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PROCEEDINGS VOLUME 10224

International Conference on Micro- and Nano-Electronics 2016
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Volume Details

Volume Number: 10224
Date Published: 26 January 2017
Softcover: 106 papers (820) pages
ISBN: 9781510609495

Table of Contents
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Front Matter: Volume 10224
Author(s): Proceedings of SPIE
HfO2/Pr2O3 gate dielectric stacks
Author(s): F. Sidorov; A. Molchanova; A. Rogozhin
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Low resistance Ti/Si/Ti/Al/Ni/Au ohmic contact for AlGaN/GaN HEMT
Author(s): Stanislav A. Shostachenko; Roman V. Zakharchenko; Roman V. Ryzhuk; Darya A. Kulyamina; Nikolay I. Kargin
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Tungsten alloyed with rhenium as an advanced material for heat-resistant silicon ICs interconnects
Author(s): A. N. Belov; Yu. A. Chaplygin; A. A. Golishnikov; D. A. Kostyukov; M. G. Putrya; S. O. Safonov; V. I. Shevyakov
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Metal-assisted chemical etching of silicon with different metal films and clusters: a review
Author(s): O. Pyatilova; S. Gavrilov; A. Sysa; A. Savitskiy; A. Shuliatyev; A. Dudin; A. Pavlov
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Mechanical properties of bimetallic one-dimensional structures
Author(s): Ekaterina M. Smelova; Ivan I. Sitnikov; Vladimir S. Zelensky; Kseniya M. Tsysar; Valery G. Andreev; Vladimir A. Vdovin; Alexander M. Saletsky
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Optical coefficients of nanometer-thick copper and gold films in microwave frequency range
Author(s): I. Khorin; N. Orlikovsky; A. Rogozhin; A. Tatarintsev; S. Pronin; V. Andreev; V. Vdovin
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Effective optical constants of silver nanofilms calculated in wide frequency range
Author(s): Kseniya M. Tsysar; Valery G. Andreev; Vladimir A. Vdovin
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Analysis of contribution from various order diffraction maxima to complex magneto-optical Kerr effect from three-dimensional structures like magnetophotonic crystals
Author(s): Ivan S. Zarev; Nikolay Yu. Zvezdin; Vladimir A. Paporkov; Alexander V. Prokaznikov
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Modulation of magnetic interaction in Bismuth ferrite through strain and spin cycloid engineering
Author(s): Rama Shanker Yadav; Hilal Ahmad Reshi; Shreeja Pillai; D. S. Rana; Vilas Shelke
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Quantum-mechanical relaxation model for characterization of fine particles magnetic dynamics in an external magnetic field
Author(s): I. Mischenko; M. Chuev
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GeSi nanocrystals formed by high temperature annealing of GeO/SiO2 multilayers: structure and optical properties
Author(s): V. A. Volodin; A. G. Cherkov; V. I. Vdovin; M. Stoffel; H. Rinnert; M. Vergnat
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Hydrogenated amorphous silicon based p-i-n structures with Si and Ge nanocrystals in i-layers
Author(s): V. A. Volodin; G. K. Krivyakin; A. A. Shklyaev; S. A. Kochubei; G. N. Kamaev; A. V. Dvurechendkii; A. Purkrt; Z. Remes; R. Fajgar; T. H. Stuchliková; J. Stuchlik
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Investigation of the phase formation from nickel coated nanostructured silicon
Author(s): Yulia I. Shilyaeva; Olga V. Pyatilova; Alexandra Yu. Berezkina; Artem V. Sysa; Alexander A. Dudin; Dmitry I. Smirnov; Sergey A. Gavrilov
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Chemical surface treatment of Ge2Sb2Te5 thin films for phase change memory application
Author(s): M. S. Mikhailova; S. Y. Nemtseva; V. B. Glukhenkaya; P. I. Lazarenko; A. A. Sherchenkov; S. A. Kozyukhin; S. P. Timoshenkov
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Some important aspects in the glass structure of chalcogenide systems
Author(s): Viktor S. Minaev; Sergey P. Timoshenkov; Natalia E. Korobova; Viktor V. Kalugin
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Study of morphological characteristic of por-Si formed using metal-assisted chemical etching by BET-method and fractal geometry
Author(s): Anton N. Boyko; Olga V. Pyatilova; Rustam M. Kalmykov; Dahir S. Gaev; Sergei P. Timoshenkov; Sergei A. Gavrilov
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Formation of nanoporous structure in silicon substrate using two-stage annealing process
Author(s): Yuri I. Denisenko; Valery I. Rudakov
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Application of porous alumina formed in selenic acid solution for nanostructures investigation via Raman spectroscopy
Author(s): Y. V. Nazarkina; S. A. Gavrilov; A. A. Polohin; D. Gromov; Y. P. Shaman
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Low-threshold field emission in planar cathodes with nanocarbon materials
Author(s): V. Zhigalov; V. Petukhov; A. Emelianov; V. Timoshenkov; Yu. Chaplygin; A. Pavlov; A. Shamanaev
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The features of CNT growth on catalyst-content amorphous alloy layer by CVD-method
Author(s): S. Dubkov; S. Bulyarskii; A. Pavlov; A. Trifonov; E. Kitsyuk; P. Mierczynski; T. Maniecki; R. Ciesielski; S. Gavrilov; D. Gromov
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Low-dimensional transit-time diodes for terahertz generation
Author(s): R. Khabutdinov; I. Semenikhin; F. Davydov; D. Svintsov; V. Vyurkov; L. Fedichkin; K. Rudenko; A. V. Borzdov; V. M. Borzdov
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Efficiency of the signal detection in RF and sub THz ranges by means of GaAs tunnel diodes
Author(s): M. A. Dresvyannikov; A. L. Karuzskii; A. V. Perestoronin; V. V. Priimochenko; A. M. Tskhovrebov; L. N. Zherikhina
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Electrically stimulated high-frequency replicas of a resonant current in GaAs/AlAs resonant-tunneling double-barrier THz nanostructures
Author(s): A. A. Aleksanyan; A. L. Karuzskii; I. P. Kazakov; Yu. A. Mityagin; V. N. Murzin; A. V. Perestoronin; S. S. Shmelev; A. M. Tskhovrebov
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Photoresponse in graphene field effect transistor under ultra-short pulsed laser irradiation
Author(s): Aleksei V. Emelianov; Dmitry M. Kireev; Nerea Otero; Pablo Romero; Ivan I. Bobrinetskiy
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Dielectric influence on IV curve of graphene field effect transistor
Author(s): Stanislav A. Shostachenko; Roman V. Zakharchenko; Gennady I. Zebrev; Yaroslav M. Stanishevskiy; Nikolay I. Kargin
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Sn nanothreads in GaAs: experiment and simulation
Author(s): I. Semenikhin; V. Vyurkov; A. Bugaev; R. Khabibullin; D. Ponomarev; A. Yachmenev; P. Maltsev; M. Ryzhii; T. Otsuji; V. Ryzhii
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Thin film ruthenium microstructures for transition edge sensors
Author(s): A. S. Ilin; I. A. Cohn; A. N. Vystavkin; A. G. Kovalenko
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Investigation of memristor effect on the titanium nanowires fabricated by focused ion beam
Author(s): V. I. Avilov; O. A. Ageev; I. L. Jityaev; A. S. Kolomiytsev; V. A. Smirnov
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Resistive switching of vertically aligned carbon nanotube by a compressive strain
Author(s): Marina V. Ilina; Yuriy F. Blinov; Oleg I. Ilin; Viktor S. Klimin; Oleg A. Ageev
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Simulation of field-effect transistors and resonant tunneling diodes based on graphene
Author(s): Igor I. Abramov; Vladimir A. Labunov; Natali V. Kolomejtseva; Irina A. Romanova
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Ensemble Monte Carlo simulation of electron transport in GaAs/AlAs quantum wire structure under the effect of terahertz electric field
Author(s): Andrei V. Borzdov; Vladimir M. Borzdov; Vladimir V. V'yurkov
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Thermo injecting electrical instability in the AlxGa1-xAs/GaAs heterostructures with tunnel-nontransparent potential barriers
Author(s): S. A. Nikitov; P. P. Maltsev; V. A. Gergel; A. V. Verhovtseva; N. M. Gorshkova; V. V. Pavlovskiy; V. S. Minkin; A. A. Trofimov; A. Yu. Pavlov; R. A. Khabibullin
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I-V characteristics simulation of silicon carbide Ti/4H-SiC Schottky diode
Author(s): P. Panchenko; S. Rybalka; A. Malakhanov; E. Krayushkina; A. Radkov
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Development of drift-diffusion numerical models of high-speed on-chip photodetectors with heterojunctions
Author(s): I. V. Pisarenko; E. A. Ryndin
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Numerical modeling of microwave switchers with subpicosecond time delay
Author(s): B. Konoplev; E. Ryndin
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Ambipolar memristor-based oscillator
Author(s): Vladimir V. Rakitin; Alexander V. Rakitin
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The spatially dispersive eigenvalues of permittivity operator and frequency-dependent surface impedance for conductors without the dc dissipation
Author(s): M. A. Dresvyannikov; A. P. Chernyaev; A. L. Karuzskii; Yu. A. Mityagin; A. V. Perestoronin; N. A. Volchkov
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Calculation of the high-frequency conductivity and the Hall constant of a thin semiconductor film
Author(s): O. V. Savenko; D. N. Romanov; I. A. Kuznetsova
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A simple calculation method for heavy ion induced soft error rate in space environment
Author(s): A. M. Galimov; I. V. Elushov; G. I. Zebrev
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Compact modeling of radiation-induced drain leakage current
Author(s): M. G. Drosdetsky; V. V. Orlov; G. I. Zebrev
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Total ionizing dose effects modeling in common-gate tri-gate FinFETs using Verilog-A
Author(s): Maxim S. Gorbunov; Gennady I. Zebrev
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Application of triple modular redundancy for soft error mitigation in 65-28 nm CMOS VLSI
Author(s): A. P. Skorobogatov
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Layout-aware simulation of soft errors in sub-100 nm integrated circuits
Author(s): A. Balbekov; M. Gorbunov; S. Bobkov
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Silicon ohmic lateral-contact MEMS switch for RF applications
Author(s): A. Rogozhin; A. Miakonkikh; A. Tatarintsev; K. Lebedev; V. Kalnov; K. Rudenko; V. Lukichev
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A low actuation voltage bistable MEMS switch: design, fabrication and preliminary testing
Author(s): Ilya V. Uvarov; Victor V. Naumov; Olga M. Koroleva; Elena I. Vaganova; Ildar I. Amirov
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Research of the micromechanical three-axis accelerometer
Author(s): B. Konoplev; I. Lysenko; E. Ryndin; O. Ezhova; F. Bondarev
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Simulation of heavy charged particles damage on MEMS
Author(s): V. Shakhnov; A. Glushko; V. Makarchuk; L. Zinchenko; V. Terekhov; S. Mikhaylichenko
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Anchored multi-DOF MEMS gyroscope having robust drive mode
Author(s): Payal Verma; S. N. Khonina; V. S. Pavelyev; S. A. Fomchenkov; B. V. Uma
Show Abstract
Highly sensitive devices for primary signal processing of the micromechanical capacitive transducers
Author(s): B. Konoplev; E. Ryndin; I. Lysenko; M. Denisenko; A. Isaeva
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Integral planar supercapacitor with CNT-based composite electrodes for heat-sensitive MEMS and NEMS
Author(s): E. Lebedev; A. Alekseyev; I. Gavrilin; A. Sysa; E. Kitsyuk; R. Ryazanov; D. Gromov
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Biosensor platform based on carbon nanotubes covalently modified with aptamers
Author(s): I. A. Komarov; E. I. Rubtsova; A. V. Golovin; I. I. Bobrinetskiy
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Angular MET sensor for precise azimuth determination
Author(s): Dmitry Zaitsev; Alexander Antonov; Vladimir Krishtop
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The simulation model of planar electrochemical transducer
Author(s): D. A. Zhevnenko; S. S. Vergeles; T. V. Krishtop; D. V. Tereshonok; E. S. Gornev; V. G. Krishtop
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The planar silicon-based microelectronic technology for electrochemical transducers
Author(s): A. V. Novikov; A. E. Egorchikov; A. N. Dolgov; E. S. Gornev; V. G. Popov; I. V. Egorov; V. G. Krishtop
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The precision seismometer based on planar electrochemical transducer
Author(s): A. S. Shabalina; V. G. Krishtop
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3D simulation of silicon micro-ring resonator with Comsol
Author(s): S. A. Degtyarev; V. V. Podlipnov; Payal Verma; S. N. Khonina
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Electro-optical converter of zero-order and second-order Bessel laser beams for the photolithography systems
Author(s): V. D. Paranin; S. N. Khonina
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The formation of photoresist film with thicknesses from 0.7 microns to 100 microns on surfaces with considerable relief by spray coating on the heated substrate
Author(s): Alexey V. Romashkin; Denis D. Levin; Roman Yu. Rozanov; Vladimir K. Nevolin
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Problems and prospects of maskless (B)EUV lithography
Author(s): N. I. Chkhalo; V. N. Polkovnikov; N. N. Salashchenko; M. N. Toropov
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Resistless lithography - selective etching of silicon with gallium doping regions
Author(s): D. Abdullaev; R. Milovanov; D. Zubov
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Features of local anodic oxidation process
Author(s): A. Belov; Yu. Chaplygin; S. Lemeshko; I. Sagunova; V. Shevyakov
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Deposition of polymers on structures with nano-gaps fabricated between carbon nanotubes by focused ion beam etching
Author(s): A. V. Romashkin; A. V. Emelianov; K. A. Tsarik; I. I. Bobrinetskiy
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Direct laser patterning of graphene-based biosensors
Author(s): I. A. Komarov; A. V. Golovin; E. I. Rubtsova; I. I. Bobrinetskiy
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III-Nitride advanced technologies and equipment for microelectronics
Author(s): S. I. Petrov; A. N. Alexeev; V. V. Mamaev; D. M. Krasovitsky; V. P. Chaly
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Plasma parameters and active species kinetics in CF4/O2/Ar gas mixture: effects of CF4/O2 and O2/Ar mixing ratios
Author(s): Junmyung Lee; Kwang-Ho Kwon; A. Efremov
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Technology for fabrication of sub-20 nm silicon planar nanowires array
Author(s): Andrey V. Miakonkikh; Andrey A. Tatarintsev; Alexander E. Rogozhin; Konstantin V. Rudenko
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Comparative study of CF4- and CHF3-based plasmas for dry etching applications
Author(s): A. Efremov; K.-H. Kwon; A. Morgunov; D. Shabadarova
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Cellular-automata model of oxygen plasma impact on porous low-K dielectric
Author(s): Askar Rezvanov; Igor V. Matyushkin; Oleg P. Gutshin; Evgeny S. Gornev
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Investigation of the reactive ion etching of Ge2Sb2Te5 thin films
Author(s): A. Shulyatev; A. Sherchenkov; D. Gromov; P. Lazarenko; A. Sysa; A. Kozmin
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A study of the vertical walls and the surface roughness GaAs after the operation in the combined plasma etching
Author(s): Viktor S. Klimin; Maxim S. Solodovnik; Vladimir A. Smirnov; Andrey V. Eskov; Roman V. Tominov; Oleg A. Ageev
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Low-damage plasma etching of porous low-k films in CF3Br and CF4 plasmas under low-temperature conditions
Author(s): A. Miakonkikh; I. Clemente; A. Vishnevskiy; K. Rudenko; M. Baklanov
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Elements for hard X-ray optics produced by cryogenic plasma etching of silicon
Author(s): Andrey V. Miakonkikh; Alexander E. Rogozhin; Konstantin V. Rudenko; Vladimir F. Lukichev; Vyacheslav A. Yunkin; Anatoly A. Snigirev
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Temperature switching waves in a silicon wafer on lamp-based heating
Author(s): Vladimir V. Ovcharov; Alexey L. Kurenya; Valery I. Rudakov; Valeriya P. Prigara
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Critical parameters of silicon wafer lamp-based annealing in high power flux of incoherent radiation
Author(s): Valeriya P. Prigara; Vladimir V. Ovcharov; Valery I. Rudakov; Alexey L. Kurenja
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Evolution of structural properties of Si(001) subsurface layer containing He bubbles by low temperature annealing
Author(s): Andrey A. Lomov; Kirill D. Shcherbachev; Yury M. Chesnokov; Dmitrii A. Kiselev; Andrew V. Miakonkikh
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Application of spectral ellipsometry to in situ diagnostics of atomic layer deposition of dielectrics on silicon and AlGaN
Author(s): Iosif E. Clemente; Andrey V. Miakonkikh
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Non-destructive determination of thickness of the dielectric layers using EDX
Author(s): S. A. Sokolov; E. A. Kelm; R. A. Milovanov; D. A. Abdullaev; L. N. Sidorov
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TDR method for determine IC’s parameters
Author(s): V. Timoshenkov; D. Rodionov; A. Khlybov
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Determination of mechanical stress in the silicon nitride films with a scanning electron microscope
Author(s): N. A. Djuzhev; E. E. Gusev; A. A. Dedkova; N. Patiukov
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Method of stress and measurement modes for research of thin dielectric films of MIS structures
Author(s): Vladimir V. Andreev; Vladimir M. Maslovsky; Dmitrii V. Andreev; Alexander A. Stolyarov
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Numerical simulation of thin-film microthermocouple for the research of dissipation in tunneling contact
Author(s): Vladislav V. Kravchenko; Vladimir A. Petukhov
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Classification automation of thermoplastic particles in a cured epoxy matrix according to their size on microscopic images
Author(s): Victoria A. Sablina; Alexander N. Varnavsky; Andrei N. Varnavsky
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Fundamentals of the fast neutral beams diagnostics
Author(s): V. Kudrya; Yu. Maishev
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Optical emission 2D-tomography of plasma: case of rectangular two-view scanning and diagonal symmetry of inhomogeneities
Author(s): A. V. Fadeev; K. V. Rudenko
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Experimental and theoretical investigations of quantum state transfer and decoherence processes in quasi-one-dimensional systems in multiple-quantum NMR experiments
Author(s): G. A. Bochkin; S. I. Doronin; S. G. Vasil'ev; A. V. Fedorova; E. B. Fel'dman
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Quantum entanglement and quantum discord in dimers in multiple quantum NMR experiments
Author(s): S. A. Gerasev; E. I. Kuznetsova
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Multifunctional quantum node based on double quantum dot in laser and cavity fields
Author(s): Alexander V. Tsukanov
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Diamond chip under single-photon driving as a high spatial resolution quantum magnetometer and electrometer
Author(s): Alexander V. Tsukanov; Igor Yu. Kateev
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Stark-shift based quantum dot-cavity electrometer
Author(s): Alexander V. Tsukanov; Vadim G. Chekmachev
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Single-photon transmission and spectroscopy of diamond microring isomers
Author(s): Alexander V. Tsukanov; Igor Yu. Kateev; Maxim S. Rogachev
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Single-electron solitons in magnetic field
Author(s): M. Rudenko; D. Svintsov; S. Filippov; V. Vyurkov
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Continuous-time quantum walk of two interacting fermions on a cycle graph
Author(s): Alexey A. Melnikov; Leonid E. Fedichkin
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Quantum-classical crossover in quantum walks mixing time
Author(s): Leonid Fedichkin; Fedor Meshchaninov
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Broadband biphotons in the single spatial mode through high pump focusing and walk-off effect
Author(s): K. G. Katamadze; S. P. Kulik
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Quantum states tomography with noisy measurement channels
Author(s): Yu. I. Bogdanov; B. I. Bantysh; N. A. Bogdanova; A. B. Kvasnyy; V. F. Lukichev
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Schmidt decomposition and multivariate statistical analysis
Author(s): Yu. I. Bogdanov; N. A. Bogdanova; D. V. Fastovets; V. F. Luckichev
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Study of higher order correlation functions and photon statistics using multiphoton-subtracted states and quadrature measurements
Author(s): Yu. I. Bogdanov; K. G. Katamadze; G. V. Avosopyants; L. V. Belinsky; N. A. Bogdanova; S. P. Kulik; V. F. Lukichev
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Analysis of quantum tomography protocol efficiency for triphoton polarization states
Author(s): Yu. I. Bogdanov; Yu. A. Kuznetsov; G. V. Avosopyants; K. G. Katamadze; L. V. Belinsky; N. A. Borshchevskaya
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Numerical characteristics of quantum computer simulation
Author(s): A. Chernyavskiy; K. Khamitov; A. Teplov; V. Voevodin; Vl. Voevodin
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Effective computation of quantum discord in a multiqubit spin chain
Author(s): A. Chernyavskiy
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Effect of crosstalk on QBER in QKD in urban telecommunication fiber lines
Author(s): Vladimir L. Kurochkin; Yuriy V. Kurochkin; Alexander V. Miller; Alexander S. Sokolov; Alan A. Kanapin
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Single photon detector design features
Author(s): Sergey V. Zaitsev; Vladimir L. Kurochkin; Yury V. Kurochkin
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Fast polarization QKD scheme based on LiNbO3 phase modulators
Author(s): A. Duplinskiy; V. Ustimchik; A. Kanapin; Y. Kurochkin
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Computer simulation of quantum effects in Tavis-Cummings model and its applications
Author(s): Yuri I. Ozhigov; Nikita A. Skovoroda; Vitalii Y. Ladunov
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Dark states of atomic ensembles: properties and preparation
Author(s): Yuri I. Ozhigov
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Selective measurement of quantronium qubit states by using of mesoscopic non-linear oscillator
Author(s): M. V. Denisenko; A. M. Satanin
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