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Proceedings of SPIE Volume 0749

Metrology: Figure and Finish
Editor(s): Bruce E. Truax
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Volume Details

Volume Number: 0749
Date Published: 20 April 1987
Softcover: 16 papers (132) pages
ISBN: 9780892527847

Table of Contents
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Optical Inspection Tool For Disk Substrates
Author(s): Scott J. Sherratt
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Interferometer Accuracy And Precision
Author(s): Lars A. Selberg
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Two Approaches For Scanning Surface Topography Using A Reflected Beam
Author(s): Robert A. Bruce
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In-Situ Shearing Interferometry Of National Synchrotron Light Source Mirrors
Author(s): Shi-nan Qian; Harvey Rarback; Deming Shu; Peter Z. Takacs
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Fabrication Of An 8:1 Ellipsoidal Mirror For A Synchrotron X-Ray Microprobe
Author(s): Keith W. Jones; Peter Z. Takacs; Jerome B. Hastings; John M. Casstevens; Christopher D. Pionke
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Reduction Of Instrument Signature In Near Angle Scatter Measurements
Author(s): John C. Stover; Kyle A. Klicker; Daniel R. Cheever; Fredrick M. Cady
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Scanning Tunneling Microscopy (STM) Of A Diamond-Turned Surface And A Grating Replica
Author(s): R. A. Dragoset; T. V. Vorburger
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Design Of A Long Trace Surface Profiler
Author(s): Peter Z. Takacs; Shi-nan Qian; Jeffrey Colbert
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Comparison Of Wyko And Tis Measurements Of Surface Finish
Author(s): E. L. Church; G. M. Sanger; P. Z. Takacs
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Extension Of The Range Of Profile Measurements By Overlapping Successive Traces
Author(s): E. L. Church
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Frequency Analysis And Filtering Of Surface Profile Data
Author(s): Scott L. DeVore
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Phase Measurements With A Type 2 Microscope
Author(s): G. S. Kino; P. C.D. Hobbs; T. R. Corle
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2-Frequency Laser Surface Prof Ilometry
Author(s): Michael Hercher; Errol Fraser; Bob MacDonald
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Surface Roughness Evaluation By Image Analysis In Nomarski Dic Microscopy
Author(s): M. J. Fairlie; J. G. Akkerman; R. S. Timsit; J. M. Zavislan
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Surface Roughness Measurements Using A Nomarski Type Scanning Instrument
Author(s): Thomas C. Bristow; Kevork Arackellian
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Correlation Between The Performance And Metrology Of Glancing-Incidence Synchrotron-Radiation Mirrors Containing Millimeter-Wavelength Shape Errors
Author(s): P. Z. Takacs; R. C. Hewitt; E. L. Church
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