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Proceedings of SPIE Volume 1804

Rapid Thermal and Laser Processing
Editor(s): Dim-Lee Kwong; Heinrich G. Mueller
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Volume Details

Volume Number: 1804
Date Published: 16 March 1993
Softcover: 18 papers (176) pages
ISBN: 9780819410023

Table of Contents
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RTP temperature control requirement for submicron device fabrication
Author(s): Asit K. Ray
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Optical and thermal modeling of a rapid thermal processor
Author(s): Jean-Marie R. Dilhac; N. Nolhier; Christian Ganibal
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Contribution to optimal lamp design in rapid thermal processing
Author(s): Young Man Cho; Arogyaswami Paulraj; Stephen A. Norman; Guanghan Xu; Thomas Kailath
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In-situ temperature control for RTP via thermal expansion measurement
Author(s): Bruce W. Peuse; Allan Rosekrans; Kenneth Snow
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Laser-enhanced CVD for low-temperature Si epitaxy
Author(s): Sanjay K. Banerjee
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Laser-assisted epitaxy of III-V compounds
Author(s): U. Sudarsan; Rajendra Solanki
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Using lasers to understand and control the chemistry of semiconductor-related precursors
Author(s): Brent D. Koplitz; Valentin G. Panayotov; Kyle Hamar; Kurt Birdwhistell; Lynn Vogel Koplitz; Teresa L. T. Birdwhistell; Xiaodong Xu; Subhash Deshmukh; Jeffrey L. Brum; James Lee
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GeSi infrared photodetectors grown by rapid thermal CVD
Author(s): Bahram Jalali; Luis Naval; Anthony F. J. Levi; Pat G. Watson
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Rapid thermal oxidation for VLSI gate dielectrics applications
Author(s): Jason C.S. Woo; James S. Cable
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Forming of 'contact window' submicron topological structure by laser vacuum lithography
Author(s): Anatoly I. Sharendo; Victor V. Boksha; Eduard I. Tochitsky; Vyjacheslav E. Obukhov
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Patterned Schottky barrier solar cells
Author(s): Haim Grebel; K. J. Fang; C. Manolis
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Excimer laser ablation of Cr-contaminated polyimide
Author(s): Gouri Radhakrishnan; Nicholas Marquez
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Laser engraving
Author(s): Bingjun Zhang; Baorong Su; Yuquan Liu
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Laser processing for multichip module customization
Author(s): Robert F. Miracky; Seyed Hassan Hashemi; Tom J. Hirsch; Heinrich G. Mueller; Tom Rudwick; Scott C. Sommerfeldt; William Weigler
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Laser coalescence of gold clusters in gold-fluorocarbon composite films
Author(s): Paul B. Comita; W. Jacob; E. Kay; Ron Zhang
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Laser repair of flat panel displays
Author(s): Rodney L. Waters; Floyd R. Pothoven
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Doping of and outdiffusion from tungsten silicide films using gas immersion laser doping
Author(s): Emi Ishida; Karl-Josef Kramer; Thomas W. Sigmon; Kurt H. Weiner
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Seamless application of rapid thermal processing in manufacturing
Author(s): James S. Nakos
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