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Proceedings Paper

Detection and characterization of defects in multilayer-coated mask blanks of EUVL
Author(s): Christopher C. Walton; Cindy C. Larson; Shon T. Prisbrey; Abbie L. Warrick; Karl Child Wilhelmsen; Scott C. Burkhart
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Proc. SPIE 3873, 19th Annual Symposium on Photomask Technology, ; doi: 10.1117/12.997698
Show Author Affiliations
Christopher C. Walton, Lawrence Livermore National Lab. (United States)
Cindy C. Larson, Lawrence Livermore National Lab. (United States)
Shon T. Prisbrey, Lawrence Livermore National Lab. (United States)
Abbie L. Warrick, Lawrence Livermore National Lab. (United States)
Karl Child Wilhelmsen, Lawrence Livermore National Lab. (United States)
Scott C. Burkhart, Lawrence Livermore National Lab. (United States)


Published in SPIE Proceedings Vol. 3873:
19th Annual Symposium on Photomask Technology
Frank E. Abboud; Brian J. Grenon, Editor(s)

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