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Proceedings Paper

Measurement of the mirror reflective spectrum of typical roughness surface in the ultraviolet band
Author(s): Lu Bai; Zhen-sen Wu; Yan-hui Li
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Paper Abstract

Reflective light of a surface contains many features of a surface. It is usually used as a powerful tool for process in situ or ex suit monitoring because of its non contact and non destructive nature. Scatter measurements of some typical samples in the UV band are performed by using an ellipsometry WVASE 32 made by J. A. Woolam Co. Inc. The mirror-direction reflective measurement results of different sample obtained by ellipsometer are compared. And these kinds of researches about measuring and analyzing of typical roughness samples in the ultraviolet band have significant meanings in a lot of related fields.

Paper Details

Date Published: 26 November 2012
PDF: 6 pages
Proc. SPIE 8557, Optical Design and Testing V, 85570V (26 November 2012); doi: 10.1117/12.999902
Show Author Affiliations
Lu Bai, Xidian Univ. (China)
Zhen-sen Wu, Xidian Univ. (China)
Yan-hui Li, Xidian Univ. (China)

Published in SPIE Proceedings Vol. 8557:
Optical Design and Testing V
Yongtian Wang; Chunlei Du; Hong Hua; Kimio Tatsuno; H. Paul Urbach, Editor(s)

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