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Proceedings Paper

Drawing accuracy evaluation of advanced electron-beam mask writing system
Author(s): Satoshi Yamasaki; Kenji Ootoshi; Noriaki Nakayamada; Kazuto Matsuki; Souji Koikari; Yuuji Fukudome; Yasuo Suzuki; Tomohiro Iijima; Hideyuki Tsurumaki; Kiminobu Akeno; Ryoichi Hirano; Shinsuke Nishimura; Noboru Yamada; Yoshiaki Hattori; Shuichi Tamamushi; Toru Tojo; Kiyoshi Hattori; Takayuki Abe; Munehiro Ogasawara; Hitoshi Higurashi; Yoji Ogawa; Tadahiro Takigawa; Hirokazu Yamada; Seiichi Tsuchiya; Mitsunobu Katayama; Kimio Suzuki; Kazuo Tsuji; Koji Handa; Hiroshi Hoshino; Masaki Toriumi; Yoshiaki Tada; Ryoji Yoshikawa
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Paper Details

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Proc. SPIE 3873, 19th Annual Symposium on Photomask Technology, ; doi: 10.1117/12.997705
Show Author Affiliations
Satoshi Yamasaki, Toshiba Machine Co., Ltd. (Japan)
Kenji Ootoshi, Toshiba Corp. (Japan)
Noriaki Nakayamada, Toshiba Machine Co., Ltd. (Japan)
Kazuto Matsuki, Toshiba Machine Co., Ltd. (Japan)
Souji Koikari, Toshiba Corp. (Japan)
Yuuji Fukudome, Toshiba Corp. (Japan)
Yasuo Suzuki, Toshiba Corp. (Japan)
Tomohiro Iijima, Toshiba Machine Co., Ltd. (Japan)
Hideyuki Tsurumaki, Toshiba Corp. (Japan)
Kiminobu Akeno, Toshiba Corp. (Japan)
Ryoichi Hirano, Toshiba Machine Co., Ltd. (Japan)
Shinsuke Nishimura, Toshiba Corp. (Japan)
Noboru Yamada, Toshiba Corp. (Japan)
Yoshiaki Hattori, Toshiba Machine Co., Ltd. (Japan)
Shuichi Tamamushi, Toshiba Machine Co., Ltd. (Japan)
Toru Tojo, Toshiba Machine Co., Ltd. (Japan)
Kiyoshi Hattori, Toshiba Corp. (Japan)
Takayuki Abe, Toshiba Corp. (Japan)
Munehiro Ogasawara, Toshiba Corp. (Japan)
Hitoshi Higurashi, Toshiba Corp. (Japan)
Yoji Ogawa, Toshiba Corp. (Japan)
Tadahiro Takigawa, Toshiba Corp. (Japan)
Hirokazu Yamada, Toshiba Machine Co., Ltd. (Japan)
Seiichi Tsuchiya, Toshiba Machine Co., Ltd. (Japan)
Mitsunobu Katayama, Toshiba Machine Co., Ltd. (Japan)
Kimio Suzuki, Toshiba Machine Co., Ltd. (Japan)
Kazuo Tsuji, Toshiba Machine Co., Ltd. (Japan)
Koji Handa, Toshiba Machine Co., Ltd. (Japan)
Hiroshi Hoshino, Toshiba Corp. (Japan)
Masaki Toriumi, Toshiba Corp. (Japan)
Yoshiaki Tada, Toshiba Machine Co., Ltd. (Japan)
Ryoji Yoshikawa, Toshiba Corp. (Japan)


Published in SPIE Proceedings Vol. 3873:
19th Annual Symposium on Photomask Technology
Frank E. Abboud; Brian J. Grenon, Editor(s)

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