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Technology of Proximal Probe Lithography
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Volume Details

Volume Number: 10310
Date Published: 3 October 1993
Softcover: 0 papers () pages

Table of Contents
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Front Matter: Volume 10310
Author(s): Proceedings of SPIE
Nanolithography and atomic manipulation on silicon surfaces by STM
Author(s): Francois Grey; A. Kobayashi; H. Uchida; D. H. Huang; M. Aono
Scanning tunneling microscope-based nanolithography for electronic device fabrication
Author(s): Joseph W. Lyding; Roger T. Brockenbrough; Patrick J. Fay; John R. Tucker; Karl Hess
Arrayed lithography using STM-based microcolumns
Author(s): T. H. Philip Chang; Lawrence P. Muray; Urs Staufer; Mark A. McCord; Dieter P. Kern
Direct writing of metallic nanostructures with the scanning tunneling microscope
Author(s): Alejandro L. de Lozanne; W. F. Smith; E. E. Ehrichs
Fabrication of nanometer scale structures
Author(s): Mahir A. Nayfeh
Fabrication and characterization using scanned nanoprobes
Author(s): Grover C. Wetsel; Sterling E. McBride; Herschel M. Marchman
Metrology with scanning probe microscopes
Author(s): Joseph E. Griffith; David A. Grigg; G. P. Kochanski; Michael J. Vasile; Phillip E. Russell
Metrology applications of scanning probe microscopes
Author(s): Leigh Ann Files-Sesler; John N. Randall; Francis G. Celii

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