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Proceedings Paper

Synthesis, photo and pyrolytic properties of polysilane photoresists
Author(s): Sonny A. Ekhorutomwen; T. M. Hsu; Samuel P. Sawan
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Proc. SPIE 3623, Organic Photonic Materials and Devices, ; doi: 10.1117/12.995689
Show Author Affiliations
Sonny A. Ekhorutomwen, Univ. of Massachusetts/Lowell (United States)
T. M. Hsu, Univ. of Massachusetts/Lowell (United States)
Samuel P. Sawan, Univ. of Massachusetts/Lowell (United States)


Published in SPIE Proceedings Vol. 3623:
Organic Photonic Materials and Devices
Bernard Kippelen, Editor(s)

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