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Proceedings Paper

Tolerance design and error evaluation for microhole based on fractal geometry
Author(s): Zhengao Xu; Haifeng Du; Junwei Zhao
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Proc. SPIE 3893, Design, Characterization, and Packaging for MEMS and Microelectronics, ; doi: 10.1117/12.997904
Show Author Affiliations
Zhengao Xu, Huazhong Univ. of Science and Technology (China)
Haifeng Du, Huazhong Univ. of Science and Technology (China)
Junwei Zhao, Huazhong Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 3893:
Design, Characterization, and Packaging for MEMS and Microelectronics
Bernard Courtois; Serge N. Demidenko, Editor(s)

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