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Proceedings Paper

The measurement of optical reflector with complex surface using nano-CMM
Author(s): Zhichao Wu; Tong Guo; Jinping Chen; Xing Fu; Xiaotang Hu
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Paper Abstract

Among variety of methods to measure complex surfaces, coordinate measurement is widely used in reverse engineering and measuring complex topography. In this paper, a coordinate measuring system based on 3D tactile probe is introduced. This system can measure complex surface with resolution of 1nm, measuring range of 25mm×25mm×5mm. The component of the measuring system, the principle and advantages of the probe are also introduced as the major part. We used the nano-CMM to test an optical reflector with sine curve surface. The fluctuation of the topography is about 5 micrometers. The result is compared with the data of AFM and the source of deviation is analyzed in the conclusions.

Paper Details

Date Published: 26 November 2012
PDF: 11 pages
Proc. SPIE 8557, Optical Design and Testing V, 85570T (26 November 2012); doi: 10.1117/12.999383
Show Author Affiliations
Zhichao Wu, Tianjin Univ. (China)
Tong Guo, Tianjin Univ. (China)
Jinping Chen, Tianjin Univ. (China)
Xing Fu, Tianjin Univ. (China)
Xiaotang Hu, Tianjin Univ. (China)


Published in SPIE Proceedings Vol. 8557:
Optical Design and Testing V
Yongtian Wang; Chunlei Du; Hong Hua; Kimio Tatsuno; H. Paul Urbach, Editor(s)

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