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PROCEEDINGS VOLUME 11022 • new

International Conference on Micro- and Nano-Electronics 2018
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Volume Details

Volume Number: 11022
Estimated Publication Date: 2 November 2018

Table of Contents
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Front Matter: Volume 11022
Author(s): Proceedings of SPIE
Barrier-injection transit-time diodes and transistors for terahertz generation and detection
Author(s): V. Vyurkov; A. Miakonkikh; A. Rogozhin; M. Rudenko; K. Rudenko; V. Lukichev
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Plasmonic terahertz emitters with high-aspect ratio metal gratings
Author(s): D. V. Lavrukhin; A. E. Yachmenev; I. A. Glinskiy; R. A. Khabibullin; M. Ryzhii; T. Otsuji; M. Shur; K. I. Zaytsev; D. S. Ponomarev
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Silver-based double metal waveguide for terahertz quantum cascade laser
Author(s): R. Khabibullin; D. Ushakov; A. Afonenko; N. Shchavruk; D. Ponomarev; O. Volkov; V. Pavlovskiy; I. Vasil’evskii; D. Safonov; A. Dubinov
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Tunnel undoped multiple-gate field-effect transistor with Schottky contacts
Author(s): V. Vyurkov; A. Krivospitsky; A. Miakonkikh; Yu. Semin; K. Rudenko; V. Lukichev
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Development of a molecular single-electron transistor with a single-atom charge center
Author(s): V. Gaidamachenko; E. Morozova; S. Dagesyan; E. Soldatov; E. Beloglazkina
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Charge effects in dielectric films of MIS structures being under high-field injection of electrons at ionizing radiation
Author(s): Vladimir V. Andreev; Vladimir M. Maslovsky; Dmitrii V. Andreev; Alexander A. Stolyarov
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Formation of surface states in MOS devices by space radiation protons
Author(s): Artem N. Volkov; Dmitrii V. Andreev; Vladimir M. Maslovsky
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Nanoscale planar ring-shaped matrix field emitters based on multilayer graphene/SiC
Author(s): I. L. Jityaev; A. M. Svetlichnyi; O. A. Ageev; E. Yu. Gusev
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Experimental study of a broadband vacuum photosensor with the tunnel emission from a metal nanoscale blade
Author(s): Dmitry A. Zimnyakov; Nikolay P. Aban’shin; Garif G. Akchurin; Yuri A. Avetisyan; Alexander P. Loginov; Sergey A. Yuvchenko; Alexander N. Yakunin
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Static and dynamic spin-torque-diode sensitivity induced by the thermoelectric charge and spin currents in magnetic tunnel junctions
Author(s): Gleb D. Demin; Anatoly F. Popkov
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Scalability analysis of magnetic-nano-junction-based STT-MRAM towards sub-20-nm technology nodes
Author(s): A. V. Popov; G. D. Demin; A. F. Popkov
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Investigations of the resistive switching of the TiN-TiO2-SiO2-W memristors in the oxygen atmosphere with varying pressure
Author(s): E. S. Gorlachev; V. M. Mordvintsev; S. E. Kudryavtsev
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Nanoscale profiling and memristor effect of ZnO thin films for RRAM and neuromorphic devices application
Author(s): Viktor S. Klimin; Roman V. Tominov; Vadim I. Avilov; Denis D. Dukhan; Alexey A. Rezvan; Evgeny G. Zamburg; Vladimir A. Smirnov; Oleg А. Ageev
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Simulation of graphene field-effect transistors and resonant tunneling diodes based on carbon nanomaterials
Author(s): Igor I. Abramov; Vladimir A. Labunov; Natali V. Kolomejtseva; Irina A. Romanova; Irina Y. Shcherbakova
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Modeling of the submicron MOSFETs characteristics for UTSi technology
Author(s): A. S. Adonin; K. O. Petrosyants; D. A. Popov
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A linear “extrinsic” compact model for short-channel MOSFET drain current asymptotic dependence on drain bias in saturation regime
Author(s): V. Turin; R. Shkarlat; V. Poyarkov; O. Kshensky; G. Zebrev; B. Iñiguez; M. Shur
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Compact modeling of electrical characteristics of p-MNOS based RADFETs
Author(s): E. Mrozovskaya; P. Zimin; P. Chubunov; G. Zebrev
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A novel approach to model high-speed microelectronic switch on the basis of hydrodynamic approximation
Author(s): E. Ryndin; A. Al-Saman
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Quasi-hydrodynamic numerical model of high-speed on-chip photodetectors for optical interconnections
Author(s): I. V. Pisarenko; E. A. Ryndin; B. G. Konoplev
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Efficiency of terahertz harmonic generation in GaAs quantum wire structure: a Monte Carlo simulation
Author(s): Andrei V. Borzdov; Vladimir M. Borzdov; Vladimir A. Labunov; Vladimir V. V’yurkov
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Arrays of several Josephson junctions connected to oscillatory circuit
Author(s): Victor K. Kornev; Nikolay V. Kolotinskiy
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Simulation of single-electron transistor based on the molecule with single-atom charge center
Author(s): A. A. Parshintsev; V. V. Shorokhov; E. S. Soldatov
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TCAD-based performance analysis of nanoscale vacuum field-emission transistors at advanced technology nodes
Author(s): I. D. Evsikov; N. A. Djuzhev; G. D. Demin; M. A. Makhiboroda
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A low actuation voltage MEMS switch with protection against stiction
Author(s): Ilia V. Uvarov; Alexander N. Kupriyanov
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Research of the microelectromechanical switch with different materials of metal membrane
Author(s): Igor E. Lysenko; Alexey V. Tkachenko; Olga A. Ezhova
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Finite-element predictive 3D modelling and optimization of membrane-based thermoresistive MEMS accelerometers
Author(s): N. A. Djuzhev; R. V. Lapshin; A. M. Belin; A. I. Ovodov; D. V. Novikov; G. D. Demin
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ANSYS simulation of the microaccelerometer sensor
Author(s): S. Timoshenkov; V. Kalugin; S. Anchutin; E. Kochurina
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Automated approach to the analysis of geometric parameters of MEMS elements
Author(s): N. Izrailev; A. Kazachkov; I. Rod; A. Isachenko; D. Shamiryan
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Research and analysis of heat exchange processes of a micromechanical mirror based on a thermal microactuator
Author(s): S. Evstafyev; V. Samoylikov
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Silicon nanobridge as a high quality mechanical resonator
Author(s): D. E. Presnov; A. A. Dorofeev; I. V. Bozhev; A. S. Trifonov; S. G. Kafanov; Yu. A. Pashkin; V. A. Krupenin
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Determination of vibration axes of the micromachined ring resonator for the modal tuning purposes
Author(s): O. V. Morozov; I. V. Uvarov
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Improving the selectivity of carbon nanotube-based gas sensors via UV irradiation
Author(s): N. Nekrasov; I. Bobrinetskii; V. Nevolin; S. Khartov
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Hybrid acousto-nano-biosensor
Author(s): Vladimir V. Kolesov; Vladimir V. Anisimkin; Iren E. Kuznetsova; Eugenii S. Soldatov; Sarkis A. Dagesyan; Alexander E. Melnikov; Vadim V. Kashin; Andrey V. Smirnov
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Thyroglobulin detection by biosensor based on two independent Si NW FETs
Author(s): G. V. Presnova; I. I. Tcinyaykin; I. V. Bozhev; M. Yu. Rubtsova; V. V. Shorokhov; A. S. Trifonov; M. M. Ulyashova; V. A. Krupenin; D. E. Presnov
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High-sensitive ultra-low frequency hydrophone
Author(s): T. V. Krishtop; D. A. Zhevnenko; S. V. Kokhanovsky; P. V. Dudkin; A. S. Zlobin; A. Y. Belyaev; V. G. Krishtop
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Influence of the electromigration on the characteristics of electrochemical microsystems
Author(s): D. A. Zhevnenko; E. S. Gornev; V. O. Kuzmenko ; P. V. Dudkin ; S. N. Zhabin ; T. V. Krishtop ; V. G. Krishtop
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Silicon oxides and silicon nitrides: structure, properties and applications in memristors
Author(s): V. A. Volodin; G. N. Kamaev; V. N. Kruchinin; V. A. Gritsenko
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Swift heavy ion stimulated formation of the Si quantum dots in Si/SiO2 multilayer heterostructures
Author(s): G. N. Kamaev; S. G. Cherkova; A. A. Gismatulin; V. A. Volodin; V. A. Skuratov
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Luminescent properties of GeOx thin films and GeO/SiO2 heterostructures modified with swift heavy ions
Author(s): S. G. Cherkova; V. A. Volodin; V. A. Skuratov; M. Stoffel; H. Rinnert; M. Vergnat
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The manifestation of rising of the impurity density of states after the field stress in increasing of the effective electron mobility in the inversion channel at the silicon-oxide contact
Author(s): Galina V. Chucheva; Evgeny I. Goldman; Asaf Nabiev; Valentina G. Naryshkina
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Features of the field damage of ultra-thin insulating layers of the silicon oxide
Author(s): Galina V. Chucheva; Evgeny I. Goldman; Yuriy V. Gulyaev
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Fabrication technology of sol-gel Al2O3 films for organic field-effect transistors
Author(s): Sergey P. Avdeev; Evgeny Yu. Gusev
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Influence of power and pulsed regime of low frequency discharge on clusters incorporation in dielectric films for ReRAM application
Author(s): A. A. Popov; A. E. Berdnikov
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Structural and morphological properties of Ga(Al)N grown by MBE on 3C-SiC/Si (111) templates with off-axis and on-axis substrate orientation
Author(s): K. A. Tsarik; S. D. Fedotov; V. K. Nevolin; V. N. Statsenko
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Laser reduction of graphene oxide thin films for nanoelectronic application
Author(s): I. A. Komarov; N. S. Struchkov; D. D. Levin; G. O. Silakov; E. E. Danelyan; M. A. Orlov; S. N. Sсherbin; V. V. Bogachev; N. K. Lagodenko
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Effects of vacuum-plasma etching on the electrical properties of thin ferroelectric PZT films
Author(s): D. A. Abdullaev; D. S. Seregin; D. N. Zubov; K. A. Vorotilov
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Electric-field-induced domain switching and pinning state in lead-free ferroelectric BST 80/20 film
Author(s): Mikhail S. Afanasiev; Galina V. Chucheva; Dmitry A. Kiselev
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Formation features and electrophysical properties of ferroelectric films ZnO study
Author(s): A. O. Zotov; A. A. Perevalov; V. I. Shevyakov; A. N. Belov
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Influence of annealing on nanocrystalline LiNbO3 films properties
Author(s): Viktor S. Klimin; Zakhar E. Vakulov; Roman V. Tominov; Yuriy N. Varzarev; Iosif E. Clemente; Andrew V. Miakonkikh; Konstantin V. Rudenko; Oleg A. Ageev
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Electronic and optical properties of MoS2 thin films deposited by magnetron sputtering studying
Author(s): A. I. Belikov; Kyaw Zin Phyo; V. N. Kalinin; A. I. Semochkin
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Nanocrystalline diamond films heavily doped by boron: structure, optical and electrical properties
Author(s): V. A. Volodin; S. G. Cherkova; V. Kumar; V. A. Sachkov; V. Mortet; A. Taylor; Z. Remes; T. H. Stuchliková; J. Stuchlik
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Concept of glass formation in chalcogenide systems and the possibility of predicting new compounds for micro- and nanoelectronics
Author(s): Natalia E. Korobova; Sergey P. Timoshenkov; Viktor S. Minaev
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The opportunities of Rutherford backscattering spectroscopy for analysis of multilayer nanometer thin film structures
Author(s): V. Bachurin; A. Churilov; N. Melesov; E. Parshin; A. Rudy; O. Trushin
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Effect of mechanical deformations on absorption spectrum of metallic films of nanometer thickness
Author(s): K. M. Tsysar; V. G. Andreev; V. S. Zelensky; E. M. Smelova; A. M. Saletsky; V. A. Vdovin
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Different magnetooptical properties of metallized nanostructured arrays on silicon surface
Author(s): Alexander V. Prokaznikov; Vladimir A. Paporkov; Nikolay Yu. Zvezdin
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Energetics of domain wall in magnetic nanowire
Author(s): O. S. Trushin; E. Granato; S. C. Ying
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Maskless nanolithography on the basis of microfocus x-ray tubes: conversion of electron energy into the BeKα line
Author(s): N. I. Chkhalo; A. Ya. Lopatin; A. E. Pestov; N. N. Salashchenko; G. D. Demin; N. A. Dyuzhev; M. A. Makhiboroda
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Cellular automata method for directed self-assembly modeling
Author(s): E. Gornev; M. Litavrin; I. Matyushkin; O. Gushin
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Simulation of dry e-beam etching of resist and experimental evidence
Author(s): A. Rogozhin; F. Sidorov; M. Bruk; E. Zhikharev
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Fabrication of electrodes for a logic element based on a disordered dopant atoms network
Author(s): S. A. Dagesyan; S. Yu. Ryzhenkova; D. E. Presnov; I. V. Sapkov; V. R. Gaydamachenko; G. A. Zharik; A. S. Stepanov
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Formation of nanosized elements by ion beam lithography for multiple fin field effect transistor prototyping
Author(s): K. A. Tsarik; A. I. Martynov; S. D. Fedotov; V. K. Nevolin
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Mask formation on GaAs substrate by focused ion beams of Ga+ for plasma chemical etching
Author(s): Viktor S. Klimin; Ivan N. Kots; Victoria V. Polyakova; Alexey A. Rezvan; Oleg A. Ageev
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Methods and means of experimental investigation of gas-phase deposition of material layers in MEMS processes
Author(s): V. Samoylikov; S. Evstafyev
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Synergistic effects of deformation and solid-state reactions in Si with buried glass layer initiated by annealing in non-isothermal reactor
Author(s): Yuri I. Denisenko
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Induced bistability into quartz glass by silicon wafer heat treatment in lamp-based reactor
Author(s): Valeriya P. Prigara; Vladimir V. Ovcharov
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Localization of a thermo-optical traveling wave at an optical inhomogeneity in a silicon wafer under lamp-based heating
Author(s): Vladimir V. Ovcharov; Valeriya P. Prigara; Alexey L. Kurenja; Valery I. Rudakov
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Investigation of technological operations for manufacturing 3D micro-assemblies with embedded elements
Author(s): S. Kruchinin; S. Timoshenkov
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Deep silicon plasma etching: selection of processes for different applications
Author(s): A. V. Miakonkikh; S. N. Averkin; K. V. Rudenko; V. F. Lukichev
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Sidewall defects in deep cryogenic Si etching in SF6/O2 plasma: a numerical simulation
Author(s): M. Rudenko; A. Miakonkikh; D. Kurbat; V. Lukichev
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Features of silicon deep plasma etching process at 3D-TSV structures producing
Author(s): A. A. Golishnikov; D. A. Kostyukov; M. G. Putrya; V. I. Shevyakov
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Effect of the sublayer material on the formation of electrical contact and the growth rate of carbon nanotubes in a low-temperature plasma using the example of Ni/Ti/Si and Fe/W/Si structures
Author(s): Viktor S. Klimin; Alexey А. Rezvan; Oleg A. Ageev
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Formation of metallic nanowire and nanonet structures on the surface of SiO2 by combine plasma etching processes
Author(s): I. I. Amirov; E. S. Gorlachev; L. A. Mazaletsky; M. O. Izyumov
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Fabrication and properties of SOI-based planar silicon nanowire arrays
Author(s): Alexander E. Rogozhin; Andrey V. Miakonkikh; Andrey A. Tatarintsev; Konstantin V. Rudenko
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Effect of Ar ion-plasma treatment on residual stress in thin Cr films
Author(s): A. Babushkin; R. Selyukov; I. Amirov
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Plasma deposition of carbon-silicon nanocomposite for microelectromechanical applications
Author(s): Evgeny Yu. Gusev; Julia Y. Jityaeva; Sergey A. Lisitsyn; Oleg A. Ageev
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Cyclic discrete etching of Silicon oxide in deposition-sputtering cycles: towards to ALE
Author(s): V. Kuzmenko; A. Miakonkikh; K. Rudenko
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Study of synergy phenomena for atomic layer etching of aluminum and hafnium oxides
Author(s): V. Kuzmenko; A. Miakonkikh; K. Rudenko
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Optical emission spectra of BF3/Ar-plasma: detection of the boron 563.3 nm spectral line and identification of BF band spectra
Author(s): V. Kudrya
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Broadband impedance matching in white cavity
Author(s): E. S. Moiseev; K. I. Gerasimov; M. Sabooni; A. Tashchilina; S. A. Moiseev
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Robust random number generator based on field effect transistor
Author(s): F. Ablayev; S. N. Andrianov; D. V. Vahrushev; M. T. Ziatdinov; V. S. Romanov; A. A. Soloviev
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Quantum computer based on triangular atom-photon molecule
Author(s): S. A. Moiseev; F. M. Ablayev; S. N. Andrianov; A. V. Vasiliev
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Multi-qubit controlled NOT gates for artificial intelligence natural languages processing
Author(s): F. M. Ablayev; S. N. Andrianov; N. S. Andrianova; A. A. Kalachev; A. V. Vasiliev
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Homogeneous atomic ensembles and single-mode field: review of simulation results
Author(s): A. V. Kulagin; V. Y. Ladunov; Y. I. Ozhigov; N. A. Skovoroda; N. B. Victorova
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Quantum lock on dark states
Author(s): Y. I. Ozhigov
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Multiple quantum coherence transfer and quantum correlations in NMR experiments in solids
Author(s): G. A. Bochkin; A. V. Fedorova; E. B. Fel'dman; A. I. Zenchuk
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Quantum entanglement in trimer clusters
Author(s): E. B. Fel'dman; E. I. Kuznetsova
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Quantum entanglement in spin chains with the XY Hamiltonian at the quantum state transfer
Author(s): I. D. Lazarev; E. I. Kuznetsova
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Quantum information processing with macroscopic two-component Bose-Einstein condensates
Author(s): Alexey N. Pyrkov; Tim Byrnes
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Jumps of optimal measurement angle and fractures on the curves of quantum correlation functions
Author(s): M. A. Yurischev
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Hitting time for quantum walks of identical particles
Author(s): Alexey A. Melnikov; Aleksandr P. Alodjants; Leonid E. Fedichkin
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Multiphoton subtracted thermal states: description, preparation, measurement and utilization
Author(s): K. G. Katamadze; G. V. Avosopiants; B. I. Bantysh; Yu. I. Bogdanov; S. P. Kulik
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Theoretical and experimental study of multi-mode thermal states with subtraction of a random number of photons
Author(s): Yu. I. Bogdanov; N. A. Bogdanova; K. G. Katamadze; G. V. Avosopiants; S. P. Kulik
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Quantum tomography based on principles of completeness, adequacy and fidelity
Author(s): Yu. I. Bogdanov; N. A. Bogdanova; B. I. Bantysh; D. V. Fastovets; V. F. Lukichev
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High-fidelity quantum tomography with imperfect measurements
Author(s): B. I. Bantysh; D. V. Fastovets; Yu. I. Bogdanov
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The concept of weak measurements and the super-efficiency of quantum tomography
Author(s): Yu. I. Bogdanov; N. A. Bogdanova; B. I. Bantysh; Yu. A. Kuznetsov
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On the fidelity of quantum gates under T1 and T2 relaxation
Author(s): Andrey Yu. Chernyavskiy
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Quantum approach to the dynamical systems modeling
Author(s): Yu. I. Bogdanov; N. A. Bogdanova; D. V. Fastovets; V. F. Lukichev
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Representation of Boolean functions in terms of quantum computation
Author(s): Yu. I. Bogdanov; N. A. Bogdanova; D. V. Fastovets; V. F. Lukichev
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Machine learning methods in quantum computing theory
Author(s): D. V. Fastovets; Yu. I. Bogdanov; B. I. Bantysh; V. F. Lukichev
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Two-way quantum and classical machines with small memory for online minimization problems
Author(s): Kamil Khadiev; Aliya Khadieva
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Molecule ground state energy estimation via continuous-time quantum walks
Author(s): Leonid Fedichkin; Fedor P. Meshchaninov
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Sequences of selective rotation operators to engineer interactions for quantum annealing on three qutrits
Author(s): V. E. Zobov; I. S. Pichkovskiy
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Fast quantum randomness generation from vacuum fluctuation induced phase diffusion between pulses of laser diode
Author(s): Violetta Sharoglazova; Roman Ermakov; Anton Losev; Vladimir Zavodilenko; Vladimir Kurochkin; Yuriy Kurochkin
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