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Proceedings Paper

High power narrow far-field broad-stripe semiconductor lasers with second-order metal grating feedback
Author(s): Yong Yi Chen; Li Qin; Peng Jia; Yong Qiang Ning; Yun Liu; Li Jun Wang; Jin Long Zhang
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Paper Abstract

In order to obtain high power semiconductor lasers with narrow far-field and improve the characteristics of the output beam, a broad-stripe distributed feedback semiconductor laser with second-order metal surface gratings emitting around 940 nm is fabricated, based on the holographic photolithography and wet etching technology. The second-order metal gratings are located at the metal/semiconductor interface in the p-Al0.2GaIn0.49P cladding layer, with 960 μm×142 μm grating area, and the metal gratings also act as ohmic contact of the p side. The grating period is 287nm, the grating depth is 120 nm, and the grating duty cycle is 0.5. For the laser with second-order metal gratings, the powers is 718 mW, spectral linewidth (FWHM) is less than 0.1 nm, lateral far field angle (FWHM) is 2.7° and the vertical far-field angle (FWHM) is 16.7° in the current of 1.5 A. For the laser without gratings in the current of 1.5 A, the spectral linewidth is 1.3 nm, the lateral far-field angle is 7.3° and the vertical far-field angle is 36°, both worse than lasers with second-order metal surface gratings.

Paper Details

Date Published: 29 November 2012
PDF: 6 pages
Proc. SPIE 8552, Semiconductor Lasers and Applications V, 85520E (29 November 2012); doi: 10.1117/12.999392
Show Author Affiliations
Yong Yi Chen, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Univ. of Chinese Academy of Sciences (China)
Li Qin, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Peng Jia, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Univ. of Chinese Academy of Sciences (China)
Yong Qiang Ning, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Yun Liu, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Li Jun Wang, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Jin Long Zhang, Changchun Institute of Optics, Fine Mechanics and Physics (China)


Published in SPIE Proceedings Vol. 8552:
Semiconductor Lasers and Applications V
Ning Hua Zhu; Jinmin Li; Frank H. Peters; Changyuan Yu, Editor(s)

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