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PROCEEDINGS VOLUME 1377

Excimer Laser Materials Processing and Beam Delivery Systems
Editor(s): Bernhard P. Piwczyk
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Volume Details

Volume Number: 1377
Date Published: 1 March 1991
Softcover: 16 papers (144) pages
ISBN: 9780819404442

Table of Contents
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Excimer lasers for deep-UV lithography
Author(s): David J. Elliott; Uday K. Sengupta
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Producing a uniform excimer laser beam for materials processing applications
Author(s): Jenifer Lynn Bunis; Chris Christian Abele; James D. Campbell; George F. Caudle
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Absorption behavior of ceramic materials irradiated with excimer lasers
Author(s): Hans Kurt Toenshoff; Olaf Gedrat
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Excimer laser micromachining for passive fiber coupling to polymeric waveguide devices
Author(s): Bruce L. Booth; James L. Hohman; Kenneth B. Keating; Joseph E. Marchegiano; Sandy L. Witman
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Total internal reflection mirrors fabricated in polymeric optical waveguides via excimer laser ablation
Author(s): Jeannine M. Trewhella; Modest M. Oprysko
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Excimer laser fabrication of waveguide devices
Author(s): Marc A. Stiller
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Pulsed-laser deposition of oxides over large areas
Author(s): James A. Greer; H. Jerrold Van Hook
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Coating development for high-energy KrF excimer lasers
Author(s): James D. Boyer; Billie R. Mauro; Virgil E. Sanders
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Gas handling technology for excimer lasers
Author(s): Robert E. Turner; John L. Remo; Elaine Bradford; Alvin Dietz
Progress in gas purifiers for industrial excimer lasers
Author(s): Graham A. Naylor; Andrew John Kearsley
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Applications of excimer lasers to combustion research
Author(s): Steven J. Davis; Mark G. Allen
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Dose control for short exposures in excimer laser lithography
Author(s): Richard F. Hollman
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Novel excimer laser beam delivery technique using binary masks
Author(s): Yung-Sheng Liu; Rosalie M. Levinson; J. W. Rose
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Large-scale industrial application for excimer lasers: via-hole-drilling by photoablation
Author(s): Friedrich G. Bachmann
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