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Proceedings of SPIE Volume 1352

1st Intl School on Laser Surface Microprocessing
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Volume Details

Volume Number: 1352
Date Published: 1 October 1990
Softcover: 41 papers (362) pages
ISBN: 9780819404138

Table of Contents
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Excimer laser assisted etching of silicon surface in electronegative gases
Author(s): Vladimir G. Ageev; Vitali I. Konov; Andrey I. Krechetov; A. V. Kuzmichov; Alexander M. Prokhorov
Direct laser writing of conductive pathways into diamond-like carbon films
Author(s): V. Yu. Armeyev; N. I. Chapliev; Vitali I. Konov; Victor G. Ralchenko; V. E. Strelnitsky; A. Yu Volkov
Thermo-chemical writing of phase relief on the metal surfaces
Author(s): Boris S. Luk'yanchuk; E. V. Sissakian; George A. Shafeev; Michel H. Grosmann
UV laser photolysis of Mo(CO)6 and molybdenum film deposition
Author(s): Victor N. Bagratashvili; Alexander V. Evseev; Sergey Valentinov Kamayev; Michael A. Markov
Time of flight mass spectrometry of the laser produced fragments
Author(s): Sergey Sergeivich Alimpiev; Sergey M. Nikiforov; A. K. Dudojan; V. Y. Shevtshenko
Laser projection UV lithography on subliming resists
Author(s): Eduard I. Tochitsky; Anatoly I. Sharendo; Victor V. Boksha
Laser stimulation of heterogeneous reactions
Author(s): Mikhail N. Libenson; Sergei M. Minaev
Process of defect formation and diffusion in metals induced by laser radiation
Author(s): Alexander D. Zvonkov; H. M. Boranbaeva
Adsorption and laser-induced desorption of dimethylcadmium from silicon
Author(s): Alexander P. Simonov; Vladimir N. Varakin
Real-time mass-spectrometry of laser-induced chemical reactions
Author(s): Matthias Rossberg; Vladimir K. Popov; E. Linke
Excimer laser assisted deposition of SiO2-structures on semiconductor substrates from siliconorganic films
Author(s): Vladimir G. Ageev; Dang Quoc Trung; Vitali I. Konov; A. V. Kuzmichov; A. I. Maslakov; Leonid V. Velikov; D. Yu. Zaroslov
Laser generation of high amplitude surface acoustic waves
Author(s): V. Dymshakov; A. Dychne; Fedor V. Lebedev; Vladislav D. Pis'mennyi
Thin film processing for high-Tc superconductors
Author(s): Sergey V. Gaponov; M. D. Strikovsky; A. V. Bezvinner; M. A. Kalyagin; A. V. Kochemasov
Positive photoresist ablation with excimer laser
Author(s): Moishe S. Kitai; Valerie L. Popkov; Vladimir A. Semchishen
Laser cleaning of semiconductor surface
Author(s): Yu. N. Petrov
Relief of laser-induced melting in the volume
Author(s): Aleksandr V. Gorbunov; Nikolay V. Klassen
Photochemical engineering of silicon dioxide
Author(s): Parthiv Patel; Vishal Nayar; F. Micheli; Ian W. Boyd
Laser powder coating by multi-thin-layer technics
Author(s): Gerd Sepold; Reinhard Becker
Focusing of the surface electromagnetic waves
Author(s): Alexey M. Bonch-Bruevich; Mikhail N. Libenson; Alexander G. Rumjantsev; Raimondas Petruskevicius
Laser induced chemical processing of electronic materials
Author(s): Mikio Takai; Susumu Namba
Thermoelectrical phenomena in thin metallic films on rippled and rough surfaces
Author(s): Vitali I. Konov; Petr I. Nikitin; S. A. Uglov
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Deposition of Y-Ba-Cu-O films on silicon subrates
Author(s): Alex G. Akimov; S. A. Kozikov; V. G. Krigel; Anatole N. Khodan; Victor N. Bagratashvili

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