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Proceedings Paper

Aperture formation and mechanism of super-RENS
Author(s): Junji Tominaga; Nobufumi Atoda
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Paper Abstract

The formation and mechanism of nanometer sized apertures of super-resolution nearfield structure (Super-RENS) was thermally, mechanically and optically investigated. An aperture of an antimony film forced in a high compressive stress showed the resolution of less than 100 nm, whereas the film forced in a tensile stress did not. An aperture formation mechanism is proposed by balance between the aperture formation energy and the surface energy including the internal stresses.

Paper Details

Date Published: 28 June 1999
PDF: 3 pages
Proc. SPIE 3864, Joint International Symposium on Optical Memory and Optical Data Storage 1999, 38643B (28 June 1999); doi: 10.1117/12.997590
Show Author Affiliations
Junji Tominaga, National Institute for Advanced Interdisciplinary Research (Japan)
Nobufumi Atoda, National Institute for Advanced Interdisciplinary Research (Japan)


Published in SPIE Proceedings Vol. 3864:
Joint International Symposium on Optical Memory and Optical Data Storage 1999
Shigeo R. Kubota; Ryuichi Katayama; Douglas G. Stinson, Editor(s)

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