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Proceedings Paper

Micromachined piezoelectric traveling-wave micromotors for intelligent systems
Author(s): Jian Zhang; Dexin Shen; Weiyuan Wang; Haiqing Gong
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Proc. SPIE 3985, Smart Structures and Materials 2000: Smart Structures and Integrated Systems, ; doi: 10.1117/12.998726
Show Author Affiliations
Jian Zhang, Nanyang Technological Univ. (Singapore)
Dexin Shen, State Key Lab. of Transducer Technology (China)
Weiyuan Wang, State Key Lab. of Transducer Technology (China)
Haiqing Gong, Nanyang Technological Univ. (Singapore)


Published in SPIE Proceedings Vol. 3985:
Smart Structures and Materials 2000: Smart Structures and Integrated Systems
Norman M. Wereley, Editor(s)

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