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Proceedings Paper

Planar alignment sensor based on Rayleigh interference in two wavelengths
Author(s): Yao Hu
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Paper Abstract

Precise alignment of planar optical element is common in industry or scientific research. In this paper, a planar alignment sensor based on Rayleigh interference in two wavelengths is proposed. Monochromatic probing lasers in two wavelengths point normally to the two mirror-reflection planes, and the reflective beams carrying alignment information are focused by a lens to form Rayleigh interference patterns at the focal plane. Four-quadrant detectors pick up the patterns and output angular and coplanar adjustment signals according to the rotational-symmetry and axial-symmetry of the pattern. Preliminary experiment demonstrated the feasibility of the method.

Paper Details

Date Published: 26 November 2012
PDF: 6 pages
Proc. SPIE 8557, Optical Design and Testing V, 85572M (26 November 2012); doi: 10.1117/12.999598
Show Author Affiliations
Yao Hu, Beijing Institute of Technology (China)


Published in SPIE Proceedings Vol. 8557:
Optical Design and Testing V
Yongtian Wang; Chunlei Du; Hong Hua; Kimio Tatsuno; H. Paul Urbach, Editor(s)

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