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Proceedings of SPIE Volume 1835

Excimer Lasers: Applications, Beam Delivery Systems, and Laser Design
Editor(s): James A. Greer
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Volume Details

Volume Number: 1835
Date Published: 19 April 1993
Softcover: 23 papers (230) pages
ISBN: 9780819410368

Table of Contents
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Laser ablation as a new tool for material science
Author(s): Graciela B. Blanchet; Curtis R. Fincher
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Laser-induced PVD technique for deposition of diamondlike carbon films
Author(s): Klaus R. Mann; F. Mueller
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Comparison of large-area pulsed-laser deposition approaches
Author(s): James A. Greer
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Particulate ejection in pulsed-laser deposition
Author(s): Robert E. Leuchtner; Douglas B. Chrisey; James S. Horwitz
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Plume dynamics of excimer-laser-vaporized YBa2Cu3O7-delta material
Author(s): Robert C. Dye; Stephen R. Foltyn; Robert J. Brainard; A. R. Garcia; Ross E. Muenchausen; Xin Di Wu; Nicholas S. Nogar
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Submicron deep-UV imaging with a catadioptric step-and-repeat exposure system
Author(s): David J. Elliott
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Characterization, setup, and control of a manufacturing laser ablation tool and process
Author(s): Gerhard E. Wolbold; Christopher L. Tessler; Dawn J. Tudryn
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Excimer laser damage testing of optical materials
Author(s): Paul M. Schermerhorn
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Optical materials for use with excimer lasers
Author(s): Jan H. C. Sedlacek; Mordechai Rothschild
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Improvements in crystal optics for excimer lasers
Author(s): Ival Toepke; Dennis R. Cope
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Excimer laser illumination and imaging optics for controlled microstructure generation
Author(s): Hans-Juergen Kahlert; U. Sarbach; Berthold Burghardt; Bernhard H. Klimt
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Excimer laser processing of aerospace alloys
Author(s): Graeme Scott; K. Henry
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Micromachining with waveguide excimer lasers
Author(s): C. Paul Christensen; Michael T. Duignan; Louis R. Rodriguez
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Novel applications of excimer lasers for fabricating biomedical and sensor products
Author(s): Malcolm C. Gower; Phil T. Rumsby; Dafydd T. Thomas
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Profile characteristics of excimer laser micromachined features
Author(s): Martin D. Tabat; Terence R. O'Keeffe; Wen Ho
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Dependence of excimer laser beam properties on laser gas composition
Author(s): Robert E. Turner; John L. Remo; Vinod Kumar
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Progress in discharge-pumped excimer lasers
Author(s): Charles T. Pike
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Production excimer laser equipment overview
Author(s): Jeffrey P. Sercel
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Ion beams by an XeCl laser having a novel electrodes scheme
Author(s): Vincenzo Nassisi; A. Pecoraro
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High-current electron beam generator effective self-emission cathode for chemical and excimer lasers filling-up
Author(s): George M. Chumak; A. E. Kravchik; I. P. Krotov; L. M. Lukyanova; S. Y. Maidel
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Experimental investigation of factors that restrict the gas lifetime in excimer KrF lasers
Author(s): George M. Chumak; V. V. Nazarov; M. M. Smirnova
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Use of excimer lasers in stomatology
Author(s): George M. Chumak; V. V. Nazarov; M. M. Smirnova
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Efficient line narrowing and wavelength stabilization of excimer lasers
Author(s): Malcolm C. Gower; C. Williams; Paul Apte; Phil T. Rumsby
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