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Proceedings of SPIE Volume 0385

Laser Processing of Semiconductor Devices
Editor(s): Charles C. Tang
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Volume Details

Volume Number: 0385
Date Published: 9 August 1983
Softcover: 24 papers (161) pages
ISBN: 9780892524204

Table of Contents
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Recent Advances In Laser Processing Of Semiconductors
Author(s): A. Kestenbaum
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Novel Laser Scanning Techniques For Si-On-Insulator Devices
Author(s): L. E. Trimble; G. K. Celler
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Laser Applications To Semiconductor Device Processing
Author(s): Rajiv R. Shah
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Some New Laser Processing Applications In Microelectronics
Author(s): Donald L. Parker
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Gas Immersion Laser Diffusion (GILDing)
Author(s): Robert J. Pressley
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Laser Activated Flow For Integrated Circuit Fabrication
Author(s): M. Delfino
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Melt Depth And Regrowth Kinetics In Pulsed Laser Annealing Of Silicon And Gallium Arsenide
Author(s): G. J. Galvin; Michael O. Thompson; J. W. Mayer; P. S. Peercy; R. B. Hammond
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Circuit Simulation Of Three-Dimensional Metal Oxide Semiconductor Field Effect Transistor (MOSFET) Device Structures In Beam-Recrystallized Polysilicon Films
Author(s): James F. Gibbons; Martin D. Giles; Kwing F. Lee; James T. Walker
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Conduction Processes In Polysilicon: Effects Of Laser Restructuring
Author(s): A. N. Khondker; R. R. Shah; D. M. Kim
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Electronic Properties Of Grain Boundaries In Polycrystalline Silicon
Author(s): E. S. Yang; E. Poon; H. L. Evans; W. Hwang; J. S. Song; C. M. Wu
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Effects Of Grain Boundaries On Channel Conduction In Thin Film Polysilicon On Silicon-Dioxide Metal Oxide Semiconductor Field Effect Transistors (SOI MOSFETs)
Author(s): J. G. Fossum; A. Ortiz; H.-K Lim; H.-W. Lam
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High-Performance Thin Film Transistors In CO[sub]2[/sub] Laser Crystallized Silicon On Quartz
Author(s): A. Chiang; W. P. Meuli; N. M. Johnson; M. H. Zarzycki
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Characterization Of Laser Blown Molydisilicide Links
Author(s): Scott Wills; Joe McPherson
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Laser Microsurgery And Fabrication Of Integrated Circuits
Author(s): J. R. Moulic; Y. C. Kiang; R. W. Lang; J. C. Logue
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Laser Redundancy: Past, Present, And Future
Author(s): Edward J. Swenson
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Laser Targeting Considerations In Redundant Memory Repair
Author(s): D. Smart; R. Reilly; B. Wells
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Precision Laser Irradiation System
Author(s): Eugene G. Arthurs; Kuo-Ching Liu
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Laser Microchemistry For Direct Writing Of Microstructures
Author(s): R. M. Osgood; D. J. Ehrlich; T. F. Deutsch; D. J. Silversmith; A. Sanchez
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Maskless Laser Plating Techniques For Microelectronic Materials
Author(s): R. J. von Gutfeld; M. H. Gelchinski; L. T. Romankiw
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Microelectronic Thin Film Deposition By Ultraviolet Laser Photolysis
Author(s): P. K. Boyer; C. A. Moore; R. Solanki; W. K. Ritchie; G. A. Roche; G. J. Collins
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Rapid Laser-Induced Chemical Etching Of Semiconductors
Author(s): F. A. Houle
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Laser Chemical Etching Method For Drilling Vias In GaAs
Author(s): Armin W. Tucker; Milton Birnbaum
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Laser Plasma X-Ray Source Optimization For Lithography
Author(s): Harold M. Epstein; Philip J. Mallozzi; Bernerd E. Campbell
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Laser-Based Studies Of Chemical Vapor Deposition
Author(s): W. G. Breiland; M. E. Coltrin; Pauline Ho
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