav N. Yarygin; E. S. Voronel'
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Mass spectrometric study of gas-phase oxidation reactions during laser ablation of YBaCuO
Author(s): Alexander V. Bulgakov
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Dynamics of laser ablation of YBaCuO superconductor: effect of ionization/recombination processes
Author(s): Nadezhda M. Bulgakova; Alexander V. Bulgakov
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Modeling of laser-induced plume expansion into ambient gas for thin film deposition
Author(s): Nadezhda M. Bulgakova; Alexander V. Bulgakov
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Fabrication of submicron relief gratings in p-GaAs in the process of maskless holographic wet etching by laser-induced etch rate reduction method
Author(s): Alexander I. Khudobenko; Vladislav Ya. Panchenko; Vladimir N. Seminogov
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Laser-assisted etching for micropatterning of InP
Author(s): Manoj Prasad; Jan J. Dubowski; Harry E. Ruda
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Information recording by laser ablation
Author(s): Maria Bardosova; A. V. Irlin; G. Cik; Volodymir G. Tsukanov
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Photoreflectance and photoluminescence spectroscopies of In-doped CdMnTe/CdTe multiple quantum wells and superlattices
Author(s): Daniel Labrie; Joel B. Aufgang; Jerzy M. Wrobel; Jan J. Dubowski; Piotr Becla
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Monte Carlo simulations of reactive pulsed laser deposition
Author(s): Dale L. Capewell; David G. Goodwin
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Laser chemical etching of copper films
Author(s): A. Aliouchouche; Jacques Boulmer; D. Debarre; B. Bourguignon; Jean-Pierre Budin
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Realization of Si1-x-yGexCy/Si heterostructures by pulsed-laser-induced epitaxy of C+ implanted pseudomorphic SiGe films and of a-SiGeC:H films deposited on Si(100)
Author(s): Jacques Boulmer; A. Desmur-Larre; C. Guedj; D. Debarre; Philippe Boucaud; Francois H. Julien; Elieser Finkman; Keith A. Nugent; R. Laval; J.-B. Ozenne; H. Yang; D. Bouchier; Christian Godet; Pere Roca i Cabarrocas; G. Calvarin; C. Clerc
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Precursor preparation for mercury alkaline-earth cuprate films by pulsed laser deposition
Author(s): A. Brazdeikis; Bernhard Hirschauer; A. S. Flodstrom; I. Bryntse
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Laser ablation synthesis of multilayered oxides with applications for catalysis modeling
Author(s): Jan Paul; Bernhard Hirschauer
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Femtosecond-pulse laser processing of metallic and semiconducting thin films
Author(s): Joerg Krueger; Wolfgang Kautek
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Alumina-gamma-phase excimer laser synthesis: phenomenology of the process and properties of the material
Author(s): Lucien Diego Laude
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Laser-induced surface modification and metallization of polymers
Author(s): Hartmut Frerichs; David A. Wesner; Ernst-Wolfgang Kreutz
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Thermal processes in Write Once Read Many times (WORM) recording media during sublimation
Author(s): A. V. Irlin; Maria Bardosova; Vera Jablonska; Volodymir G. Tsukanov; B. A. Drapkin; B. V. Procjuk
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Microwave-assisted laser dry etching of silicon
Author(s): Wilhelm Pfleging; Ernst-Wolfgang Kreutz; Martin Wehner; Friedrich G. Lupp
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Utilization of surface electromagnetic wave excitation for increase of submicron diffraction grating depth on n-InP fabricated by holographic wet etching
Author(s): Vladislav Ya. Panchenko; Vladimir N. Seminogov; Alexander I. Khudobenko
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Computer-generated holographic diffractive structures fabricated by direct excimer laser microetching
Author(s): Leonidas Boutsikaris; Sakellaris Mailis; Nicholas Madamopoulos; S. Pissadakis; A. Petrakis; Nikos A. Vainos; P. Dainty; P. J. M. Parmiter; Trevor J. Hall
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Control of defect complex formation in thermally quenched semi-insulating GaAs using capless laser processing
Author(s): Qiang Liu; Harry E. Ruda; Lech Z. Jedral; Ivoil P. Koutzarov; Chandima D. Edirisinghe
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Photoluminescence of porous silicon layers produced with the help of laser radiation
Author(s): Leonid L. Fedorenko; Sergey V. Svechnikov; E. B. Kaganovich; A. D. Sardarly; S. P. Dikiy; S. V. Baranetz
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Resonant excitation of periodic surface structures by a moving laser beam
Author(s): Oleg N. Derkach; Vladimir N. Anisimov; Dmitrii D. Malyuta; Maria A. Stepanova; Andrey Yu. Sebrant
Laser reflectometry for in-situ monitoring of the epitaxial growth of thin films
Author(s): Trevor Farrell; P. Weightman
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Laser-induced surface modifications, structure formation, and ablation of organic polymers
Author(s): Dieter Baeuerle; Enno Arenholz; V. Svorcik; J. Heitz; Boris S. Luk'yanchuk; Nikita M. Bityurin
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Multidimensional dynamics of laser-ablated materials
Author(s): Vladimir N. Anisimov; Valeria G. Grishina; Oleg N. Derkach; Dmitrii D. Malyuta; Maria A. Stepanova
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