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Proceedings of SPIE Volume 0803

Micromachining of Elements with Optical and Other Submicrometer Dimensional and Surface Specifications
Editor(s): Manfred Weck
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Volume Details

Volume Number: 0803
Date Published: 11 January 1987
Softcover: 21 papers (167) pages
ISBN: 9780892528387

Table of Contents
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Mass-Production Of Diffraction Limited Replicated Objective Lenses For Compact-Disc Players.
Author(s): Joop Andrea
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High Power Pulsed Gas Lasers
Author(s): W. J. Witteman
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Precision Finishing Of Ceramics
Author(s): T. G. Bifano; P. N. Blake; T. A. Dow; R. O. Scattergood
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Vertical Cantilever Beams For Optical Switching
Author(s): J. N. Shepherd; P. S. Dobson; I. W. Stanley
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Realisation Of Polarisation Sensitive And Frequency Selective Surfaces On Microwave Reflectors By Laser Evaporation
Author(s): R. Halm; Th. Kupper; A. Fischer
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Computer Controlled Ion Beam Machining For Precision Surface Finishing And Figuring
Author(s): S. T. Davies; D. J. Whitehouse
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Roughness Generation In Precision Grinding Of Small Optical Surfaces
Author(s): J. Franse; G. J. de Jong
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The Accuracy Of Air Bearing Systems
Author(s): K. J. Stout
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Wafer Slicing
Author(s): Werner F. Struth; Klaus Steffens; Wilfried Konig
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Accuracy Limits And Potential Applications Of The LIGA Technique In Integrated Optics
Author(s): D. Munchmeyer; W. Ehrfeld
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The Importance And Limitations Of The Diamond Tool In Micro-Machining
Author(s): Harold R. Dillow
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Checking Surface Modulation On Metaloptics By Analysing Ultraprecision Machines
Author(s): M. Weck; K. Modemann
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Air Bearings Machined On Ultra Precision, Hydrostatic CNC-Lathe
Author(s): Pierre H. Knol; Denis Szepesi; Jan M. Deurwaarder
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Testing The Dynamic Behaviour Of Air-Bearing Machine Tools
Author(s): Rudiger Haberland
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A Practical Method Of Machine Tool Condition Monitoring By Analysis Of Component Surface Finish Data
Author(s): H. T. Hingle
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Computer Simulation Of An In-Process Surface Finish Sensor.
Author(s): Jan H. Rakels
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Evaluation And Specification Of Micro-Machined Optics For Laser Printing
Author(s): Sanwal P. Sarraf
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Mapping The Performance Of Surface-Measuring Instruments
Author(s): Margaret Stedman
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Table Motion Systems
Author(s): T. Bispink; M. Weck
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Micro-Machining In High Volume Production Example: Ball Pen Writing Points
Author(s): Friedrich Schaechter
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An Infinitely Stiff Very High Precision Actuator
Author(s): P. D. Atherton; T. R. Hicks; N. K. Reay; R. C. Sidey
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