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Proceedings Paper

Fabrication of nanostructured thin films by PLA
Author(s): Vladimir I. Marine
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Proc. SPIE 3933, Laser Applications in Microelectronic and Optoelectronic Manufacturing V, ; doi: 10.1117/12.998270
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Vladimir I. Marine, Univ. Aix-Marseille I & II (France)


Published in SPIE Proceedings Vol. 3933:
Laser Applications in Microelectronic and Optoelectronic Manufacturing V
Henry Helvajian; Koji Sugioka; Malcolm C. Gower; Jan J. Dubowski, Editor(s)

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