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Proceedings Paper

Research on the key parameters influencing the anti-vibration capability of time-frequency-domain interferometer
Author(s): Fanghua Zhang; Qun Hao; Yao Hu; Qiudong Zhu
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Paper Abstract

This paper introduces a time-and-frequency-domain (TFD) anti-noise phase-shifting interferometry, and designs an experimental system to test the anti-vibration ability of this method. In the system, a plane mirror is measured under the external vibrations simulated by the standard mirror propelled by PZT. During the measurement, each of the key parameters is assigned different values. By analyzing the testing results, the law of the parameters’ influence on system anti-vibration capability can be obtained. According to the law, the optimization parameters can be determined so that the system has the maximum anti- vibration capability.

Paper Details

Date Published: 26 November 2012
PDF: 8 pages
Proc. SPIE 8557, Optical Design and Testing V, 85571K (26 November 2012); doi: 10.1117/12.999642
Show Author Affiliations
Fanghua Zhang, Beijing Institute of Technology (China)
Qun Hao, Beijing Institute of Technology (China)
Yao Hu, Beijing Institute of Technology (China)
Qiudong Zhu, Beijing Institute of Technology (China)

Published in SPIE Proceedings Vol. 8557:
Optical Design and Testing V
Yongtian Wang; Chunlei Du; Hong Hua; Kimio Tatsuno; H. Paul Urbach, Editor(s)

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