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Proceedings of SPIE Volume 1377

Excimer Laser Materials Processing and Beam Delivery Systems
Editor(s): Bernhard P. Piwczyk
Format Member Price Non-Member Price
Softcover $105.00 * $105.00 *

*Available as a photocopy reprint only. Allow two weeks reprinting time plus standard delivery time. No discounts or returns apply.

Volume Details

Volume Number: 1377
Date Published: 1 March 1991
Softcover: 16 papers (144) pages
ISBN: 9780819404442

Table of Contents
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Producing a uniform excimer laser beam for materials processing applications
Author(s): Jenifer Lynn Bunis; Chris Christian Abele; James D. Campbell; George F. Caudle
Excimer laser micromachining for passive fiber coupling to polymeric waveguide devices
Author(s): Bruce L. Booth; James L. Hohman; Kenneth B. Keating; Joseph E. Marchegiano; Sandy L. Witman
Pulsed-laser deposition of oxides over large areas
Author(s): James A. Greer; H. Jerrold Van Hook
Coating development for high-energy KrF excimer lasers
Author(s): James D. Boyer; Billie R. Mauro; Virgil E. Sanders
Gas handling technology for excimer lasers
Author(s): Robert E. Turner; John L. Remo; Elaine Bradford; Alvin Dietz

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