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Proceedings Paper

Requirements on LIGA-mask technology
Author(s): Franz Josef Pantenburg; Sven Achenbach; Juergen Mohr
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Proc. SPIE 3665, 15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98, ; doi: 10.1117/12.995987
Show Author Affiliations
Franz Josef Pantenburg, Forschungszentrum Karlsruhe (United States)
Sven Achenbach, Forschungszentrum Karlsruhe (Germany)
Juergen Mohr, Forschungszentrum Karlsruhe (Germany)


Published in SPIE Proceedings Vol. 3665:
15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98

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