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PROCEEDINGS VOLUME 10931 • new

MOEMS and Miniaturized Systems XVIII
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Volume Details

Volume Number: 10931
Estimated Publication Date: 7 March 2019

Table of Contents
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A highly linear piezoelectric quasi-static MEMS mirror with mechanical tilt angles of larger than 10°
Author(s): S. Gu-Stoppel; T. Lisec; S. Fichtner; Nico Funck; Christian Eisermann; Fabian Lofink; Bernhard Wagner; Axel Müller-Groeling
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Large 1D and 2D micro-mirror arrays for universe and Earth observation
Author(s): Frederic Zamkotsian; Yves Petremand; Patrick Lanzoni; Sebastien Lani; Rudy Barette; Branislav Timotijevic; Michel Despont
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MEMS piston mirror arrays with force-balanced single spring
Author(s): P. Dürr; A. Neudert; D. Kunze; M. Friedrichs
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MEMS swept laser source with enhanced performance
Author(s): John O. Gerguis; Yasser M. Sabry; Ahmed M. Hassanen; Haitham Omran; Diaa Khalil
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Infrared analyzer with MEMS microspectrometer optimized for handheld explosive gas detection
Author(s): Doris Mutschall; Martin Gorek; Martin Ebermann; Rainer Krage; Norbert Neumann
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MEMS based NIR spectrometer with extended spectral range
Author(s): Heinrich Grüger; Jens Knobbe; Tino Pügner
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Grating-based ultra-compact SWNIR spectral sensor head developed through MOEMS technology
Author(s): Takafumi Yokino; Katsuhiko Kato; Anna Ui; Shinichi Nakata; Toshiteru Suzuki; Ryosuke Abe; Shigeru Suzuki; Yoshihisa Warashina; Katsumi Shibayama; Koei Yamamoto
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MEMS FTIR optical spectrometer enables detection of volatile organic compounds (VOCs) in part-per-billion (ppb) range for air quality monitoring
Author(s): Alaa Fathy; Yasser M. Sabry; Mariam Amr; Martine Gnambodoe-Capo-chichi; Momen Anwar; Amr O. Ghoname; Ahmed Amr; Ahmed Saeed; Mina Gad; Mohamed Al Haron; Mazen Erfan; Yamin Leprince-Wang; Bassam Saadany; Diaa Khalil; Tarik Bourouina
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Compact OCT probe for flexible endoscopy enabled by piezoelectric scanning of a fiber/lens assembly
Author(s): Ronak Narendra Shah; Simon Kretschmer; Julian Nehlich; Çağlar Ataman; Hans Zappe
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A fiber scanner based on a robust Cu/W bimorph electrothermal MEMS stage
Author(s): Liang Zhou; Zhi Li; Mengyue Liang; Yanping Chen; Xiaoyang Zhang; Huikai Xie
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New wide tunable external cavity interband cascade laser based on a micro-electro-mechanical system device
Author(s): Morten Hoppe; Hanna Rohling; Sebastian Schmidtmann; Hervé Tatenguem; Tobias Milde; Joachim R. Sacher
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Bistable silicon photonic MEMS switches
Author(s): Hamed Sattari; Adrien Toros; Teodoro Graziosi; Niels Quack
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Tuning of 2D rod-type photonic crystal cavity for optical modulation and impact sensing
Author(s): Ogulcan E. Orsel; Mertcan Erdil; Cenk Yanik; Serdar Kocaman
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Cubic-inch MOEMS spectral imager
Author(s): Antti Näsilä; Christer Holmlund; Endija Briede; Rami Mannila; Roberts Trops; Martti Blomberg; Ingmar Stuns; Bin Guo; Kai Viherkanto; Kari Rainio; Heikki Saari; Anna Rissanen
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A scanning 3D sensor and its object recognition for autonomous robots
Author(s): Joon-Oh Shin; In-Gyu Jang; Dae-Hee Park ; Yong-Hwa Park
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Ultrathin Arrayed Camera with 3D Capillary Filling Method for Fingerprint Imaging (Conference Presentation)
Author(s): Sang-In Bae; Kyung-Won Jang; Ki-Soo Kim; Ki-Hun Jeong
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Integrated confocal imaging system
Author(s): Stefan Richter; Carsten Wehe; Uwe Wolf; Thomas Nobis; Lars-Christian Wittig; Philipp Huebner; Alexander Froeber; Gerhard Krampert; Dirk Thiele; Joerg Muetze; Michael Kempe
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MEMS mirror module for programmable light system
Author(s): Abhishek Kasturi; Veljko Milanovic; Frank Hu; Hong Joo Kim; Derek Ho; Daniel Lowell
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Miniaturization and batch fabrication of two-axis water-immersible scanning mirrors
Author(s): Song Xu; Suangliang Li; Jun Zou
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Deeply etched silicon optical cavity with curved slotted micromirrors (Conference Presentation)
Author(s): Ahmad Mahfouz; Haitham Omran; Yasser M. Sabry; Diaa Khalil; Frédéric Marty; Tarik Bourouina
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New generation of the miniature bimorph mirrors for compensation of the wavefront distortions
Author(s): Vladimir Toporovsky; Alexis Kudryashov; Vadim Samarkin; Julia Sheldakova; Alexey Rukosuev; Arkadiy Skvortsov; Danila Pshonkin
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VIS Fabry-Pérot Interferometer with structured (TiO2/PE-SiO2)³ Bragg-reflectors on 5 mm large LP-Si3N4 membranes
Author(s): Christian Helke; Karla Hiller; Jan Seiler; Thomas Werner; Marco Meinig; Steffen Kurth; Thomas Otto
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Investigation of mechanical and optical properties of 3D printed materials serving as substrate for place and bend assembly
Author(s): Heinrich Grüger; Jens Knobbe; Mahmoud H. Sabiha
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Inverted complementary plasmonic structures of aluminum nanoholes and nanodisks for transmissive structural coloration in visible range (Conference Presentation)
Author(s): Myeong-Su Ahn; Taerin Chung; Charles Hwang; Sang-In Bae; Ki-Hun Jeong
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On-chip silicon-photonics based integrated vibrometer
Author(s): Viphretuo Mere; Aneesh Dash; Rakshitha Kallega; Akshay Naik; Rudra Pratap; Shankar Kumar Selvaraja
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Photoacoustic cell on silicon for mid-infrared QCL-based spectroscopic analysis
Author(s): Jean-Guillaume Coutard; Alain Glière; Jean-Marc Fedeli; Oliver Lartigue; Jules Skubich; Guillaume Aoust; Alexandre Teulle; Thomas Strahl; Sergio Nicoletti; Mathieu Carras; Laurent Duraffourg
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Miniature MOEMS hyperspectral imager with versatile analysis tools
Author(s): Roberts Trops; Anna-Maria Hakola; Severi Jääskeläinen; Antti Näsilä; Leevi Annala; Matti A. Eskelinen; Heikki Saari; Ilkka Pölönen; Anna Rissanen
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Compact FTIR engine made through MOEMS technology
Author(s): Tomofumi Suzuki; Tatsuya Sugimoto; Kyosuke Kotani; Yutaka Kuramoto; Katsumi Shibayama
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Designs of on-chip Fourier transform spectrometers based on semiconductor waveguides
Author(s): Liang Li; Chenyu Peng; Yi Qi; Guangcan Zhou; Qifeng Qiao; Fook Siong Chau; Guangya Zhou
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Ultra wide band MIR MEMS FTIR spectrometer
Author(s): Amr O. Ghoname; Yasser M. Sabry; Momen Anwar; Ahmed Saeed; Bassam Saadany; Diaa Khalil
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MEMS-in-the-lens 3D beam scanner for in vivo microscopy
Author(s): David L. Dickensheets; Tianbo Liu; Milind Rajadhyaksha
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All-optical forward-view photoacoustic endoscopy
Author(s): Guangyao Li; Zhendong Guo; Sung-Liang Chen
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Switchable pattern projector module with rotational offset of double microlens arrays for 3D endoscopy (Conference Presentation)
Author(s): Sung-Pyo Yang; Jae-Beom Kim; Kyungmin Hwang; Ki-Hun Jeong
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Endoscopic orientation by multimodal data fusion
Author(s): Silvio Pulwer; Richard Fiebelkorn; Christoph Zesch; Patrick Steglich; Claus Villringer; Franccesco Villasmunta; Egbert M. Gedat; Jan Handrich; Sigurd Schrader; Ralf Vandenhouten
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Vibrating dichroic MEMS scanner based line scan multiphoton endomicroscope
Author(s): Yingshun Xu; Jin Cheng; Naitao Xu; Lanping Zhu; Yuzhu Cao; Bei Fang; Xin Chen; Suogang Wang; Peter T. C. So
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Data based modelling and identification of nonlinear SDOF MOEMS mirror
Author(s): David Brunner; Han Woong Yoo; Thomas Thurner; Georg Schitter
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