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Proceedings Paper

Growth mechanism of nanocrystalline silicon films
Author(s): Ying Xue Li; Xing Zhang; Yang Yuan Wang; Hongyi Lin; Yan Na Gao
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Proc. SPIE 3899, Photonics Technology into the 21st Century: Semiconductors, Microstructures, and Nanostructures, ; doi: 10.1117/12.997962
Show Author Affiliations
Ying Xue Li, Peking Univ. (China)
Xing Zhang, Peking Univ. (China)
Yang Yuan Wang, Peking Univ. (China)
Hongyi Lin, Beijing Institute of Technology (China)
Yan Na Gao, Beijing Institute of Technology (China)


Published in SPIE Proceedings Vol. 3899:
Photonics Technology into the 21st Century: Semiconductors, Microstructures, and Nanostructures

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