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Proceedings Paper

Beam splitters of metal-dielectric reflective gratings
Author(s): Anduo Hu; Changhe Zhou; Hongchao Cao; Jun Wu; Jia Wei
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Paper Abstract

Beam splitters are important optical components. In this paper, reflective 1×2 and 1×3 beam splitters based on metaldielectric gratings are designed at wavelength of 1064 nm for TE polarization. Alumina, silver, alumina and fused silica films are coated on substrate in sequence. On the top fused silica film, grating with rectangular grooves are etched. Rigorous coupled-wave analysis (RCWA) and simulated annealing (SA) algorithm are employed to optimize grating parameters such as period, depth, thickness of connecting layer and incident angle. An optimized 1×2 beam splitter can achieve perpendicular beam splitting with diffraction efficiency of 49.2% at the -1st order and 49.1% at the 0th order for incident angle of 30°. When incident angle is 5°, the diffraction efficiencies of the optimized 1×3 beam splitter are 32.66% at the -1st order, 32.71% at the 0th order and 32.72% at the 1st order. To guide the fabrication and operation of beam splitters, the tolerance of grating period, depth, thickness of connecting layer are calculated. The optimized 1×2 and 1×3 beam splitters exhibit high efficiencies and uniformity, which should be useful in applications.

Paper Details

Date Published: 26 November 2012
PDF: 6 pages
Proc. SPIE 8556, Holography, Diffractive Optics, and Applications V, 85560Y (26 November 2012); doi: 10.1117/12.999299
Show Author Affiliations
Anduo Hu, Shanghai Institute of Optics and Fine Mechanics (China)
Changhe Zhou, Shanghai Institute of Optics and Fine Mechanics (China)
Hongchao Cao, Shanghai Institute of Optics and Fine Mechanics (China)
Jun Wu, Shanghai Institute of Optics and Fine Mechanics (China)
Jia Wei, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 8556:
Holography, Diffractive Optics, and Applications V
Yunlong Sheng; Chongxiu Yu; Linsen Chen, Editor(s)

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