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Proceedings Paper

Sensitivity limits of guided modes in silicon integrated waveguide-based sensors
Author(s): Oleg Żero; Astrid Aksnes
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Paper Abstract

We present a numerical study of the sensitivity of guided modes due to the presence of small mechanical vibrations. Analysis is performed utilising finite elements method (FEM) with help of both 2D and 3D models, where changes to the field distributions associated with the guided modes are computed in order to read the position of a conducting plate suspended over a waveguide. The sensitivity related to the guided modes is analysed and a possibility to improve the sensitivity by combining the sensing effect of several modes is investigated. By utilizing FEM, the optical response to the system is studied in terms of both indiviudal response to the perturbation and the collective response by using the concept of multimode interference (MMI). The preliminary models predict a theoretical sensitivity limit of 2:4 %/nm in terms of normalised power transmission for a MMI of only 4:1 μm length.

Paper Details

Date Published: 30 November 2012
PDF: 9 pages
Proc. SPIE 8561, Advanced Sensor Systems and Applications V, 85610P (30 November 2012); doi: 10.1117/12.999904
Show Author Affiliations
Oleg Żero, Norwegian Univ. of Science and Technology (Norway)
Astrid Aksnes, Norwegian Univ. of Science and Technology (Norway)

Published in SPIE Proceedings Vol. 8561:
Advanced Sensor Systems and Applications V
Brian Culshaw; Yanbiao Liao; Anbo Wang; Xiaoyi Bao; Xudong Fan, Editor(s)

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