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Proceedings Paper

Nucleation and growth of particles in laser-induced plasma plume
Author(s): Nobuhiro Aya; Frank G. Shi; Hirofumi Shimura; Takafumi Seto; Seisuke Kano; Shinya Sasaki
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Proc. SPIE 3618, Laser Applications in Microelectronic and Optoelectronic Manufacturing IV, ; doi: 10.1117/12.995646
Show Author Affiliations
Nobuhiro Aya, Shikoku National Research Instute, AIST (Japan)
Frank G. Shi, Univ. of California/Irvine (United States)
Hirofumi Shimura, Shikoku National Research Instute, AIST (Japan)
Takafumi Seto, Shikoku National Research Instute, AIST (Japan)
Seisuke Kano, Shikoku National Research Instute, AIST (Japan)
Shinya Sasaki, Shikoku National Research Instute, AIST (Japan)


Published in SPIE Proceedings Vol. 3618:
Laser Applications in Microelectronic and Optoelectronic Manufacturing IV
Jan J. Dubowski; Henry Helvajian; Ernst-Wolfgang Kreutz; Koji Sugioka, Editor(s)

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