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Proceedings Paper

Bulk micromachined silicon aperture for counting blood cells: fabrication and modeling
Author(s): Kirthi Roberts; M. Parameswaran; Margo M. Moore; Marek Syrzycki
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Date Published:
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Proc. SPIE 3891, Electronics and Structures for MEMS, ; doi: 10.1117/12.997878
Show Author Affiliations
Kirthi Roberts, Simon Fraser Univ. (Canada)
M. Parameswaran, Simon Fraser Univ. (Canada)
Margo M. Moore, Simon Fraser Univ. (Canada)
Marek Syrzycki, Simon Fraser Univ. (Canada)


Published in SPIE Proceedings Vol. 3891:
Electronics and Structures for MEMS
Neil W. Bergmann; Olaf Reinhold; Norman C. Tien, Editor(s)

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