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Proceedings of SPIE Volume 2045

Laser-Assisted Fabrication of Thin Films and Microstructures
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Volume Details

Volume Number: 2045
Date Published: 1 February 1994
Softcover: 39 papers (376) pages
ISBN: 9780819413048

Table of Contents
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Low-fluence laser excitation processes
Author(s): Henry Helvajian; Lawrence Henry Wiedeman; H.-S. Kim
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Fundamental process during pulsed-laser deposition of thin films
Author(s): Rajiv K. Singh
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Growth of 105k(BiPb)2Sr2Ca2Cu3O10 films on MgO by the pulsed laser deposition technique
Author(s): Amin Sajjadi; Ian W. Boyd
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Excitonic recombinations in Cd0.90Mn0.10Te/CdTe heterostructures grown by pulsed-laser evaporation and epitaxy
Author(s): Alain P. Roth; R. Benzaquen; P. Finnie; P. D. Berger; Jan J. Dubowski
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Laser processing of palladium for selective electroless copper plating
Author(s): Marie-Helene Bernier; Ricardo Izquierdo; Michel Meunier
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Excimer laser ablation of contaminated polyimide
Author(s): Gouri Radhakrishnan
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Direct laser write-on exposure of thick film screens
Author(s): Janne Remes; Hannu Moilanen; Seppo Leppaevuori; Juha Vaananen; Antti Uusimaki
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Fabrication of continuous-relief micro-optical elements by direct laser writing in photoresist
Author(s): Michael T. Gale; Markus Rossi; Helmut Schuetz
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Diode laser-induced pyrolytic decomposition of spin-coated organometallic thin films
Author(s): Stephane Evoy; Marie-Helene Bernier; Patrick Desjardins; Ricardo Izquierdo; Michel Meunier; Edward Sacher
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Continuous-wave laser-assisted fabrication of microstructures in silicon microelectronics
Author(s): Geoffroy Auvert
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Excimer laser-induced metallization for Si and GaAs microelectronics
Author(s): Michel Meunier; Maleck Tabbal; Marc Suys; Ricardo Izquierdo; Arthur Yelon; Edward Sacher; Suzie Poulin
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Laser fabrication of three-dimensional microstructures, cavities, and columns
Author(s): Bing Shen; Ricardo Izquierdo; Michel Meunier
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Laser-beam writing for integrated-optic devices in Ti:LiNbO3
Author(s): Masamitsu Haruna; Hiroshi Nishihara
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Structural and optical properties of semiconductor heterojunctions and superlattices grown by pulsed-laser evaporation and epitaxy
Author(s): Jan J. Dubowski
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Surface patterning by an improved laser-induced forward transfer technique
Author(s): Tamas Szoerenyi; Zsolt Toth; Zoltan Kantor
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Epitaxial growth of LiNbO3 optical-waveguide films by excimer laser ablation
Author(s): Masamitsu Haruna; Jun Tsutsumi; Yasuo Segawa; Hiroshi Nishihara
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Waveguide excimer laser fabrication of 3D microstructures
Author(s): C. Paul Christensen
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Manufacture of diffractive structures in metal and semiconductor thin films by pulse laser irradiation
Author(s): Zoya N. Kalyashova; Vladimir E. Sabinin; V. I. Korolev; E. P. Mesnyankin
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Synthesis of silicon-based dielectric films by excimer laser ablation
Author(s): Eric Fogarassy; Claude Fuchs; Adelilah Slaoui; Salome de Unamuno; Jean-Paul Stoquert; Vladimir I. Marine; Bernard Lang
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UV routes for approaching low temperature dielectrics deposition in III-V technology
Author(s): Jean Flicstein; B. Leon; Ian W. Boyd
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Photo-CVD of dielectric materials by pseudo-continuous excimer sources
Author(s): Philippe Bergonzo; U. Kogelschatz; Ian W. Boyd
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Laser microprocessing of diamond and diamond-like films
Author(s): Vitali I. Konov; Victor G. Ralchenko; Sergej M. Pimenov; Andrey A. Smolin; Taras V. Kononenko
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Holographic technique for HTS thin film patterning
Author(s): Boris I. Seleznev; A. A. Blyablin; Anton V. Kandidov; V. V. Korneev; A. S. Kovalev
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Laser-assisted deposition and etching of silicon for fabrication of refractive and diffractive optical elements
Author(s): Hubert Jerominek; Jin Pan
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Iron silicide formation by excimer laser pulses
Author(s): Armando Luches; Emilia D'Anna; Gilberto Leggieri; Stefan Luby; Eva Majkova; Guiseppe Majni; Paolo Mengucci
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Laser-annealed thin-film fiber-optic temperature sensor
Author(s): Glenn Beheim; Jorge L. Sotomayor; Meg L. Tuma; Massood Tabib-Azar
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Laser beam direct writing of fine lines of alpha-Fe2O3 from metalorganic spin-coated films and transient behavior study of laser decomposition process
Author(s): Songsheng Xue; Wahib Ousi-Benomar; Roger A. Lessard
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Novel process for the fabrication of top-drive double stator micromotor on glass
Author(s): Hocine Ziad; Serge Spirkovitch; Jeannine Marty; Francois Baillieu; Serge Rigo; Neil Milne
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Process planning and scheduling of micromachined transducer
Author(s): George H. Abdou; Rama B. Bhat; Ion G. Stiharu
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Influence of the stress state in silicon on the anisotropic etching process
Author(s): Ion G. Stiharu; Rama B. Bhat; Mojtaba Kahrizi; Leslie M. Landsberger
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Hybrid fiber optic/silicon micromechanical sound-optical sensing system
Author(s): Xianxin Zhong; Xiao-Song Sun; Zhiyu Wen; Youshu Huang; Tao Xu
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Interferometric fiber optic accelerometer
Author(s): John G. Farah
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Miniature integrated optic Fabry-Perot slit interferometer
Author(s): John G. Farah
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Deep x-ray lithography for micromechanics
Author(s): Henry Guckel; Kenneth J. Skrobis; J. Klein; Todd R. Christenson; T. Wiegele
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High aspect ratio resist structures for optoelectronic (and other) applications
Author(s): Martin C. Peckerar; Milton Rebbert; Ganesh K. Gopalakrishnan
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Fabrication of perfectly three-dimensional microstructures by UV depth lithography
Author(s): Gunter Engelmann; Oswin Ehrmann; Rudolf Leutenbauer; Heike Schmitz; Herbert Reichl
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Synchrotron beamlines for x-ray lithography
Author(s): Anthony P. Trippe; W. Jorge Pearce
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Investigation of substrate temperature effect on the surface morphology of excimer laser deposited YBa2Cu3O7/CeO2 films on sapphire
Author(s): Peter D. Grant; Hue T. Tran; M. W. Denhoff
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Wavelength selection by an acousto-optical filter
Author(s): Sigurd Kusch; E. List
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