Share Email Print
cover

Proceedings of SPIE Volume 0998

Excimer Beam Applications
Editor(s): Anthony N. Pirri; Bernhard P. Piwczyk
Format Member Price Non-Member Price
Softcover $105.00 * $105.00 *

*Available as a photocopy reprint only. Allow two weeks reprinting time plus standard delivery time. No discounts or returns apply.


Volume Details

Volume Number: 0998
Date Published: 16 December 1988
Softcover: 18 papers (134) pages
ISBN: 9780819400338

Table of Contents
show all abstracts | hide all abstracts
Narrow-Band KrF Excimer Laser -- Tunable And Wavelength Stabilized
Author(s): Koich Wani; Yoshiro Ogata; Yoshiaki Watarai; Takuhiro Ono; Takeo Miyata; Reiji Sano; Yasuaki Terui
Show Abstract
Excimer Laser Light Delivery System For Micromachining
Author(s): K . J. Harte; B. P. Piwczyk
Show Abstract
Improved Beam Uniformity In Excimer Lasers
Author(s): U. Sowada; J. Sercel; H. J. Kahlert; D. Basting; L. Austin
Show Abstract
A Versatile Excimer Laser Processing System
Author(s): G . Darcy Poulin; Peter A. Eisele
Show Abstract
Bright Photoelectron Beams Emitted From Excimer-Laser Illuminated LaB6
Author(s): Peter E. Oettinger
Show Abstract
KrF Laser Induced Color Centers In Commercial Fused Silicas
Author(s): Gary C. Escher
Show Abstract
A Deep UV Imaging System For Lithography And Process Development
Author(s): Paul Michaloski; Paul Dewa
Show Abstract
Incorporating Beam Diagnostics Into UV Laser Delivery Systems
Author(s): W . B . Telfair; P. R. Yoder; C. A. Martin; R. L. Labinger; W. C. Fricke
Show Abstract
Temperature Changes During Photoablation Processes
Author(s): M. Steinmetz
Show Abstract
XeCl Laser Ablation Of Organic Polymers: Characterization Of Debris And Its Effect On Surface Morphology
Author(s): Donald L. Singleton; George Paraskevopoulos; Robert S. Irwin; Roderick S. Taylor; Kurt E. Leopold
Show Abstract
Excimer-Laser Spectroscopy Of Polymeric Materials
Author(s): A. L. Rodgers; S. R. Ahmad
Show Abstract
Assisted Arf Excimer Photo-Etching Of Mercury Cadmium Telluride (MGT) Semiconductor
Author(s): Alain Azema; Jean Botineau; Philippe Gaucherel; Jean-Claude Roustan
Show Abstract
Industrial Microprocessing Applications Of Excimer Lasers
Author(s): J. Sercel; U. Sowada; H J Kahlert; D. Basting; L. Austin
Show Abstract
Advances In Excimer Laser Materials Processing
Author(s): G. Darcy Poulin; Peter A. Eisele
Show Abstract
Excimer Laser Induced Chemical Etching Of Silicon With Halogen-Containing Gases
Author(s): W. Sesselmann; F. Bachmann
Show Abstract
Excimer Laser Curing Of Polymer Coatings
Author(s): David Klick; M. Alfred Akerman; George L. Paul; Darko Supurovic; Haruki Tsuda
Show Abstract
Focussed Excimer Laser Beams: A Technique For Selective Micropatterning
Author(s): Jean M. Hagerhorst; Modest M. Oprysko
Show Abstract
Laser-Induced Forward Transfer Of Metal Oxides To Trim The Frequency Of Surface Acoustic Wave Resonator Devices
Author(s): James A. Greer; Thomas E. Parker
Show Abstract

© SPIE. Terms of Use
Back to Top