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Proceedings Paper

Grating-assisted superresolution for scanning optical systems
Author(s): Hiroshi Ooki; Katsura Otaki; Hisao Osawa; Jun Saito
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Proc. SPIE 3864, Joint International Symposium on Optical Memory and Optical Data Storage 1999, ; doi: 10.1117/12.997640
Show Author Affiliations
Hiroshi Ooki, Nikon Corp. (Japan)
Katsura Otaki, Nikon Corp. (Japan)
Hisao Osawa, Nikon Corp. (Japan)
Jun Saito, Nikon Corp. (Japan)


Published in SPIE Proceedings Vol. 3864:
Joint International Symposium on Optical Memory and Optical Data Storage 1999

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